JPS61104863U - - Google Patents

Info

Publication number
JPS61104863U
JPS61104863U JP19001084U JP19001084U JPS61104863U JP S61104863 U JPS61104863 U JP S61104863U JP 19001084 U JP19001084 U JP 19001084U JP 19001084 U JP19001084 U JP 19001084U JP S61104863 U JPS61104863 U JP S61104863U
Authority
JP
Japan
Prior art keywords
communication hole
valve plate
periphery
casing
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19001084U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19001084U priority Critical patent/JPS61104863U/ja
Publication of JPS61104863U publication Critical patent/JPS61104863U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sliding Valves (AREA)
JP19001084U 1984-12-17 1984-12-17 Pending JPS61104863U (US06294698-20010925-C00026.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19001084U JPS61104863U (US06294698-20010925-C00026.png) 1984-12-17 1984-12-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19001084U JPS61104863U (US06294698-20010925-C00026.png) 1984-12-17 1984-12-17

Publications (1)

Publication Number Publication Date
JPS61104863U true JPS61104863U (US06294698-20010925-C00026.png) 1986-07-03

Family

ID=30747456

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19001084U Pending JPS61104863U (US06294698-20010925-C00026.png) 1984-12-17 1984-12-17

Country Status (1)

Country Link
JP (1) JPS61104863U (US06294698-20010925-C00026.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006052846A (ja) * 2004-08-13 2006-02-23 Vat Holding Ag 二つの真空室間に配置される真空バルブの制御方法
WO2011043189A1 (ja) * 2009-10-06 2011-04-14 株式会社 アルバック 逆圧対応仕切弁

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52101717A (en) * 1976-02-23 1977-08-26 Nippon Kokan Kk Valve

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52101717A (en) * 1976-02-23 1977-08-26 Nippon Kokan Kk Valve

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006052846A (ja) * 2004-08-13 2006-02-23 Vat Holding Ag 二つの真空室間に配置される真空バルブの制御方法
WO2011043189A1 (ja) * 2009-10-06 2011-04-14 株式会社 アルバック 逆圧対応仕切弁
TWI407031B (zh) * 2009-10-06 2013-09-01 Ulvac Inc 逆壓閘閥
JP5490813B2 (ja) * 2009-10-06 2014-05-14 株式会社アルバック 逆圧対応仕切弁

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