JPS60261274A - Checking device of integrated circuit or the like - Google Patents

Abstract

PURPOSE:To check automatically marks and leads of devices by providing a pivotal moving rail, which is set on the same line as the first rail and the second rail, at the intersection between the first and the second rails inclined opposite directions and checking every sliding device by a TV camera installed on the second rail. CONSTITUTION:A device 2 is slided down on the first rail 4 by its own weight and is moved to the second rail 22 through a pivotal moving rail 20 and reaches a mark checking part A and is stopped by a stopper. The device 2 is chucked there by a clamper, and the mark face of the device 2 is allowed to face a TV camera 32 above it and is checked. When the device 2 reaches a lead checking part B thereafter, the device is stopped by a stopper and is clamped by a clamper and is held in a correct direction to a lead checking TV camera placed in the side and is checked. The device 2 is judged to be indefectible or defective on a basis of signals from cameras and is loaded to a carrier.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention uses a television camera to determine whether marks are properly placed on the package surface of a device such as a DTP type integrated circuit, and whether or not the leads are properly marked. This invention relates to an integrated circuit inspection device for inspecting whether or not the circuit is bent.

[Conventional technology]

The product number, manufacturer name, manufacturing date, etc. are displayed on the surface of the package of an integrated circuit, etc., and each has an important meaning. Therefore, in the process of manufacturing integrated circuits, etc., it is necessary to strictly check whether they are attached correctly. Furthermore, if the leads are bent, this will cause problems during assembly, so it is necessary to check the same.

Conventionally, this checking work was performed manually and with the naked eye, but it was inefficient, and there was a desire to automate and improve efficiency.

[Purpose of the invention]

The present invention has been made in response to the above-mentioned demands, and is capable of automatically and accurately checking and sorting integrated circuits, etc., on a single line to determine whether or not the packaging of integrated circuits is properly printed and whether or not bottles are bent. The purpose is to provide a device.

[Structure of the invention]

