JPS60217339A - Liquid crystal display panel and its manufacture - Google Patents

Liquid crystal display panel and its manufacture

Info

Publication number
JPS60217339A
JPS60217339A JP59074025A JP7402584A JPS60217339A JP S60217339 A JPS60217339 A JP S60217339A JP 59074025 A JP59074025 A JP 59074025A JP 7402584 A JP7402584 A JP 7402584A JP S60217339 A JPS60217339 A JP S60217339A
Authority
JP
Japan
Prior art keywords
liquid crystal
crystal display
display panel
grating
photosensitive resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59074025A
Other languages
Japanese (ja)
Inventor
Hiroki Saito
弘樹 斉藤
Kiyohiro Kawasaki
清弘 川崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP59074025A priority Critical patent/JPS60217339A/en
Publication of JPS60217339A publication Critical patent/JPS60217339A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/133351Manufacturing of individual cells out of a plurality of cells, e.g. by dicing
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1337Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/13378Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
    • G02F1/133788Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1337Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/133765Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers without a surface treatment

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Liquid Crystal (AREA)

Abstract

PURPOSE:To manufacture a uniform product which scarcely has an uneven orientation by forming an oriented film of a polyimide compound between a pair of electrode substrates, packing a liquid crystal, irradiating two luminous flux interference fringes of a laser to the oriented film, and forming a grating-shaped uneven part. CONSTITUTION:A luminous flux from a laser light source 15 is made to pass through a lens 18 through mirrors 16, 17, and made incident on a beam splitter 22 through a pin hole 19, a collimating lens 20 and a mirror 21. The luminous flux which is divided into two by the beam splitter 22 is reflected by mirrors 23, 24 and becomes two luminous flux interference fringes, and becomes an uneven shape after irradiating a photosensitive resin 13 on an electrode substrate 2 and developing the photosensitive resin. At the time of development, a polyimide resin 12 is also patterned selectively by using the photosensitive resin as a mask. When the electrode substrate 2 is inclined, a saw tooth-shaped pattern is obtained. In this way, an oriented film which scarcely has an uneven orientation is obtained, and the display quality is improved.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は文字表示用あるいは画像表示用の液晶表示パネ
ルおよびその製造方法に関し、とくに配向膜の形成にあ
たり新規な方法で液晶の配向性を賦与した構成の液晶表
示パネルおよびその製造方法を提供するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a liquid crystal display panel for displaying characters or images and a method for manufacturing the same, and in particular a structure in which liquid crystal orientation is imparted by a novel method in forming an alignment film. The present invention provides a liquid crystal display panel and a method for manufacturing the same.

従来例の構成とその問題点 液晶表示装置の基本構成は、一対の電極基板間に液晶を
充填したパネルに偏光板を組み合わせたもので初期配向
した液晶分子と電極に電圧を印加した状態で再配列した
液晶分子との複屈折性の差により、液晶表示装置を通過
する光の濃淡を制御するものである。液晶を初期配向さ
せるには通常液晶の接するパネル内壁に配向処理と呼ば
れる一連の処理が施される。
Conventional configuration and its problems The basic configuration of a liquid crystal display device is a panel filled with liquid crystal between a pair of electrode substrates, combined with a polarizing plate. The density of light passing through the liquid crystal display device is controlled by the difference in birefringence with the aligned liquid crystal molecules. To initially align the liquid crystal, a series of treatments called alignment treatments are usually performed on the inner wall of the panel in contact with the liquid crystal.

配向処理の一例は有機材料、例えばポリイミド樹脂を薄
く(約Q1μm前後)塗布し、約200°C以上の加熱
処理で硬化した後に、ナイロン系またはビニール系の繊
維を一定方向に何度もこすりつけるもので、配向処理の
ラビング法と呼ばれる。
An example of orientation treatment is to apply a thin layer (approximately Q1 μm) of an organic material such as polyimide resin, harden it by heat treatment at approximately 200°C or higher, and then rub nylon or vinyl fibers in a certain direction many times. This is called the rubbing method for orientation treatment.

ラビング法では有機配向膜の材質、硬化条件。In the rubbing method, the material of the organic alignment film and the curing conditions.

ラビング布の材質、繊維構造、こすりつけの押圧力、相
対速度2回数等を組合せにより実験し、経験的にその最
適条件をめているのが実状である。
The reality is that the optimum conditions are determined empirically by experimenting with combinations of the material of the rubbing cloth, the fiber structure, the pressing force of rubbing, the relative speed twice, etc.

しかしながら、ラビングの場合機械的に配向膜表面をこ
することから、脱落したラビング布繊維やごみ、ちりに
より配向膜表面に欠陥や異常スクラッチを生じ易いこと
、ラビング布の耐久性が十分でないために使用回数を重
ねる度に配向性能が変化したり、配向の不均一を生じる
などの欠点がある。
However, in the case of rubbing, since the surface of the alignment film is mechanically rubbed, defects and abnormal scratches are likely to occur on the surface of the alignment film due to fallen rubbing cloth fibers, dirt, and dust, and the durability of the rubbing cloth is not sufficient. There are drawbacks such as the alignment performance changing each time it is used and non-uniform alignment.

