JPS60249777A - Structure of high-speed fluid valve - Google Patents

Structure of high-speed fluid valve

Info

Publication number
JPS60249777A
JPS60249777A JP10715184A JP10715184A JPS60249777A JP S60249777 A JPS60249777 A JP S60249777A JP 10715184 A JP10715184 A JP 10715184A JP 10715184 A JP10715184 A JP 10715184A JP S60249777 A JPS60249777 A JP S60249777A
Authority
JP
Japan
Prior art keywords
valve
control
rod
flow path
iron piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10715184A
Other languages
Japanese (ja)
Inventor
Katsumi Sasaki
勝美 佐々木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Seimitsu Sokki KK
Original Assignee
Tokyo Seimitsu Sokki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Seimitsu Sokki KK filed Critical Tokyo Seimitsu Sokki KK
Priority to JP10715184A priority Critical patent/JPS60249777A/en
Publication of JPS60249777A publication Critical patent/JPS60249777A/en
Priority to US07/071,529 priority patent/US4763560A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/18Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/19Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
    • G05B19/33Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an analogue measuring device
    • G05B19/35Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an analogue measuring device for point-to-point control
    • G05B19/351Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an analogue measuring device for point-to-point control the positional error is used to control continuously the servomotor according to its magnitude
    • G05B19/353Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an analogue measuring device for point-to-point control the positional error is used to control continuously the servomotor according to its magnitude with speed feedback only
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B11/00Servomotor systems without provision for follow-up action; Circuits therefor
    • F15B11/006Hydraulic "Wheatstone bridge" circuits, i.e. with four nodes, P-A-T-B, and on-off or proportional valves in each link
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B11/00Servomotor systems without provision for follow-up action; Circuits therefor
    • F15B11/02Systems essentially incorporating special features for controlling the speed or actuating force of an output member
    • F15B11/04Systems essentially incorporating special features for controlling the speed or actuating force of an output member for controlling the speed
    • F15B11/042Systems essentially incorporating special features for controlling the speed or actuating force of an output member for controlling the speed by means in the feed line, i.e. "meter in"
    • F15B11/0426Systems essentially incorporating special features for controlling the speed or actuating force of an output member for controlling the speed by means in the feed line, i.e. "meter in" by controlling the number of pumps or parallel valves switched on
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/30Nc systems
    • G05B2219/34Director, elements to supervisory
    • G05B2219/34215Microprocessor
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/30Nc systems
    • G05B2219/37Measurements
    • G05B2219/37462Resistor, potentiometers
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/30Nc systems
    • G05B2219/41Servomotor, servo controller till figures
    • G05B2219/41302On off fluid valve and power cylinder
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/30Nc systems
    • G05B2219/41Servomotor, servo controller till figures
    • G05B2219/41303Flow rate valve controls speed

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Magnetically Actuated Valves (AREA)

Abstract

PURPOSE:To obtain the structure of a fluid valve which can control with quick response by providing a rod valve comprising an on-off control valve using a solenoid, which can be operated at high speed, and performing pulse width control with high frequency. CONSTITUTION:An open-and-close valve assembly 10 comprises a base 12 and a cover 14 which are airtightly disposed. Control passages Ps, C1 where pressurized fluid is circulated are disposed in the base 12. A valve seat 18 having a valve port 18a connecting both passages Ps, C1 to each other is provided between both control passages Ps, C1. A rod valve 20 is disposed on the valve port 18a. The rod valve 20 is pressed to the valve port 18a by a spring 28, and regularly closed. On the other hand, a solenoid block 32 is disposed in a space 12a and adapted to attract a movable iron piece 30. The rod valve 20 is moved axially against a spring 28 by the movable iron piece 30.

Description

【発明の詳細な説明】 [技術分野] 本発明は高速型流体弁構造、特に油圧あるいは空圧アク
チユエータの流路を良好な応答性でオン・オフ制御可能
な高速型流体弁構造警こ関するものである。
[Detailed Description of the Invention] [Technical Field] The present invention relates to a high-speed fluid valve structure, and particularly to a high-speed fluid valve structure that is capable of controlling the flow path of a hydraulic or pneumatic actuator on and off with good responsiveness. It is.

