JPS60243299A - 薄膜製造方法 - Google Patents

薄膜製造方法

Info

Publication number
JPS60243299A
JPS60243299A JP10022084A JP10022084A JPS60243299A JP S60243299 A JPS60243299 A JP S60243299A JP 10022084 A JP10022084 A JP 10022084A JP 10022084 A JP10022084 A JP 10022084A JP S60243299 A JPS60243299 A JP S60243299A
Authority
JP
Japan
Prior art keywords
thin film
oxidation
substrate
conductor
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10022084A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0357199B2 (enrdf_load_stackoverflow
Inventor
Shoichiro Takahara
高原　晶一郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP10022084A priority Critical patent/JPS60243299A/ja
Publication of JPS60243299A publication Critical patent/JPS60243299A/ja
Publication of JPH0357199B2 publication Critical patent/JPH0357199B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Formation Of Insulating Films (AREA)
  • Insulating Bodies (AREA)
JP10022084A 1984-05-17 1984-05-17 薄膜製造方法 Granted JPS60243299A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10022084A JPS60243299A (ja) 1984-05-17 1984-05-17 薄膜製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10022084A JPS60243299A (ja) 1984-05-17 1984-05-17 薄膜製造方法

Publications (2)

Publication Number Publication Date
JPS60243299A true JPS60243299A (ja) 1985-12-03
JPH0357199B2 JPH0357199B2 (enrdf_load_stackoverflow) 1991-08-30

Family

ID=14268213

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10022084A Granted JPS60243299A (ja) 1984-05-17 1984-05-17 薄膜製造方法

Country Status (1)

Country Link
JP (1) JPS60243299A (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5569292A (en) * 1978-11-18 1980-05-24 Akio Nakano Metal molding
JPS58154237A (ja) * 1982-03-09 1983-09-13 Tdk Corp パツシペ−シヨン膜の製造方法
JPS5960589U (ja) * 1982-10-15 1984-04-20 セイコーインスツルメンツ株式会社 腕時計側

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5569292A (en) * 1978-11-18 1980-05-24 Akio Nakano Metal molding
JPS58154237A (ja) * 1982-03-09 1983-09-13 Tdk Corp パツシペ−シヨン膜の製造方法
JPS5960589U (ja) * 1982-10-15 1984-04-20 セイコーインスツルメンツ株式会社 腕時計側

Also Published As

Publication number Publication date
JPH0357199B2 (enrdf_load_stackoverflow) 1991-08-30

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term