さらに画像表示用の液晶パネルで、多数の絵素6 ・ の一つ一つに対応して薄膜トランジスタなどのスイッチ
ング素子が電極基板に構成されたものでは基板表面に必
らず凹凸があり、ラビング法による配向ではこの凹凸の
段差近傍で配向のむらを生じることがある。とくに段差
が大きいほどそれが顕著である。加えてラビングによる
帯電によってスイッチング素子やその他の素子を静電破
壊させてしまうことも少なくない。
Furthermore, in liquid crystal panels for displaying images, in which switching elements such as thin film transistors are configured on electrode substrates corresponding to each of a large number of picture elements 6, the surface of the substrate is inevitably uneven, and the rubbing method is difficult. In this case, alignment may occur in the vicinity of the unevenness. This is especially true when the difference in level is large. In addition, charging due to rubbing often causes electrostatic damage to switching elements and other elements.

発明の目的 本発明はこのような従来の配向膜に対してその不備な点
を回避あるいは解決豐た新規な手法で処理した配向膜を
有する液晶表示パネルおよびその製造方法を提供するも
のである。
OBJECTS OF THE INVENTION The present invention provides a liquid crystal display panel having an alignment film processed by a novel method that avoids or solves the disadvantages of the conventional alignment film, and a method for manufacturing the same.

発明の構成 本発明においては、上記目的を達成するために、従来の
ラビング法のように配向膜表面に原子あるいは分子的規
模の弱い痕跡を形成するのではなく、レーザ光の2光束
干渉縞によって配向膜表面に浅い溝を形成する。
Structure of the Invention In order to achieve the above object, the present invention does not form weak traces on the atomic or molecular scale on the surface of the alignment film as in the conventional rubbing method, but uses two-beam interference fringes of laser light. A shallow groove is formed on the surface of the alignment film.

実施例の説明 6 。−。Description of examples 6. −.

第1図は本発明による液晶表示パネルの構成図を表わし
、多数の画素に対応した透明電極1を有する下側の電極
基板2と全面透明電極3を有するもう一方の電極基板4
との間に液晶6をシール6で周囲を封止して充填しであ
る。この液晶セルフは2枚の偏光板8および9に挾まれ
ており、外光を何らかの方法で利用するか、あるいは面
光源体1oを加え、全体として画像表示用の透過型液晶
表示装置またはパネル11を構成している。
FIG. 1 shows a configuration diagram of a liquid crystal display panel according to the present invention, in which a lower electrode substrate 2 has a transparent electrode 1 corresponding to a large number of pixels, and another electrode substrate 4 has a transparent electrode 3 on the entire surface.
A liquid crystal 6 is sealed around the periphery with a seal 6 and filled between the two. This liquid crystal self is sandwiched between two polarizing plates 8 and 9, and by using external light in some way or by adding a surface light source 1o, the whole becomes a transmissive liquid crystal display device or panel 11 for image display. It consists of

液晶5を初期配向させるためには下側の電極基板2の電
極面側およびもう一方の電極基板4の電極面側に配向膜
を塗布し、さらに配向処理が必要であるが、本発明にお
いてはラビング法ではなくレーザ光の2光束干渉縞を用
いる。そして、本発明においてはポリイミド樹脂を配向
膜に用い、配向処理材として感光性樹脂を用いる点に特
徴がある0 前記電極基板2および4にポリイミド樹脂12を薄く(
0,1〜0.2μm)塗布し、160′C前後の加熱処
理を行なう。その後ポジ型の感光性樹月酢3、7 l 
In order to initially align the liquid crystal 5, it is necessary to apply an alignment film to the electrode surface side of the lower electrode substrate 2 and the electrode surface side of the other electrode substrate 4, and to perform an alignment treatment. Instead of the rubbing method, two-beam interference fringes of laser light are used. The present invention is characterized in that a polyimide resin is used for the alignment film and a photosensitive resin is used as the alignment treatment material.
0.1 to 0.2 μm) and heat treated at around 160'C. After that, 3.7 liters of positive photosensitive tree vinegar
.

