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JPS6047472A - Solid-state image-pickup element - Google Patents

Solid-state image-pickup element

Info

Publication number
JPS6047472A
JPS6047472A JP15479983A JP15479983A JPS6047472A JP S6047472 A JPS6047472 A JP S6047472A JP 15479983 A JP15479983 A JP 15479983A JP 15479983 A JP15479983 A JP 15479983A JP S6047472 A JPS6047472 A JP S6047472A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
film
light
incident
refractive
part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15479983A
Inventor
Akiya Izumi
Takeyasu Nekata
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L31/00Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0232Optical elements or arrangements associated with the device
    • H01L31/02327Optical elements or arrangements associated with the device the optical elements being integrated or being directly associated to the device, e.g. back reflectors

Abstract

PURPOSE:To improve the coefficient of light utilization as well as to contrive increase in photosensitivity by a method wherein a protective film of low refractive index is provided on the non-photosensitive part located between light-receiving sections, and a protective film having the refractive index higher than said low refractive index protective film is provided thereon. CONSTITUTION:A protective film 6 of low refractive index having a spherical cross section is formed on a light shielding material 4 as a non-photosensitive part. Besides, a protective film of high refractive index, having a trapezoidally formed part corresponding to the photodiode 2 to be used as a photosensitive section and also having a concavity corresponding to a light shielding material 4, is formed on a film 5. According to this constitution, among incident lights L, the incident light L which is made incident on the projected flat part of a film 7 is transmitted rectilinearly through said film 7 and the film 5, and made incident on a diode 2. On the other hand, as the incident light of large incident angle to be made incident on the concaved part of the film 7 coresponding to the light-shielding material 4 has a high refractive index at the concaved part, said incident light is transmitted through the film 7, and concentrated on the film 6 located on the light-shielding material 4. Among the above-mentioned lights, the light L having large incident angle is reflected on the side of the diode 2 at the interface of the film 5 and the film 6.
JP15479983A 1983-08-26 1983-08-26 Solid-state image-pickup element Pending JPS6047472A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15479983A JPS6047472A (en) 1983-08-26 1983-08-26 Solid-state image-pickup element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15479983A JPS6047472A (en) 1983-08-26 1983-08-26 Solid-state image-pickup element

Publications (1)

Publication Number Publication Date
JPS6047472A true true JPS6047472A (en) 1985-03-14

Family

ID=15592141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15479983A Pending JPS6047472A (en) 1983-08-26 1983-08-26 Solid-state image-pickup element

Country Status (1)

Country Link
JP (1) JPS6047472A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0502340A2 (en) * 1991-02-12 1992-09-09 Sony Corporation CCD solid state imager
US5323052A (en) * 1991-11-15 1994-06-21 Sharp Kabushiki Kaisha Image pickup device with wide angular response
US5670384A (en) * 1993-09-17 1997-09-23 Polaroid Corporation Process for forming solid state imager with microlenses
EP0892287A2 (en) * 1997-07-15 1999-01-20 Hewlett-Packard Company Enhanced light collection efficiency sensor with microlens array

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0502340A2 (en) * 1991-02-12 1992-09-09 Sony Corporation CCD solid state imager
US5323052A (en) * 1991-11-15 1994-06-21 Sharp Kabushiki Kaisha Image pickup device with wide angular response
US5670384A (en) * 1993-09-17 1997-09-23 Polaroid Corporation Process for forming solid state imager with microlenses
EP0892287A2 (en) * 1997-07-15 1999-01-20 Hewlett-Packard Company Enhanced light collection efficiency sensor with microlens array
EP0892287A3 (en) * 1997-07-15 2000-03-08 Hewlett-Packard Company Enhanced light collection efficiency sensor with microlens array

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