JPS61104340U - - Google Patents

Info

Publication number

JPS61104340U

JPS61104340U JP19006884U JP19006884U JPS61104340U JP S61104340 U JPS61104340 U JP S61104340U JP 19006884 U JP19006884 U JP 19006884U JP 19006884 U JP19006884 U JP 19006884U JP S61104340 U JPS61104340 U JP S61104340U

Authority

JP

Japan

Prior art keywords

semiconductor substrate

thermocouple

hot junction

thermopile

support portion

Prior art date

1984-12-17

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 4
• 239000004065 semiconductor Substances 0.000 claims 3
• 238000010586 diagram Methods 0.000 description 3
• 150000004767 nitrides Chemical class 0.000 description 2
• 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
• 229920005591 polysilicon Polymers 0.000 description 2
• 239000006096 absorbing agent Substances 0.000 description 1
• 238000005530 etching Methods 0.000 description 1
• 238000004519 manufacturing process Methods 0.000 description 1
• 239000002184 metal Substances 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1