JPS61106028U - - Google Patents

Info

Publication number
JPS61106028U
JPS61106028U JP19238384U JP19238384U JPS61106028U JP S61106028 U JPS61106028 U JP S61106028U JP 19238384 U JP19238384 U JP 19238384U JP 19238384 U JP19238384 U JP 19238384U JP S61106028 U JPS61106028 U JP S61106028U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
chamber
inner chamber
furnace body
reactor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19238384U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19238384U priority Critical patent/JPS61106028U/ja
Publication of JPS61106028U publication Critical patent/JPS61106028U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP19238384U 1984-12-17 1984-12-17 Pending JPS61106028U (US07413550-20080819-C00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19238384U JPS61106028U (US07413550-20080819-C00001.png) 1984-12-17 1984-12-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19238384U JPS61106028U (US07413550-20080819-C00001.png) 1984-12-17 1984-12-17

Publications (1)

Publication Number Publication Date
JPS61106028U true JPS61106028U (US07413550-20080819-C00001.png) 1986-07-05

Family

ID=30749800

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19238384U Pending JPS61106028U (US07413550-20080819-C00001.png) 1984-12-17 1984-12-17

Country Status (1)

Country Link
JP (1) JPS61106028U (US07413550-20080819-C00001.png)

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