In the present invention, a pivoting rail is installed at the intersection of a second rule and a second rail that are inclined in opposite directions, and is pivoted to be in a straight line with each of the first rule and the second rail. In the middle of the
A clamping mechanism is provided that temporarily clamps the devices sliding in succession on the second rail and then sends them out to one.
The second rail is equipped with a mark inspection camera and a one-way inspection camera, and each inspection section is equipped with a clamp mechanism that stops and holds devices sliding on the second rail at the inspection position. A testing device for integrated circuits, etc. installed,
The drawings show examples thereof. Fig. 1 shows its overall structure, 1 is a carrier stocker, 2 is a device, 3 is a carrier, 4 is a first rule, 7 is a clamp mechanism, 20 is a pivot rail, 22 is a second rail, A indicates the mark inspection section, and B indicates the lead inspection section. A carrier stocker 1 stores carriers 3 loaded with a large number of devices 2 to be tested in a stacked manner. carrier 3 device 2
When sending out the carrier 3, the carrier 3 is tilted so as to be in a straight line with the first rule 4 by a known method. The device 2 falling from the carrier 3 under its own weight slides astride the second rail. 5 is a sensor 1 that detects the passing of a device 2, that is, a sensor that detects when all the devices loaded in one carrier 3 are exhausted, and the empty carrier is replaced with the next carrier. It emits a signal for replacing the device. 6 is a roof placed on the rule 4 to restrain the device 2. FIG. 3 shows an example of the structure of the clamp mechanism. 8.8 is a bracket 9
．． With the bottle cylinder block fixed to 9, press the contact plate 10.10 with the tip of the bottle. The back plate 10.10 has a pair of guide rods 12.12 fixed to the side plate 11.11.
Insert it so that it can slide freely. Each guide rod 12 includes
A spring 13 is connected in order to constantly press the contact plate 1O11o inward. Reference numeral 14.14 denotes a clamper protruding from the through hole 16.16 of the rail base 15 and installed on the backing plate 10.10, which moves together with the backing plate 10.10 to clamp and unclamp the device 2. Returning to FIG. 2, a stopper 17 is driven up and down by a cylinder 18, which stops the device 2 from falling by going down, and allows it to pass by going up. A sensor 19 detects the movement of the stopper 17. Reference numeral 20 denotes a pivot rail installed at the lower end of the first rule 4, which is rotated by a pulse motor 21 from the angle of inclination of the first rule 4 to the angle of inclination of the second rail 22. A long S-shaped locking member 23 is provided below the tip of the pivot rail 20.
is provided with a stop 24 which projects on the rail of the pivot rail 20 when it is in a horizontal position with respect to the pivot rail 20. 25 is the pivot rail 20 and the locking member 23
A tension spring mounted between spring hooks 26 and 27 acts to keep the locking member 23 horizontal with respect to the pivot rail 20 at all times. Reference numeral 28 denotes a locking pin provided below the lower end of the second rule 4, and the pivot rail 20 is connected to the second rule 4.
When it is on the side, it abuts the upper tip of the locking member 23 from above and pushes down that part, causing the locking member 23 to rotate clockwise in FIG. 2 (the state shown in FIG. 2). 29 is a locking pin provided on the lower side of the upper end of the second rail 22;
0 is on the second rail 22 side, it abuts the lower end of the locking member 23 from below and pushes that part up, causing the locking member 2
3 in the same manner as above. 30 is a sensor that detects the passage of the device 2, and 31 is a roof. Next, the fourth
The mechanism of the mark inspection section A will be explained with reference to FIGS. 6 to 6. Reference numeral 32 is a television camera for mark inspection of the device 2, and the camera position can be adjusted. 33 is a stopper for stopping the device 2 sliding on the second rail 22 at a mark inspection position, and is moved forward and backward by a cylinder 34. The movement of the stopper 33 is supported by a pair of guide rods 38, 38 passed between Rondo support plates 36, 37 placed oppositely on the heath 35. 39
．． Reference numeral 39 denotes a clamper disposed opposite to each other with the second rail 22 interposed therebetween, and a through hole 4 formed in the base 35 is inserted from the lower side of the base 35.
Pass it through 0 and send it upward. 41 and 41 are clamper fixing members, through which guide rods 42 and 42 are slidably inserted. The guide rods 42, 42 are fixed between rod support plates 43, 43 vertically provided below the heath 35.

Reference numeral 44.44 denotes a pressing spring wrapped around both ends of each guide rod 42.42, which constantly holds the clamper fixing member 41.44.
41 inwardly. 45.46 ba,
This is a spacing adjustment plate for adjusting the spacing between the clampers 39.39, and a guide rod 42.42 is loosely inserted into the spacing adjustment plate, which abuts against the clamper fixing member 41.41. 47 is a drive pinion, 4
8 are free pinions, racks 49.5 on each side of them
Opposite 0. Then, a space adjustment plate 46 is placed on the rack 49.
Also, the interval adjustment plate 45 is fixed on the rank 50.

The rotation shaft 51 of the drive pinion 47 is placed on the base 35,
A spacing adjustment knob 52 is attached to the tip.

Reference numeral 53 denotes a pin cylinder block, which includes pressing pins 54 and 54 that extend on both sides during operation. The push pin 54.54 acts to push open the clamper fixing member 41.41. 55 is the insertion i[L of the pin cylinder body. 5
6.56 is a sensor for confirming that the device 2 has been placed in the inspection position, and after confirmation, it issues a signal to move the bottle cylinder backward. 7 and 8 show the structure of the lead inspection section B, and the mechanism for placing the device in the inspection position in this section is roughly the same as the structure of the mark inspection section A described above. However, in the case of the mark inspection section A, the mechanism is installed under the heath 35, but in the case of the lead inspection section B, it is installed above that mechanism or the heath 57 due to the installation position of the camera. That is, 5
Reference numeral 8.58 denotes a clamper placed above the second rail 22 with the clamper fixing member 59.5 in between.
Fixed at 9. A guide rod 62 supported by a rod support plate 61.61 vertically provided below the top plate 60 is slidably inserted into the clamper fixing member 59.59.

