JPS6086267A - Preparation of electric insulating film - Google Patents

Preparation of electric insulating film

Info

Publication number
JPS6086267A
JPS6086267A JP19176083A JP19176083A JPS6086267A JP S6086267 A JPS6086267 A JP S6086267A JP 19176083 A JP19176083 A JP 19176083A JP 19176083 A JP19176083 A JP 19176083A JP S6086267 A JPS6086267 A JP S6086267A
Authority
JP
Japan
Prior art keywords
gases
gas
hydrocarbon
gaseous
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19176083A
Other languages
Japanese (ja)
Inventor
Kenji Yanagihara
Mitsuo Kimura
Masahiro Shinkai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JSR Corp
Nippon Synthetic Chemical Industry Co Ltd
Original Assignee
Nippon Synthetic Chemical Industry Co Ltd
Japan Synthetic Rubber Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Synthetic Chemical Industry Co Ltd, Japan Synthetic Rubber Co Ltd filed Critical Nippon Synthetic Chemical Industry Co Ltd
Priority to JP19176083A priority Critical patent/JPS6086267A/en
Publication of JPS6086267A publication Critical patent/JPS6086267A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/62Plasma-deposition of organic layers

Abstract

PURPOSE:To obtain an electric insulating film having high heat conductivity, by subjecting polymerizable gas formed by combining gaseous hylogenated hydrocarbon, gaseous hydrocarbon, hydrogen and gaseous halogen in a predetermined combination to plasma polymerization reaction at a predetermined electron temp. CONSTITUTION:Halogenated hydrocarbon gas A, hydrocarbon gas B, hydrogen gas C and halogen gas D are prepared. 10 kinds of gases are prepared in the combination of only gas A, gases A and B, gases A and C, gases A and D, gases A, B and C, gases A, B and D, gases A, C and D, gases A, B, C and D, gases B and D, and gases B, C and D. One or more of these combined gases is mixed so as to adjust the ratio of the number of halogen atoms and the number of hydrogen atoms to 1:5-5:1. This polymerizable gas is subjected to plasma polymerization reaction at the plasma electron temp. of 2,000-60,000K in a reaction zone.
JP19176083A 1983-10-14 1983-10-14 Preparation of electric insulating film Pending JPS6086267A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19176083A JPS6086267A (en) 1983-10-14 1983-10-14 Preparation of electric insulating film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19176083A JPS6086267A (en) 1983-10-14 1983-10-14 Preparation of electric insulating film

Publications (1)

Publication Number Publication Date
JPS6086267A true JPS6086267A (en) 1985-05-15

Family

ID=16280050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19176083A Pending JPS6086267A (en) 1983-10-14 1983-10-14 Preparation of electric insulating film

Country Status (1)

Country Link
JP (1) JPS6086267A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61190525A (en) * 1985-02-20 1986-08-25 Japan Synthetic Rubber Co Ltd Metallic product covered with plasma-polymerized film
JPS61190526A (en) * 1985-02-20 1986-08-25 Japan Synthetic Rubber Co Ltd Metallic product covered with plasma-polymerized film
CN103337320A (en) * 2013-06-13 2013-10-02 天津学子电力设备科技有限公司 Surface charge quick dissipation method for silicone rubber composite insulator

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5216981A (en) * 1975-07-31 1977-02-08 Toshiba Corp Integrate circuit unit
JPS5838701A (en) * 1981-08-31 1983-03-07 Japan Synthetic Rubber Co Ltd Surface treatment by plasma chemical reaction

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5216981A (en) * 1975-07-31 1977-02-08 Toshiba Corp Integrate circuit unit
JPS5838701A (en) * 1981-08-31 1983-03-07 Japan Synthetic Rubber Co Ltd Surface treatment by plasma chemical reaction

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61190525A (en) * 1985-02-20 1986-08-25 Japan Synthetic Rubber Co Ltd Metallic product covered with plasma-polymerized film
JPS61190526A (en) * 1985-02-20 1986-08-25 Japan Synthetic Rubber Co Ltd Metallic product covered with plasma-polymerized film
CN103337320A (en) * 2013-06-13 2013-10-02 天津学子电力设备科技有限公司 Surface charge quick dissipation method for silicone rubber composite insulator

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