[従来技術] 各種の油圧あるい空圧制御機器において所定の移動ある
いは位置決めを行うため流体アクチュエータが用いられ
ており、このアクチュエータへの圧力流体の供給を制御
するために各種の流体弁が用いられている。
[Prior Art] Fluid actuators are used to perform predetermined movement or positioning in various hydraulic or pneumatic control devices, and various fluid valves are used to control the supply of pressure fluid to these actuators. ing.

従来の一般的な流体弁は弁シリンダ内をソレノイド等に
よって往復駆動されるスプールにより弁口の開閉を行う
装置が用いられており、この従来装置によれば、弁口の
オン・オフ制御ばかりでなく、スプールの停止位置を選
択することによって圧力流体の流量、圧力を任意に調整
可能であるという利点があった。
Conventional general fluid valves use a device that opens and closes the valve port using a spool that is driven reciprocally within the valve cylinder by a solenoid, etc. According to this conventional device, only on/off control of the valve port is performed. However, there was an advantage that the flow rate and pressure of the pressure fluid could be arbitrarily adjusted by selecting the stop position of the spool.

しかしながら、このような従来のスプール型流体弁では
、その応答速度が遅く、迅速な制御が不可能であるとい
う欠点があり、高速度かつ高粕麿の油圧あるいは空圧機
器に適さないという欠点があった。
However, such conventional spool-type fluid valves have the disadvantage that their response speed is slow and quick control is impossible, and they are not suitable for high-speed and high-performance hydraulic or pneumatic equipment. there were.

特に、近年の各種ロボット機器においてはアクヂコエー
タである腕の動きとして極めて微妙な動きが要望されて
おり、かつ精密ロボットでは腕白体の動き時に全体の重
量バランスが変化すること等も考慮した応答性の速い制
御を必要とし、このような精密な制御に適する流体弁構
造が強く要望されていた。
In particular, in recent years various robot devices require extremely delicate movements of the arms, which are actuators, and precision robots require responsiveness that takes into account changes in the overall weight balance when the arms and whites move. Fast control is required, and there has been a strong demand for a fluid valve structure suitable for such precise control.

[発明の目的コ 本発明は上記従来の課題に鑑みなされたものであり、そ
の目的は、応答性の速い精密制御に適した流体弁構造を
提供することにある。
[Object of the Invention] The present invention has been made in view of the above-mentioned conventional problems, and its object is to provide a fluid valve structure suitable for precise control with quick response.

本発明は特に流体弁自体は流量制御のできないオン・オ
フ制御弁とし、このオン・オフ制御を高速度で動作可能
とし、この結果パルス幅制御を高周波数で行うことによ
って流量その他の任意の制御をパルス幅変調された制御
として行い従来にない極めて優れた制御特性を達成可能
である。
In particular, the fluid valve itself is an on/off control valve that cannot control the flow rate, and this on/off control can be operated at high speed.As a result, by performing pulse width control at high frequency, flow rate and other arbitrary control can be performed. By performing pulse width modulated control, it is possible to achieve extremely superior control characteristics that have never been seen before.

[発明の構成] 上記目的を達成するために、本発明は、制御流路に連通
ずる弁口を有する弁座と、先端が前記弁座と接触開離し
て弁口を開閉するように軸方向に移動自在に軸支された
ロッド弁と、前記ロッド弁を軸方向の設定された1方向
に付勢するスプリング手段と、一端が前記ロッド弁に係
合して該ロッド弁を前記スプリング手段のイ」力方向に
抗して移動制御する可動鉄片と、外部入力指令により励
磁された前記可動鉄片を吸引するソレノイドとを有する
開閉弁組立体を含み、前記ロッド弁の軸方向移動によっ
て弁口をオン・オフ制御することを特徴とする。
[Structure of the Invention] In order to achieve the above object, the present invention includes a valve seat having a valve port that communicates with a control flow path, and a valve seat that is arranged in an axial direction so that the tip contacts and separates from the valve seat to open and close the valve port. a rod valve that is movably supported by a shaft; a spring means that biases the rod valve in one predetermined axial direction; (b) includes an opening/closing valve assembly having a movable iron piece that controls movement against the direction of force, and a solenoid that attracts the movable iron piece excited by an external input command; the valve opening is opened by axial movement of the rod valve; It is characterized by on/off control.

