JPS607353A - 感ガス素子 - Google Patents

感ガス素子

Info

Publication number
JPS607353A
JPS607353A JP11423383A JP11423383A JPS607353A JP S607353 A JPS607353 A JP S607353A JP 11423383 A JP11423383 A JP 11423383A JP 11423383 A JP11423383 A JP 11423383A JP S607353 A JPS607353 A JP S607353A
Authority
JP
Japan
Prior art keywords
gas
layer
catalyst
sensitive element
sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11423383A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0315976B2 (cs
Inventor
Tadashi Sakai
忠司 酒井
Osamu Takigawa
修 滝川
Masaki Katsura
桂　正樹
Masayuki Shiratori
白鳥　昌之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP11423383A priority Critical patent/JPS607353A/ja
Publication of JPS607353A publication Critical patent/JPS607353A/ja
Publication of JPH0315976B2 publication Critical patent/JPH0315976B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G01N27/16—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by burning or catalytic oxidation of surrounding material to be tested, e.g. of gas

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP11423383A 1983-06-27 1983-06-27 感ガス素子 Granted JPS607353A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11423383A JPS607353A (ja) 1983-06-27 1983-06-27 感ガス素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11423383A JPS607353A (ja) 1983-06-27 1983-06-27 感ガス素子

Publications (2)

Publication Number Publication Date
JPS607353A true JPS607353A (ja) 1985-01-16
JPH0315976B2 JPH0315976B2 (cs) 1991-03-04

Family

ID=14632579

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11423383A Granted JPS607353A (ja) 1983-06-27 1983-06-27 感ガス素子

Country Status (1)

Country Link
JP (1) JPS607353A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01189553A (ja) * 1988-01-25 1989-07-28 Riken Corp ガスセンサー用酸化スズ半導体およびその製造方法
JP2008145148A (ja) * 2006-12-07 2008-06-26 Fuji Electric Fa Components & Systems Co Ltd 薄膜ガスセンサおよびその製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7526942B2 (en) * 2003-06-12 2009-05-05 Riken Keiki Co., Ltd. Contact combustion gas sensor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54104392A (en) * 1978-02-02 1979-08-16 Toshiba Corp Gas sensitive element
JPS56168544A (en) * 1980-05-30 1981-12-24 Toyota Motor Corp Resistor type gas sensor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54104392A (en) * 1978-02-02 1979-08-16 Toshiba Corp Gas sensitive element
JPS56168544A (en) * 1980-05-30 1981-12-24 Toyota Motor Corp Resistor type gas sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01189553A (ja) * 1988-01-25 1989-07-28 Riken Corp ガスセンサー用酸化スズ半導体およびその製造方法
JP2008145148A (ja) * 2006-12-07 2008-06-26 Fuji Electric Fa Components & Systems Co Ltd 薄膜ガスセンサおよびその製造方法

Also Published As

Publication number Publication date
JPH0315976B2 (cs) 1991-03-04

Similar Documents

Publication Publication Date Title
US6012327A (en) Gas sensor and method for manufacturing the same
RU2294534C2 (ru) Тонкоплёночный сенсор на этанол и способ его получения
JPH07198675A (ja) イオン導電体を用いたガスセンサおよびその製造方法
JPS61155751A (ja) 空燃比センサおよび装置
JPS607353A (ja) 感ガス素子
JPH0558498B2 (cs)
JPS5999243A (ja) 感ガス素子
JPH01189553A (ja) ガスセンサー用酸化スズ半導体およびその製造方法
JPH0862168A (ja) 窒素酸化物検出素子
JPH02269948A (ja) 燃焼制御用センサ
JPH0531104B2 (cs)
RU2102735C1 (ru) Твердотельный газовый сенсор
JPH0692957B2 (ja) 燃焼制御用センサ
JPH02167461A (ja) 燃焼制御用センサ
JPH065220B2 (ja) 酸素濃度検出器
JP2679811B2 (ja) ガス検出装置
JP2001235442A (ja) ガスセンサ
JPS6176948A (ja) 薄膜ガス検知素子
JP2005226992A (ja) 薄膜ガスセンサの製造方法
JPH02196953A (ja) 燃焼制御用センサ
JPS5811846A (ja) Ｎｏ↓２ガス検知方法
JP2939873B2 (ja) ガス検出素子の製造法
JPH01102355A (ja) 燃焼制御用センサ
RU2100801C1 (ru) Твердотельный газовый сенсор
JPH0197854A (ja) 燃焼制御用センサ