JPS61104550U - - Google Patents

Info

Publication number
JPS61104550U
JPS61104550U JP19017484U JP19017484U JPS61104550U JP S61104550 U JPS61104550 U JP S61104550U JP 19017484 U JP19017484 U JP 19017484U JP 19017484 U JP19017484 U JP 19017484U JP S61104550 U JPS61104550 U JP S61104550U
Authority
JP
Japan
Prior art keywords
supporting
wafer carrier
supporting side
plates
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19017484U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19017484U priority Critical patent/JPS61104550U/ja
Publication of JPS61104550U publication Critical patent/JPS61104550U/ja
Pending legal-status Critical Current

Links

JP19017484U 1984-12-17 1984-12-17 Pending JPS61104550U (US07413550-20080819-C00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19017484U JPS61104550U (US07413550-20080819-C00001.png) 1984-12-17 1984-12-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19017484U JPS61104550U (US07413550-20080819-C00001.png) 1984-12-17 1984-12-17

Publications (1)

Publication Number Publication Date
JPS61104550U true JPS61104550U (US07413550-20080819-C00001.png) 1986-07-03

Family

ID=30747624

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19017484U Pending JPS61104550U (US07413550-20080819-C00001.png) 1984-12-17 1984-12-17

Country Status (1)

Country Link
JP (1) JPS61104550U (US07413550-20080819-C00001.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6011640U (ja) * 1983-06-30 1985-01-26 三菱電機株式会社 同期機

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6011640U (ja) * 1983-06-30 1985-01-26 三菱電機株式会社 同期機

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