JPS61103476U - - Google Patents

Info

Publication number
JPS61103476U
JPS61103476U JP18869184U JP18869184U JPS61103476U JP S61103476 U JPS61103476 U JP S61103476U JP 18869184 U JP18869184 U JP 18869184U JP 18869184 U JP18869184 U JP 18869184U JP S61103476 U JPS61103476 U JP S61103476U
Authority
JP
Japan
Prior art keywords
processing liquid
pipe
processing
liquid supply
trumpet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18869184U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6342142Y2 (US07714131-20100511-C00038.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18869184U priority Critical patent/JPS6342142Y2/ja
Publication of JPS61103476U publication Critical patent/JPS61103476U/ja
Application granted granted Critical
Publication of JPS6342142Y2 publication Critical patent/JPS6342142Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electroplating Methods And Accessories (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
JP18869184U 1984-12-12 1984-12-12 Expired JPS6342142Y2 (US07714131-20100511-C00038.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18869184U JPS6342142Y2 (US07714131-20100511-C00038.png) 1984-12-12 1984-12-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18869184U JPS6342142Y2 (US07714131-20100511-C00038.png) 1984-12-12 1984-12-12

Publications (2)

Publication Number Publication Date
JPS61103476U true JPS61103476U (US07714131-20100511-C00038.png) 1986-07-01
JPS6342142Y2 JPS6342142Y2 (US07714131-20100511-C00038.png) 1988-11-04

Family

ID=30746155

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18869184U Expired JPS6342142Y2 (US07714131-20100511-C00038.png) 1984-12-12 1984-12-12

Country Status (1)

Country Link
JP (1) JPS6342142Y2 (US07714131-20100511-C00038.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019094526A (ja) * 2017-11-21 2019-06-20 富士通株式会社 基板処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019094526A (ja) * 2017-11-21 2019-06-20 富士通株式会社 基板処理装置

Also Published As

Publication number Publication date
JPS6342142Y2 (US07714131-20100511-C00038.png) 1988-11-04

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