Reference numeral 63, 63 denotes a pressing spring wrapped around the guide rod 62, which acts to constantly press the clamper fixing members 59, 59 inward. 64 is a drive pinion, 65 is a free pinion, and ranks 66 and 67 are supported by mouth-shaped rack frames 66a and 67a on both sides thereof.
Arrange them and make them mesh with each other. Then, in FIG. 8, the interval adjusting plate 68 is fixed to the rack 66 located on the front side, and the interval adjusting plate 69 is fixed to the rack 67 on the rear side.

The guide rod 62 is loosely inserted into the interval adjustment plates 68 and 69. Reference numeral 70 denotes a spacing adjustment knob attached to a pinion shaft extended on the top plate 60, and by turning it, the spacing between the spacing adjustment plates 68 and 69 is adjusted. 71, after the mark inspection, the device 2 slides on the second frame 22''.
This is a stopper for stopping at a fixed position, that is, a lead inspection position, and is moved forward and backward by a cylinder 72 installed on the base 5. The movement of the stopper 71 is supported by guide rods 73, 73. 74 is stopper 71
It is a sensor that detects the movement of. Reference numeral 75 denotes a cutout section in which a part of the heath 57 is cut out, and a television camera 76 for REIT inspection is arranged there. The lead inspection TV camera 76 is of a shadow type, and a light source 77 shines a light beam on the device 2, and the shadow is observed to determine whether or not the lead is bent.

On the 7th, there is a loading section that loads the devices 2 that have been inspected into carriers while classifying them into non-defective products and defective products.The explanation of the configuration thereof will be omitted since it is not directly related to the present invention.

[Action of the invention]

To explain the operation of the present invention, firstly, in FIGS. 2 and 3, the carrier 3 is in a straight line with the rule 4
The inner devices 2 descend one after another by their own weight, straddling the fourth rule. At this time, the stopper 17 is lowered by the action of the cylinder 18, and blocks the advance of the leading device 2. At that point, move forward and press plate 10.1.
When the pin cylinder 8.8, which had been pressing the pin 0 against the spring 13.13, moves backward, the contact plate 1
0.10 is urged by spring 13.13 and moves inwardly along guide rod 12.

Accordingly, the clamper 14 fixed to the plate 10.10
．． 14 also moves from the position of the imaginary line in FIG. 3 to the position of the solid line, and between the tip surfaces, the rule 4-1-
The second device 2 from the beginning is clamped. While in that state, cylinder 1 is
8 operates to raise the stopper 17, only the leading device 2- is released and descends while straddling the rule 4. At that time, the pivot rail 20 is in the fourth example of the rule,
The locking member 23 is locked by the locking pin 28 and rotates clockwise in FIG.
- Located below rule 4. The device 2 thus passes over it and onto the pivot rail 20. The sensor 30 detects this state and operates the pulse motor 21. Thereby, the pivot rail 20
As it tilts to the side, the locking member 23 is released from the locking pin 28 and is pulled by the tension spring 25 and rotates counterclockwise to become horizontal with respect to the pivot rail 20. , a stop 24 stands upright on the pivot rail 20.

As a result, even if the pivot rail 20 is tilted, the device 2 is stopped by the stopper 24 and will not fall off. When the pivoting rail 20 eventually reaches the second rail 22 side, the rear end of the locking member 23 hits the locking pin 29 and is pushed up, and as it rotates clockwise again, the stopper 24 is moved under the pivoting rail 20. The released device 2 moves onto the second rail 22 under its own weight and slides.