[実施例の説明] 以下図面に基づいて本発明の好適な実施例を説明する。[Explanation of Examples] Preferred embodiments of the present invention will be described below based on the drawings.

第1図には本発明に係る流体弁構造の好適な第1実施例
が示されており、開閉弁組立体10は複数組並設されて
いるが図には単一の組立体10のみが示されている。開
閉弁組立体1oは基体12と蓋体14とを含み、両者間
にはOリング16等のシール材が圧縮状態で挿入され、
開閉弁組立体10内に設(プられる流路を密閉している
FIG. 1 shows a preferred first embodiment of the fluid valve structure according to the present invention, in which a plurality of on-off valve assemblies 10 are arranged in parallel, but only a single assembly 10 is shown in the figure. It is shown. The on-off valve assembly 1o includes a base body 12 and a lid body 14, between which a sealing material such as an O-ring 16 is inserted in a compressed state.
The flow path provided within the on-off valve assembly 10 is sealed.

基体12には圧力流体、実施例においては、高圧空気が
流通する制御流路が設【ブられ、実施例においてこの制
御流路は流体圧力源に連なる流路P と負荷側に連なる
流路C7とを含む。
The base body 12 is provided with a control flow path through which a pressure fluid (in the embodiment, high pressure air) flows, and in the embodiment, the control flow path includes a flow path P connected to a fluid pressure source and a flow path C7 connected to the load side. including.

そして、両制御流路P、01間には前記基体12に固定
された弁座18が設けられており、その弁口18aが両
流路P、C1を連通している。
A valve seat 18 fixed to the base body 12 is provided between both control channels P and 01, and its valve port 18a communicates both channels P and C1.

本発明において特徴的なことは、前記弁座18に対して
接触開離するロッド弁20が設(プられていることであ
り、該ロッド弁20はその先端20aが前記弁座18と
接触して弁口18aを閉止し、また先端20aが弁座か
ら開離して弁口18aを開放する。そして、このロッド
弁20は前記弁口18aの開閉を行うために軸方向に移
動自在に軸支されており、実施例においては、ロッド弁
20は基台12に固定された軸受22によってそのほぼ
中央部が軸支されている。
A characteristic feature of the present invention is that a rod valve 20 is provided that contacts and opens with respect to the valve seat 18, and the tip 20a of the rod valve 20 contacts the valve seat 18. to close the valve port 18a, and the tip 20a separates from the valve seat to open the valve port 18a.The rod valve 20 is pivoted to be movable in the axial direction to open and close the valve port 18a. In the embodiment, the rod valve 20 is pivotally supported at approximately the center by a bearing 22 fixed to the base 12.

ロッド弁20の他端にはバネ受24が圧入固定されてお
り、前記蓋体14にネジ固定されているバネ座26との
間にスプリング28が圧縮状態で挿入されており、この
結果、ロッド弁20にはスプリング28によって常時下
方、すなわち弁口18aを閉止する方向に付勢力が与え
られている。
A spring receiver 24 is press-fitted to the other end of the rod valve 20, and a spring 28 is inserted in a compressed state between it and a spring seat 26 screwed to the lid 14. As a result, the rod A spring 28 always applies a downward biasing force to the valve 20, that is, in a direction to close the valve port 18a.

従って、図示した実施例においては、通常の状態では、
ロッド弁20はスプリング28によって弁座18側に押
圧付勢され、弁口18aが両制御流路Ps101を遮断
していることが理解される。
Therefore, in the illustrated embodiment, under normal conditions:
It is understood that the rod valve 20 is urged toward the valve seat 18 by the spring 28, and the valve port 18a blocks both control flow paths Ps101.

実施例において、前記バネ座26は蓋体14にネジ固定
されているのでその捩込み量を調節することにより、ス
プリング28からロッド弁20に与えられる付勢力を調
整することができる。
In the embodiment, since the spring seat 26 is screwed to the lid 14, the biasing force applied to the rod valve 20 from the spring 28 can be adjusted by adjusting the screwing amount.

