JPS61104658A - Array of semiconductor solid-state image pickup element - Google Patents

Array of semiconductor solid-state image pickup element

Info

Publication number
JPS61104658A
JPS61104658A JP59225715A JP22571584A JPS61104658A JP S61104658 A JPS61104658 A JP S61104658A JP 59225715 A JP59225715 A JP 59225715A JP 22571584 A JP22571584 A JP 22571584A JP S61104658 A JPS61104658 A JP S61104658A
Authority
JP
Japan
Prior art keywords
arrangement
non
direction
detection
picture element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59225715A
Inventor
Mitsuyoshi Koizumi
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59225715A priority Critical patent/JPS61104658A/en
Publication of JPS61104658A publication Critical patent/JPS61104658A/en
Application status is Pending legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14665Imagers using a photoconductor layer

Abstract

PURPOSE:To enable image pickup by even scanning of the object to be detected, by a method wherein the title array in the direction of arrangement and non- sensitive zones between arrays are inclined, thus allowing parallel output from each. CONSTITUTION:The photo receiving part (picture element) 20a is inclined to the direction of arrangement of the title arrays. The width of the photo receiving part is 500mum, and a non-sensitive zone 20b of 50mum width is adjacent thereto. In the case of 40 picture elements, when the total magnification factor of the detection system is 100, the size of one picture element is 5X5mum<2> on the sample plane, which leads to detection over a range of 5X220mum<2>: almost the same speed of inspection as that of the conventional case. The outputs of picture elements i-n are turned binary in parallel at the same time by a binary circuit 21; accordingly, the outputs of 40 picture elements are processed in parallel at the same time. Then, large improvement in inspection speed and in detection sensitivity can be contrived. Since the picture element 20a and the non-sensitive zone overlap widely in the direction of arrangement, the miss-detection of small foreign matters 3C can be avoided. It is necessary to keep the amount of inclination at more than the size of the foreign matter.
JP59225715A 1984-10-29 1984-10-29 Array of semiconductor solid-state image pickup element Pending JPS61104658A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59225715A JPS61104658A (en) 1984-10-29 1984-10-29 Array of semiconductor solid-state image pickup element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59225715A JPS61104658A (en) 1984-10-29 1984-10-29 Array of semiconductor solid-state image pickup element

Publications (1)

Publication Number Publication Date
JPS61104658A true JPS61104658A (en) 1986-05-22

Family

ID=16833669

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59225715A Pending JPS61104658A (en) 1984-10-29 1984-10-29 Array of semiconductor solid-state image pickup element

Country Status (1)

Country Link
JP (1) JPS61104658A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997004493A1 (en) * 1995-07-18 1997-02-06 Discovery Semiconductors, Inc. Method and apparatus for monolithic optoelectronic integrated circuit using selective epitaxy
US7477372B2 (en) 1996-06-04 2009-01-13 Kla-Tencor Technologies Corporation Optical scanning system for surface inspection
WO2013154067A1 (en) * 2012-04-09 2013-10-17 株式会社日立ハイテクノロジーズ Inspection device and image capture element
JP2014052219A (en) * 2012-09-05 2014-03-20 Dainippon Printing Co Ltd Foreign matter inspection device, foreign matter inspection method

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5017426A (en) * 1973-06-16 1975-02-24
JPS5017426U (en) * 1973-06-20 1975-02-25
JPS5040635U (en) * 1973-07-16 1975-04-25
JPS518592A (en) * 1974-07-09 1976-01-23 Murata Manufacturing Co Dojikukeeburuno setsuzokuho
JPS52143878A (en) * 1976-05-26 1977-11-30 Hitachi Ltd Silicon wafer defect detector
JPS55149829A (en) * 1979-05-11 1980-11-21 Hitachi Ltd Detector for foreign matter in wafer
JPS58120106A (en) * 1982-01-12 1983-07-16 Hitachi Ltd Detecting device for focal point
JPS59181568A (en) * 1983-03-31 1984-10-16 Toshiba Corp Solid-state image pickup element

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5017426A (en) * 1973-06-16 1975-02-24
JPS5017426U (en) * 1973-06-20 1975-02-25
JPS5040635U (en) * 1973-07-16 1975-04-25
JPS518592A (en) * 1974-07-09 1976-01-23 Murata Manufacturing Co Dojikukeeburuno setsuzokuho
JPS52143878A (en) * 1976-05-26 1977-11-30 Hitachi Ltd Silicon wafer defect detector
JPS55149829A (en) * 1979-05-11 1980-11-21 Hitachi Ltd Detector for foreign matter in wafer
JPS58120106A (en) * 1982-01-12 1983-07-16 Hitachi Ltd Detecting device for focal point
JPS59181568A (en) * 1983-03-31 1984-10-16 Toshiba Corp Solid-state image pickup element

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997004493A1 (en) * 1995-07-18 1997-02-06 Discovery Semiconductors, Inc. Method and apparatus for monolithic optoelectronic integrated circuit using selective epitaxy
US5621227A (en) * 1995-07-18 1997-04-15 Discovery Semiconductors, Inc. Method and apparatus for monolithic optoelectronic integrated circuit using selective epitaxy
US7477372B2 (en) 1996-06-04 2009-01-13 Kla-Tencor Technologies Corporation Optical scanning system for surface inspection
WO2013154067A1 (en) * 2012-04-09 2013-10-17 株式会社日立ハイテクノロジーズ Inspection device and image capture element
JP2013217774A (en) * 2012-04-09 2013-10-24 Hitachi High-Technologies Corp Inspection apparatus and image capturing device
US9791380B2 (en) 2012-04-09 2017-10-17 Hitacthi High-Technologies Corporation Inspection device and image capture element
JP2014052219A (en) * 2012-09-05 2014-03-20 Dainippon Printing Co Ltd Foreign matter inspection device, foreign matter inspection method

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