The device 2 that has reached the mark inspection part A is stopped by the stopper 33
is stopped at the inspection position. When the pin cylinder moves backward there, the pressing spring 44.
44 causes the clamper fixing member 41.41 to move inward until it hits the spacing adjustment plate 45.46. As a result of this movement, the clampers 39 and 39 chuck the device 2, and the mark surface is placed on the mark inspection television camera 3 above.
Directly face 2. The spacing between the clampers 39.39 can be easily adjusted by moving the spacing adjustment plates 45.46. That is, when the distance adjustment knob 52 is turned to rotate the drive pinion 47, the racks 49 and 50 meshed on both sides thereof move in opposite directions. For example, when the drive pinion 47 is rotated clockwise,
The rack 49 moves to the right in FIG.
0 moves to the left. Accordingly, the interval adjustment plate 46 moves to the right, while the interval adjustment plate 45 moves to the left, and the interval between the clampers 39 and 390 widens.

When the mark inspection is completed, the clampers 39 and 39 are separated by the action of the pin cylinder, and the stopper 33 is moved back by the action of the cylinder 34, so that the device 2 is released and further descends on the second rail 22, and the lead is removed. It reaches inspection section B. There, substantially the same thing as in the mark inspection section A is performed. That is, after the device 2 is stopped at a fixed position by the stopper 71, it is clamped by the clampers 58 and 58, which are closed by the action of the pin cylinder, and is held in the correct direction with respect to the TV camera 76 for lead inspection located on the side. . When the inspection is finished, the clamper 58.5 opens and the stopper 71 opens.
The device 2 is moved backward, and the device 2 descends and enters the loading section 78, where it is classified into good and defective products based on a signal from the camera section, and loaded into a carrier. The apparatus according to the present invention repeats the above operations and continuously and automatically inspects device marks and leads for suitability.

〔Effect of the invention〕

Since the present invention is two-fold, it is important to check the suitability of printing on packages such as integrated circuits and the presence or absence of bent pins.
This has the effect of automatically and efficiently checking on one line.

[Brief explanation of the drawing]

Figure 1 is a diagram showing the overall configuration of the device according to the present invention, Figure 2 is a diagram showing the configuration of the rule part, Figure 3 is a diagram showing the clamping mechanism in the rule part, and Figure 4 is a diagram showing the markings. 5 and 6 are diagrams showing the clamping mechanism of the mark inspection section. FIG. 7 is a diagram showing the mechanism for stopping the device in the lead inspection section in the fixed position. FIG. 8 is a diagram showing the clamp mechanism of the lead inspection section. Explanation of symbols 4-th rule, 7-clamp mechanism, 20-pivotal rail,
22-Second rail, 32-TV camera for mark inspection,
7 Television camera for low lead inspection, A--mark inspection department, B-lead inspection department Patent applicant: Oei Kosan Co., Ltd. Procedural amendment August 6, 1980 Patent application No. 117681 2, Invention Name: Integrated circuit inspection equipment 3, relationship with the case of the person making the amendment Patent applicant address: No. 3, 1325 Tajima, Urawa City, Saitama Name: Seiei Kosan Co., Ltd. (name) 4. Agent address: Tokyo 1-14-5 Kyobashi, Chuo-ku As shown in the attached appendix, the column "3. Detailed explanation of the invention" in the procedural amendment specification is amended as follows. From line 7 to line 8 of page 5 of the 1 specification, the statement ``19 is a sensor that detects the movement of the stopper 17.'' was replaced with ``19 is a sensor T, which is a device stopped by the stopper 17.'' 2 detects that the stopper 17 has descended as the stopper 17 has risen, and operates the sear 1 under 18 to lower the stopper 17 again." 2 On page 9, line 1 [Rack frame 66 a, 67 a]
" is corrected to "Rack frame 7 66a, 67a (rack frame 6 (3a is not shown in the drawing)").
2nd rail 22”. that's all

Claims (1)

[Claims] A pivoting rail is installed at the intersection of the second rule and the second rail that are inclined in opposite directions, and is pivoted to be in a straight line with each of the first rule and the second rail. After temporarily stopping the devices sliding in succession on the second rail,
In addition, a mark inspection camera and a lead inspection camera are installed on the second rail, and in each inspection section, devices sliding on the second rail are placed in the inspection position. An integrated circuit inspection device equipped with a clamp mechanism that stops and holds the device.