前述したスプリング付勢されたロッド弁20をこのスプ
リング付勢力に抗して弁開口方向へ移動するために、可
動鉄片30が設けられており、可動鉄片30は基体12
に設けられた空室12a内に緩く挿入配置されたおり、
該空室12a内を自由に移動可能である。そしてこの可
動鉄片30の一端に設けられた透孔30aには前記ロッ
ド弁20が貫通しており、可動鉄片30の上側に前記バ
ネ受24が当接している。
A movable iron piece 30 is provided in order to move the spring-biased rod valve 20 in the valve opening direction against the spring biasing force, and the movable iron piece 30 is attached to the base body 12.
The cage is loosely inserted into the empty chamber 12a provided in the
It is possible to move freely within the empty space 12a. The rod valve 20 passes through a through hole 30a provided at one end of the movable iron piece 30, and the spring receiver 24 is in contact with the upper side of the movable iron piece 30.

そして、前記可動鉄片上側にはソレノイドブロック32
が配置されてその励磁時に可動鉄片30が、第1図のよ
うに、吸引される。
A solenoid block 32 is provided above the movable iron piece.
is placed and when it is energized, the movable iron piece 30 is attracted as shown in FIG.

ソレノイドブロック32は2個のソレノイド34.36
を含み、各ソレノイド34.36のコア38.40には
積層板からなるアーマチャ42がリベット固定されてい
る。このようにして構成されたソレノイドブロック32
はリベット44によって蓋体14に強固に固定されてい
る。
The solenoid block 32 has two solenoids 34 and 36.
An armature 42 made of a laminated plate is riveted to the core 38.40 of each solenoid 34.36. Solenoid block 32 configured in this way
are firmly fixed to the lid body 14 by rivets 44.

従って、図示したように、外部入力指令によって各ソレ
ノイド34.36が励磁されると、可動鉄片30はスプ
リング28の付勢力に抗してコア38.40に吸着され
、この結果、ロッド弁20は弁口18aを開放すること
ができる。
Therefore, as shown in the figure, when each solenoid 34.36 is energized by an external input command, the movable iron piece 30 is attracted to the core 38.40 against the urging force of the spring 28, and as a result, the rod valve 20 is Valve port 18a can be opened.

以上のように、本実施例によれば、ソレノイドブロック
32への電流が供給されていない状態では、ロッド弁2
0はスプリング28によって弁座18に向って押圧付勢
され、弁口18aは確実に閉止されて流路P と流路C
1とは完全に遮断されている。
As described above, according to this embodiment, when no current is supplied to the solenoid block 32, the rod valve 2
0 is urged toward the valve seat 18 by the spring 28, and the valve port 18a is reliably closed, thereby opening the flow path P and the flow path C.
1 is completely cut off.

一方、外部からの入力指令によってソレノイド34.3
6が励磁されると、可動鉄片30の吸引移動によってロ
ッド弁20は迅速に弁座18から離れ、弁口18aを開
くことができる。そして、この弁口18aのオン・オフ
制御を迅速に行うことによって、流体圧力源からの制御
流体は負荷側C1に向って小さな遅れで供給さ、れ、ま
た本発明における電磁装置はその応答性が速いので高周
波数でオン・オフ制御することもでき、各種のロボット
等の油圧あるいは空圧制御機器を迅速にかつ高精度で制
御可能である。
On the other hand, due to an input command from the outside, solenoid 34.3
6 is energized, the rod valve 20 is quickly moved away from the valve seat 18 by suction movement of the movable iron piece 30, and the valve port 18a can be opened. By quickly controlling the on/off of the valve port 18a, the control fluid from the fluid pressure source is supplied toward the load side C1 with a small delay, and the electromagnetic device of the present invention has a high responsiveness. Since it is fast, it is possible to perform on/off control at high frequencies, and it is possible to control hydraulic or pneumatic control equipment such as various robots quickly and with high precision.

