JPS6077794U - タ−ボ分子ポンプ - Google Patents

タ−ボ分子ポンプ

Info

Publication number
JPS6077794U
JPS6077794U JP16990783U JP16990783U JPS6077794U JP S6077794 U JPS6077794 U JP S6077794U JP 16990783 U JP16990783 U JP 16990783U JP 16990783 U JP16990783 U JP 16990783U JP S6077794 U JPS6077794 U JP S6077794U
Authority
JP
Japan
Prior art keywords
molecular pump
bearing
turbo
turbo molecular
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16990783U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6332392Y2 (enrdf_load_stackoverflow
Inventor
岡村　治郎
潔 成田
川口　重一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP16990783U priority Critical patent/JPS6077794U/ja
Publication of JPS6077794U publication Critical patent/JPS6077794U/ja
Application granted granted Critical
Publication of JPS6332392Y2 publication Critical patent/JPS6332392Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP16990783U 1983-10-31 1983-10-31 タ−ボ分子ポンプ Granted JPS6077794U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16990783U JPS6077794U (ja) 1983-10-31 1983-10-31 タ−ボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16990783U JPS6077794U (ja) 1983-10-31 1983-10-31 タ−ボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPS6077794U true JPS6077794U (ja) 1985-05-30
JPS6332392Y2 JPS6332392Y2 (enrdf_load_stackoverflow) 1988-08-29

Family

ID=30371062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16990783U Granted JPS6077794U (ja) 1983-10-31 1983-10-31 タ−ボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPS6077794U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4703565B2 (ja) * 2004-06-25 2011-06-15 株式会社大阪真空機器製作所 ターボ分子ポンプの軸受支持構造

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2730552A1 (de) * 1976-09-09 1978-03-16 Rieter Ag Maschf Lagerung fuer eine offenend-spinnvorrichtung
JPS5395935U (enrdf_load_stackoverflow) * 1977-01-07 1978-08-04

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2730552A1 (de) * 1976-09-09 1978-03-16 Rieter Ag Maschf Lagerung fuer eine offenend-spinnvorrichtung
JPS5395935U (enrdf_load_stackoverflow) * 1977-01-07 1978-08-04

Also Published As

Publication number Publication date
JPS6332392Y2 (enrdf_load_stackoverflow) 1988-08-29

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