JPS6110273A - 半導体集積回路メモリ - Google Patents

半導体集積回路メモリ

Info

Publication number
JPS6110273A
JPS6110273A JP60103709A JP10370985A JPS6110273A JP S6110273 A JPS6110273 A JP S6110273A JP 60103709 A JP60103709 A JP 60103709A JP 10370985 A JP10370985 A JP 10370985A JP S6110273 A JPS6110273 A JP S6110273A
Authority
JP
Japan
Prior art keywords
polycrystalline silicon
silicon layer
layer
film
wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60103709A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0337868B2 (enrdf_load_stackoverflow
Inventor
Yoshio Sakai
芳男 酒井
Osamu Minato
湊　修
Toshiaki Masuhara
増原　利明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60103709A priority Critical patent/JPS6110273A/ja
Publication of JPS6110273A publication Critical patent/JPS6110273A/ja
Publication of JPH0337868B2 publication Critical patent/JPH0337868B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B10/00—Static random access memory [SRAM] devices

Landscapes

  • Semiconductor Memories (AREA)
JP60103709A 1985-05-17 1985-05-17 半導体集積回路メモリ Granted JPS6110273A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60103709A JPS6110273A (ja) 1985-05-17 1985-05-17 半導体集積回路メモリ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60103709A JPS6110273A (ja) 1985-05-17 1985-05-17 半導体集積回路メモリ

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP56095310A Division JPS5739568A (en) 1981-06-22 1981-06-22 Semiconductor integrated circuit memory

Publications (2)

Publication Number Publication Date
JPS6110273A true JPS6110273A (ja) 1986-01-17
JPH0337868B2 JPH0337868B2 (enrdf_load_stackoverflow) 1991-06-06

Family

ID=14361259

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60103709A Granted JPS6110273A (ja) 1985-05-17 1985-05-17 半導体集積回路メモリ

Country Status (1)

Country Link
JP (1) JPS6110273A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0337868B2 (enrdf_load_stackoverflow) 1991-06-06

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