第2図には本発明の開閉弁組立体10を複数個並設した
空圧アクチュエータの空圧切換回路の概略的な構成が示
されている。空圧切換弁50は圧力源流路P3、大気開
放流路Ex及び負荷側流路C1C2を含み、空圧アクチ
ュエータ52のピストン54に対する右作動室に前記負
荷側流路C1が連通され、また左作動室に前記負荷側流
路C2が連通されている。
FIG. 2 shows a schematic configuration of a pneumatic switching circuit of a pneumatic actuator in which a plurality of on-off valve assemblies 10 of the present invention are arranged in parallel. The pneumatic switching valve 50 includes a pressure source flow path P3, an atmospheric release flow path Ex, and a load side flow path C1C2. The load-side flow path C2 is communicated with the chamber.

前記空圧切換回路50には14個の開閉弁組立体10−
1〜10−14が設けられている。そして、開閉弁組立
体10−1〜1o−4までの4個は負荷側流路C1を外
部へ開放するために用いられ、また組立体10−5〜1
o−7の3個は負荷側流路C1に供給源圧ノ〕を印加す
るために用いられる。同様に、組立体10−8〜10−
10の3個は負荷側流路C2に供給源圧力を印加するた
めに用いられ、組立体10−11〜10−14の4個は
負荷側流路C2を外気に外気へ開放するために用いられ
る。
The pneumatic switching circuit 50 includes 14 on-off valve assemblies 10-.
1 to 10-14 are provided. The four on-off valve assemblies 10-1 to 1o-4 are used to open the load side flow path C1 to the outside, and the assemblies 10-5 to 1o-4 are used to open the load side flow path C1 to the outside.
Three o-7 are used to apply source pressure to the load side flow path C1. Similarly, assemblies 10-8 to 10-
Three assemblies 10 are used to apply source pressure to the load-side flow path C2, and four assemblies 10-11 to 10-14 are used to open the load-side flow path C2 to the outside air. It will be done.

前記14個の開閉弁組立体10−1〜10−14の各ソ
レノイドに外部入力指令を選択的に供給するために制御
回路ブロック56が設けられており、その分配器58か
らの指令信号に応じて選択された開閉弁組立体が作動す
ることとなる。制御回路ブロック56は外部指令及び空
圧アクチュエータ52の位置検出器60からの位置検出
信号を比較する比較器62及び演算器64を含み、現在
のアクチユエータ52の位置に応じて各開閉弁組立体1
0に所望の励磁信号を供給し、これによって所望のパル
ス幅制御を行い、制御流体の流量、圧力、速度をも制御
することができアクチュエータの移動を迅速に行い、か
つ高精度の位置決めを達成することができる。
A control circuit block 56 is provided to selectively supply external input commands to each of the solenoids of the 14 on-off valve assemblies 10-1 to 10-14. The selected on-off valve assembly will be activated. The control circuit block 56 includes a comparator 62 and an arithmetic unit 64 that compare the external command and the position detection signal from the position detector 60 of the pneumatic actuator 52, and controls each opening/closing valve assembly 1 according to the current position of the actuator 52.
By supplying the desired excitation signal to 0, the desired pulse width can be controlled, and the flow rate, pressure, and speed of the control fluid can also be controlled, allowing the actuator to move quickly and achieving highly accurate positioning. can do.

実施例において、流量制御は前述したデユーティ比制御
に加えて各流路に対して3〜4個設(プられている各開
閉弁組立体の作動個数を制御することによっても行われ
、これ等各種の制御を組合わせることによって極めて微
妙なアクチュエータ制御を達成可能である。
In the embodiment, in addition to the duty ratio control described above, flow rate control is also performed by controlling the number of operating valve assemblies that are installed (3 to 4) for each flow path. Extremely delicate actuator control can be achieved by combining various types of control.

更に、本発明において、前述した各開閉弁組立体10の
弁口面積をそれぞれ異なる面積と1ノ、これらの組合わ
せによって一層細かい流量あるいは流速制御を達成する
ことができる。
Further, in the present invention, by setting the valve opening areas of each of the on-off valve assemblies 10 to be different from each other, and by combining these areas, even more fine control of the flow rate or flow rate can be achieved.

第3図には本発明に係る高速型流体弁構造の第2実施例
が示されており、第1実施例と同−又は対応部材には同
一符号を付して説明を省略する。
FIG. 3 shows a second embodiment of the high-speed fluid valve structure according to the present invention, in which the same or corresponding members as in the first embodiment are given the same reference numerals and their explanations will be omitted.

