JPS6056706A - Station with transferring mechanism - Google Patents

Abstract

PURPOSE:To enhance the work efficiency at a station by providing a transferring mechanism which automatically takes up or puts down a semiconductor substrate container from or into a conveying carriage. CONSTITUTION:A conveying carriage 22 goes into or comes out of a station 20 along a conveying rail 21. On both sides of the station 20, a loading shelf 29a equipped with a plurality of shelves 29 on either one of which a box-shaped body 25 is mounted is installed in addition to an unloading shelf 29b. In front of the station 20, a transferring mechanism 30 is provided in such a manner that the mechanism 30 faces the station 20. The transferring mechanism 30 is constructed by assembling arms 30a, 30b, and 30c, for vertical, lateral, and back and forth movement respectively, into one body. And the arm 30c for back and forth movement is provided with a holding part that holds the box-shaped body 25. By using the said station provided with the transferring mechanism, working hours of a worker bound in the station can be shortened, while the work efficiency can be enhanced.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a station for receiving a semiconductor substrate storage container, and more particularly to a station with a transfer mechanism.

[Technical background of the invention and its problems]

Manufacturing of semiconductor devices is performed through various processing steps 8 such as wet processing, dry processing, and oxidation processing. For this reason, semiconductor substrates are moved between mutually isolated rooms within the clean room. Semiconductor substrates are stored in semiconductor substrate storage containers for each lot and are manually transported between can processing steps in a clean room. However, manual transportation has problems such as the hassle of wearing dust-proof clothing and a reduction in the cleanliness of the clean room.

Therefore, in recent years, as shown in Fig. 1, two clean rooms are used in which the chamber for the can processing process is separated by a shield plate 1, and a station 3 for storing semiconductor substrate storage containers is installed in each room, and between the stations 3, A transport vehicle that moves along a transport track 4 is provided to transport semiconductor substrates.

FIG. 2 shows the stations 3 provided in each room. One end of the transport track 4 is introduced into the station 3 . A U-shaped support arm 6 is attached to a transport vehicle 5 that is self-propelled on the transport track 4. A protruding engagement portion is provided on the opposing inner surfaces of the upper end portion of the support arm 6 .

The retaining portion fits into a U-shaped recess formed on the outer side of the box body 8 in which the semiconductor substrate storage container 7 is housed. Box body 8
The lid body 9 is vomited.

Inside the semiconductor substrate storage container 7, there are a plurality of semiconductor substrates 1θ.
is stored.

Then, an operator loads and unloads the semiconductor substrate storage containers 7 unspecified from each room from the transport vehicle 5. Next, if there is something to be transported to another station, the semiconductor substrate storage container 7 is loaded onto the empty transport vehicle 5 and transported out. If this work is not done quickly, smooth conveyance will not be possible if the following conveyance vehicles 5 arrive at the station one after another.

As a result, two workers must be assigned to each station 3 for loading and unloading operations. This means that the worker is restrained at the station position regardless of whether the worker is transported or not, which causes a significant decrease in work efficiency. The object of the present invention is to provide a station with a transfer mechanism that achieves improved work efficiency by shortening the locking time.

[Summary of the invention]

The present invention is equipped with a transfer mechanism 2 that automatically loads and unloads semiconductor substrate storage containers from a transport vehicle, thereby reducing the time spent by workers at the station and improving work efficiency. It is a station.

[Embodiments of the invention]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 3 is a perspective view of one embodiment of the present invention.

In the figure, 20 is a station into which one end of the transport track 21 is introduced. A transport vehicle 22 enters and exits the station 20 along a transport track 2. A U-shaped support arm 23 is attached to the transport vehicle 22 . A protruding retaining portion is provided on the opposing inner surfaces of the upper end portion of the support arm 23 . The retaining portion fits into a U-shaped recess formed on the outer side of the box body 25 in which the entire semiconductor substrate storage container 24 is housed. A plurality of semiconductor wafers 27 are stored in the semiconductor substrate storage container 24, which is closed with a box 25μ lid 26. A window 28 is formed in the front of the station 20 to allow the box 25 to enter and exit. On both sides of the station 20, there are provided a loading shelf 29a and a loading/unloading shelf 29b on which a plurality of shelves 29 are attached for placing the boxes 25. Also, station 2
A transfer mechanism 30 is provided in front of the station 0 so as to face the station 20. The transfer mechanism 30 is configured by integrally combining a vertically movable arm 3θa, a horizontally movable arm sob, and a longitudinally movable arm 30c that moves back and forth toward the station 20.

The back-and-forth movable arm 3 (7 (!) is provided with a holding portion that holds the box body 25.

According to the station 40 with a moving mechanism configured in this way, the transport vehicle 22 stops at a position facing the window 28 in the station 20 when loading/unloading work is performed. Next, by the back and forth movement of the transfer mechanism 30, the back and forth moving arm 30
The box body 25 is removed from the support arm 23 and moved onto c.

Next, the horizontally movable arm 29b moves to the side of the loading/unloading shelf 29b, and the box body 25 is moved to a predetermined shelf 29 by the movement of the vertically movable arm 30a1 and the longitudinally movable arm 30b. In addition, when carrying out loading work, the forward and backward moving arm 30c is connected to the loading rack 2.
9a to a predetermined shelf 29, and pull out the box 25 from the shelf 29. Next, the vertically movable arm 30a and the horizontally movable arm 30b are moved to guide the longitudinally movable arm 90c to the window 28 of the station 30. Next, the box 254f is transferred to the transport vehicle 22 in the station 20 through the window 28 by movement of the forward and backward movable arm 3θC.

In this way, by automatic operation of the transfer mechanism 30, the transport vehicle 2
2 to the loading/unloading shelf 29b, or from the loading shelf 29a to the transport vehicle 22 in the station 20.

As a result, the boxes 25 can be efficiently and automatically transferred without the operator being in the vicinity of the station 20 for, for example, 30 minutes to one hour.

Therefore, workability can be significantly improved.

〔Effect of the invention〕

As explained above, according to the station with a transfer mechanism according to the present invention, the time the worker is confined at the station can be shortened, improving work efficiency. This is something that can be improved.

[Brief explanation of drawings]

FIG. 1 is an explanatory diagram showing the configuration of a clean room, FIG. 2 is a perspective view of a conventional station, and FIG. 3 is a perspective view of an embodiment of the present invention. 20... Station, 21... Transport track, 22.
... Transport vehicle, 23 ... Support arm, 24 ... Semiconductor substrate storage container, 25 ... Box body, 26 ... Lid body, 27
...Semiconductor wafer, 28...Window, 29...Shelf, 2
9a...Loading shelf, 29b...Loading/unloading shelf, 3θ...
・Transfer mechanism, 30FL...Vertical movement arm, 3ob...
・Left-right moving arm, 30c... Back-and-forth moving arm, 40...
・Station with transfer mechanism/. Applicant's agent Patent attorney Takehiko Suzue Figure 1 Figure 3

Claims (1)

[Claims] One end has an entry/exit window for the semiconductor substrate storage container, and the semiconductor substrate storage container is inside! A station main body provided with a transport track Z of a transport vehicle to be transported, a loading shelf and a loading/unloading shelf provided on the station main body, and the semiconductor substrate storage provided on the loading shelf and the loading/unloading shelf. A transfer device configured by integrally combining a shelf for holding containers, a longitudinally movable arm, a vertically movable arm, and a horizontally movable arm provided opposite to the station main body and provided with a holding portion for the semiconductor substrate storage container. A station with a transfer mechanism characterized by comprising a mechanism.