JPS60244065A - ヘテロ接合バイポ−ラ半導体装置の製造方法 - Google Patents

ヘテロ接合バイポ−ラ半導体装置の製造方法

Info

Publication number
JPS60244065A
JPS60244065A JP59098547A JP9854784A JPS60244065A JP S60244065 A JPS60244065 A JP S60244065A JP 59098547 A JP59098547 A JP 59098547A JP 9854784 A JP9854784 A JP 9854784A JP S60244065 A JPS60244065 A JP S60244065A
Authority
JP
Japan
Prior art keywords
layer
gaas
type
base
collector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59098547A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0360178B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Kenichi Imamura
健一 今村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP59098547A priority Critical patent/JPS60244065A/ja
Publication of JPS60244065A publication Critical patent/JPS60244065A/ja
Publication of JPH0360178B2 publication Critical patent/JPH0360178B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D10/00—Bipolar junction transistors [BJT]
    • H10D10/80—Heterojunction BJTs
    • H10D10/821—Vertical heterojunction BJTs

Landscapes

  • Bipolar Transistors (AREA)
JP59098547A 1984-05-18 1984-05-18 ヘテロ接合バイポ−ラ半導体装置の製造方法 Granted JPS60244065A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59098547A JPS60244065A (ja) 1984-05-18 1984-05-18 ヘテロ接合バイポ−ラ半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59098547A JPS60244065A (ja) 1984-05-18 1984-05-18 ヘテロ接合バイポ−ラ半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS60244065A true JPS60244065A (ja) 1985-12-03
JPH0360178B2 JPH0360178B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-09-12

Family

ID=14222713

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59098547A Granted JPS60244065A (ja) 1984-05-18 1984-05-18 ヘテロ接合バイポ−ラ半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS60244065A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63155762A (ja) * 1986-12-19 1988-06-28 Fujitsu Ltd ヘテロ接合半導体装置の製造方法
JPH01132160A (ja) * 1987-11-18 1989-05-24 Hitachi Ltd 半導体装置
JPH0388335A (ja) * 1989-08-31 1991-04-12 Fujitsu Ltd ヘテロ接合バイポーラ半導体装置
US5648294A (en) * 1989-11-29 1997-07-15 Texas Instruments Incorp. Integrated circuit and method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58130559A (ja) * 1981-11-02 1983-08-04 テキサス・インスツルメンツ・インコ−ポレイテツド ３−５族バイポ−ラ集積回路装置
JPS5961073A (ja) * 1982-09-29 1984-04-07 Fujitsu Ltd 半導体装置の製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58130559A (ja) * 1981-11-02 1983-08-04 テキサス・インスツルメンツ・インコ−ポレイテツド ３−５族バイポ−ラ集積回路装置
JPS5961073A (ja) * 1982-09-29 1984-04-07 Fujitsu Ltd 半導体装置の製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63155762A (ja) * 1986-12-19 1988-06-28 Fujitsu Ltd ヘテロ接合半導体装置の製造方法
JPH01132160A (ja) * 1987-11-18 1989-05-24 Hitachi Ltd 半導体装置
JPH0388335A (ja) * 1989-08-31 1991-04-12 Fujitsu Ltd ヘテロ接合バイポーラ半導体装置
US5648294A (en) * 1989-11-29 1997-07-15 Texas Instruments Incorp. Integrated circuit and method

Also Published As

Publication number Publication date
JPH0360178B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-09-12

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