第2実施例において特徴的なことは、ロッド弁先@ 2
0 aがボール弁からなることであり、円筒型の弁座1
8と協働して漏れのない弁を形成している。
The characteristic feature of the second embodiment is that the rod valve tip @2
0 a consists of a ball valve, and a cylindrical valve seat 1
8 to form a leak-free valve.

また、第2実施例においては、バネ座26はその先端が
バネ受24の近傍まで接近しており、その先端がロッド
弁20の上方へのストッパを兼用している。従って、第
2実施例では、ソレノイド34.36の励磁時にもバネ
受24はバネ座26に当接した状態でその停止位置が定
められるので可動鉄片30は両コア38.40に完全に
密着することなく僅かに間隙を持った状態で吸引され、
この結果、ソレノイド34.36への励磁が断たれた時
に可動鉄片30は迅速にコア38.40から離れること
ができ、装置の応答性を高めることができる。
Further, in the second embodiment, the tip of the spring seat 26 approaches the spring receiver 24, and the tip also serves as a stopper for stopping the rod valve 20 upward. Therefore, in the second embodiment, even when the solenoid 34, 36 is energized, the spring receiver 24 is brought into contact with the spring seat 26 at its stop position, so that the movable iron piece 30 is in complete contact with both cores 38, 40. It is sucked with a slight gap without
As a result, when the excitation to the solenoid 34, 36 is cut off, the movable iron piece 30 can quickly move away from the core 38, 40, increasing the responsiveness of the device.

第4図には本発明に係る高速型流体弁構造の好適な第3
実施例が示されており、前述した各実施例と同−又は対
応部材には同一符号を付してその説明を省略する。
FIG. 4 shows a third preferred embodiment of the high-speed fluid valve structure according to the present invention.
Embodiments are shown, and the same or corresponding members as in each of the above-mentioned embodiments are given the same reference numerals, and their explanations will be omitted.

本実茄例において特徴的なことは、スプリング28がロ
ッド弁20を弁座18から開離する方向に付勢している
ことであり、このために、基台12に固定されたバネ座
26とロッド弁20の上端に固定されたバネ受24との
間にスプリング28が圧縮状態で挿入されている。従っ
て、ロッド弁20は常時スプリング28によって上方へ
付勢されている。
What is characteristic about this example is that the spring 28 biases the rod valve 20 in the direction of separating it from the valve seat 18. For this purpose, the spring seat 26 fixed to the base 12 A spring 28 is inserted in a compressed state between the spring receiver 24 and the spring receiver 24 fixed to the upper end of the rod valve 20. Therefore, the rod valve 20 is always urged upward by the spring 28.

前記バネ受24とホルダ66との間には可動鉄片30の
一端が挟持され、その細端はソレノイドブロック32の
ヨーク68に接触保持され、また前記ホルダ66に一端
が固定された押えバネ70の自由端が前記可動鉄片30
をヨーク68に向って押圧保持している。
One end of the movable iron piece 30 is held between the spring receiver 24 and the holder 66, and its narrow end is held in contact with the yoke 68 of the solenoid block 32. The free end is the movable iron piece 30
is held pressed against the yoke 68.

従って、この第3実施例によれば、外部入力指令が印加
されたときにソレノイド34は可動鉄片30を吸引して
迅速に弁口18aをボール弁20aによって閉止するこ
とができる。
Therefore, according to the third embodiment, when an external input command is applied, the solenoid 34 attracts the movable iron piece 30 and the valve port 18a can be quickly closed by the ball valve 20a.

第5図には本発明の第4実施例が示され、前述した各実
施例と同−又は対応部材に同一符号をイ4して説明を省
略する。
FIG. 5 shows a fourth embodiment of the present invention, in which the same or corresponding members as in each of the previously described embodiments are denoted by the same reference numerals, and their explanation will be omitted.

第4実施例において特徴的なことは、スプリング28に
よってロッド弁28を弁座18から開放付勢する際に、
バネ受24で上方に押し上げられる可動鉄片30は蓋体
14に設けられた緩衝ストッパ72によってその衝撃が
和らげられていることであり、このために、前記緩衝ス
トッパ72と蓋体14との間にはゴム等からなるダンパ
74が挿入されている。更に、この第4実施例において
は、ソレノイドブロック32の励磁が断たれてOラド弁
20がスプリング28によって開放方向へ移動する時の
速度を高めるために、蓋体14に永久磁石76が設けら
れていることであり、これによって、可動鉄片30は常
時永久磁石76側に予力されており、弁口18aの開放
を迅速に行うことができる。
The characteristic feature of the fourth embodiment is that when the rod valve 28 is urged to open from the valve seat 18 by the spring 28,
The impact of the movable iron piece 30 pushed upward by the spring receiver 24 is softened by the buffer stopper 72 provided on the lid 14, and for this reason, there is a gap between the buffer stopper 72 and the lid 14. A damper 74 made of rubber or the like is inserted. Furthermore, in this fourth embodiment, a permanent magnet 76 is provided on the lid body 14 in order to increase the speed when the O-rad valve 20 is moved in the opening direction by the spring 28 when the solenoid block 32 is de-energized. As a result, the movable iron piece 30 is always preloaded toward the permanent magnet 76, and the valve port 18a can be opened quickly.

第6,7図には本発明のロッド弁先端の好適な実施例が
示さている。
6 and 7 show a preferred embodiment of the rod valve tip of the present invention.

第6図はロッド弁20の先端に円錐弁20aを設けた構
造を示し、弁座18との間で良好な流路開閉作用を行う
ことができる。更に第7図のロッド弁20はその先端が
弁口18a内を摺接する円筒型弁20aからなる構造を
示し、ロッド弁20に必要とするストロークは他の構造
より長くなるが、弁座18との接触開離部の摩耗が少な
く耐久性に優れているという利点を有する。
FIG. 6 shows a structure in which a conical valve 20a is provided at the tip of the rod valve 20, and can perform a good flow path opening/closing action with the valve seat 18. Furthermore, the rod valve 20 shown in FIG. 7 has a structure consisting of a cylindrical valve 20a whose tip slides in the valve port 18a, and the stroke required for the rod valve 20 is longer than that of other structures. It has the advantage that there is little wear on the contact/separation part and it has excellent durability.

[発明の効果] 以上説明したように、本発明によれば、弁口のオン・オ
フ開閉制御を迅速に行う高速型流体弁構造を提供するこ
とができ、各種の油圧あるいは空圧アクチュエータに極
めて好適な弁構造を提供できる利点を有する。
[Effects of the Invention] As explained above, according to the present invention, it is possible to provide a high-speed fluid valve structure that quickly controls the on/off opening and closing of a valve port, which is extremely suitable for various hydraulic or pneumatic actuators. It has the advantage of providing a suitable valve structure.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明に係る高速型流体弁構造の好適な第1実
施例を示す断面図、 第2図は本発明に係る開閉弁組立体を複数個並設して空
圧アクチュエータを作動させる全体構成図、 第3図は本発明に係る高速型流体弁構造の好適な第2実
施例を示す断面図、 第4,5図はそれぞれ本発明の第3及び第4実施例を示
す要部断面図、 第6.7図はそれぞれ本発明に好適なロッド弁の先端構
造を示す要部断面図である。 10 ・・・ 開閉弁組立体 18 ・・・ 弁座 18a ・・・ 弁口 20 ・・・ ロッド弁 22 ・・・ 軸受 28 ・・・ スプリング ・・・ 30 ・・・ 可動鉄片 32 ・・・ ソレノイドブロック 34.36 ・・・ ソレノイド P8 ・・・ 圧力源流路 EX ・・・ 開放流路 c、c2 ・・・ 負荷側流路。 出願人 東京精密測器株式会社 代理人 弁理士 古1)研二 (外1名) 第1図 第2図 ↓ 第3図 第4図
Fig. 1 is a sectional view showing a preferred first embodiment of the high-speed fluid valve structure according to the present invention, and Fig. 2 shows a plurality of on-off valve assemblies according to the present invention arranged in parallel to operate a pneumatic actuator. 3 is a sectional view showing a second preferred embodiment of the high-speed fluid valve structure according to the present invention; FIGS. 4 and 5 are main parts showing the third and fourth embodiments of the present invention, respectively. 6.7 are sectional views of essential parts showing the tip structure of a rod valve suitable for the present invention. 10... Opening/closing valve assembly 18... Valve seat 18a... Valve port 20... Rod valve 22... Bearing 28... Spring... 30... Movable iron piece 32... Solenoid Blocks 34, 36...Solenoid P8...Pressure source flow path EX...Open flow paths c, c2...Load side flow path. Applicant: Tokyo Precision Measuring Instruments Co., Ltd. Agent: Patent attorney: Kenji (1st year) (1 other person) Figure 1 Figure 2 ↓ Figure 3 Figure 4

Claims (1)

【特許請求の範囲】 (1)制御流路に連通する弁口を有する弁座と、先端が
前記弁座と接触開離して弁口を開閉するように軸方向に
移動自在に軸支された0ツド弁と、前記ロッド弁を軸方
向の設定された1方向に付勢するスプリング手段と、一
端が前記ロッド弁に係合して該ロッド弁を前記スプリン
グ手段の付勢方向に抗して移動制御する可動鉄片と、外
部入力指令により励磁されて前記可動鉄片を吸引するソ
レノイドとを有する開閉弁組立体を含み、前記ロッド弁
の軸方向移動によって弁口をオン・オフ制御することを
特徴とする高速型流体弁構造。 (2、特許請求の範囲(1)記載の構造において、制御
流路に対して複数の開閉弁組立体が並設され、各開閉弁
を組合わせてオン・オフ制御することにより制御流路の
流量等を制御可能とすることを特徴とする高速型流体弁
構造。 (3)特許請求の範囲(2)記載の構造において、各開
閉弁組立体は異なる開口面積の弁口を有することを特徴
とする高速型流体弁構造
[Scope of Claims] (1) A valve seat having a valve port communicating with a control flow path, and a shaft supported so as to be movable in the axial direction so that the tip contacts and separates from the valve seat to open and close the valve port. a spring means for biasing the rod valve in one predetermined axial direction, one end of which engages the rod valve to bias the rod valve against the biasing direction of the spring means; It is characterized by including an opening/closing valve assembly having a movable iron piece whose movement is controlled and a solenoid which is excited by an external input command and attracts the movable iron piece, and on/off control of the valve port is controlled by the axial movement of the rod valve. High-speed fluid valve structure. (2. In the structure described in claim (1), a plurality of on-off valve assemblies are arranged in parallel for the control flow path, and each on-off valve is combined and controlled on and off to control the control flow path. A high-speed fluid valve structure characterized by being able to control flow rate, etc. (3) In the structure described in claim (2), each opening/closing valve assembly has a valve port with a different opening area. High-speed fluid valve structure with
JP10715184A 1984-05-25 1984-05-25 Structure of high-speed fluid valve Pending JPS60249777A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10715184A JPS60249777A (en) 1984-05-25 1984-05-25 Structure of high-speed fluid valve
US07/071,529 US4763560A (en) 1984-05-25 1987-07-08 Method and apparatus of controlling and positioning fluid actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10715184A JPS60249777A (en) 1984-05-25 1984-05-25 Structure of high-speed fluid valve

Publications (1)

Publication Number Publication Date
JPS60249777A true JPS60249777A (en) 1985-12-10

Family

ID=14451797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10715184A Pending JPS60249777A (en) 1984-05-25 1984-05-25 Structure of high-speed fluid valve

Country Status (1)

Country Link
JP (1) JPS60249777A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3335805A1 (en) * 2016-12-19 2018-06-20 Nordson Corporation Piezoelectric jetting dispenser

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49100616A (en) * 1973-01-27 1974-09-24
JPS5144187U (en) * 1974-09-29 1976-04-01
JPS5425248A (en) * 1977-07-29 1979-02-26 Hitachi Ltd Vacuum soldering apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49100616A (en) * 1973-01-27 1974-09-24
JPS5144187U (en) * 1974-09-29 1976-04-01
JPS5425248A (en) * 1977-07-29 1979-02-26 Hitachi Ltd Vacuum soldering apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3335805A1 (en) * 2016-12-19 2018-06-20 Nordson Corporation Piezoelectric jetting dispenser

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