例えばシップレイ社のAZ−1350をやはり薄く(0
,1〜0.2μm)塗布し、プリベークを行った後に第
2図に示すようにレーザ光の2光束干渉縞の照射を行な
う。レーザ光源16を出た光線は反射鏡16.17を経
て集光レンズ18に入射し、ピンホール19を通過した
後、コリメータレンズ2゜を通って光束の拡がった平行
光線となる。その後、さらにこの平行光線は反射鏡21
で反射された後ビームスプリッタ22で2分割され、反
射鏡23および24で反射されて電極基板2(→上に塗
布された感光性樹脂13に入射する。2分割されたレー
ザ平行光の2光束は、この試料付近の空間で干渉を生じ
、試料面上にスリット状の干渉縞を生せしめる。第2図
では2光束の光軸が試料面の法線方向に対して等角度で
入射した場合を示しており、この時の試料表面の光強度
分布と、感光性樹脂の現像後に得られる断面パターンを
第3図(&)に示す。
For example, Shipley's AZ-1350 is also thin (0
, 1 to 0.2 μm), and after prebaking, irradiation with two-beam interference fringes of laser light is performed as shown in FIG. The light beam emitted from the laser light source 16 passes through the reflecting mirrors 16 and 17, enters the condenser lens 18, passes through the pinhole 19, and then passes through the collimator lens 2° to become a parallel light beam with a spread beam. After that, this parallel ray is further reflected by the reflecting mirror 21.
After being reflected by the beam splitter 22, it is split into two by the beam splitter 22, reflected by the reflecting mirrors 23 and 24, and incident on the electrode substrate 2 (→ the photosensitive resin 13 coated on the top.) Two beams of parallel laser light are split into two. interference occurs in the space near this sample, producing slit-shaped interference fringes on the sample surface. In Figure 2, the optical axes of the two beams are incident at equal angles to the normal direction of the sample surface. The light intensity distribution on the sample surface at this time and the cross-sectional pattern obtained after developing the photosensitive resin are shown in FIG. 3 (&).

ポリイミド樹脂12に例えば東し製5P−910を用い
ると、現像時に感光性樹脂をマスクとしてポリイミド樹
脂も選択的にパターン出しされて、電極基板上には光強
度分布に対応して凹凸状のグレーティング(格子)状1
3’、 12’となる。その後、アセトンやメチルエチ
ルケトンなどの溶剤で感光性樹脂パターン13′のみを
除去すれば第3図(時に示すようにグレーティング状の
凹凸を有するポリイミド樹脂のパターン12′が得られ
、この後200’C以上の加熱処理を与えれば配向膜と
して液晶材には溶解しなくなる。
If, for example, 5P-910 manufactured by Toshi Co., Ltd. is used as the polyimide resin 12, the polyimide resin is also selectively patterned using the photosensitive resin as a mask during development, and an uneven grating is formed on the electrode substrate corresponding to the light intensity distribution. (lattice) shape 1
3', 12'. After that, by removing only the photosensitive resin pattern 13' with a solvent such as acetone or methyl ethyl ketone, a polyimide resin pattern 12' having grating-like irregularities as shown in FIG. If heat treatment is applied, it will no longer dissolve in the liquid crystal material as an alignment film.

第4図では2光束の光軸が試料面に対して傾いた角度で
入射する場合を示しており、この時の試料表面の光強度
分布と感光性樹脂の現像後に得られる断面パターンを第
6図に示す。このように2光束が試料面に対して傾いて
入射した場合には形成される感光性樹脂パターン13″
 は鋸歯状となり樹脂パターン12′も鋸歯状となり、
第3図の場合と対称性の失なわれることが分る。
Figure 4 shows the case where the optical axes of the two light beams are incident on the sample surface at an inclined angle, and the light intensity distribution on the sample surface at this time and the cross-sectional pattern obtained after developing the photosensitive resin are shown in Figure 6. As shown in the figure. In this way, when the two light beams are incident on the sample surface at an angle, a photosensitive resin pattern 13'' is formed.
becomes serrated, and the resin pattern 12' also becomes serrated,
It can be seen that the symmetry with the case in Figure 3 is lost.

グレーティング状の凹凸を上記2種類の方法でほぼ互い
に直交する方向に形成した実施例が第6図に示す斜視図
である。図では試料表面に配列する液晶分子25を円筒
状で模式的に示してあり、9 ・マ 、。
FIG. 6 is a perspective view of an embodiment in which grating-like irregularities are formed in directions substantially orthogonal to each other using the two methods described above. In the figure, the liquid crystal molecules 25 arranged on the sample surface are schematically shown in a cylindrical shape.

鋸歯状断面の長い切り口に沿って液晶分子はティルト角
θで一方向に配列する。このようなティルト角はTN(
ツイスト・ネマチック)型液晶表示パネルにおいて、そ
の表示に指向性を持たせたり、逆ティルトの発生による
表示の濃淡のむらを抑制する点で有効である。
The liquid crystal molecules are aligned in one direction at a tilt angle θ along the long edges of the sawtooth cross section. Such a tilt angle is TN (
In a twisted nematic (twisted nematic) type liquid crystal display panel, it is effective in giving directionality to the display and suppressing unevenness in display shading due to occurrence of reverse tilt.

グレーティングのピッチは液晶の配向度合を上げるため
には小さい方が望ましいが、実験的に試作したα2μm
ピッチ、深さ500〜1oOo人のグレーティングでも
良好な配向を示した。レーザ光源としてはHe−Cdレ
ーザ、λ= 4416人を用いたが、より短波長のレー
ザを用いたり、2光束の入射角度を変えることにより小
ピツチ化は容易である0 以上述へた液晶表示パネルをカラー化するためにはカラ
ーフィルタが必要であり、電極基板の厚みにより光路差
の拡散が生じるのを防止するためカラーフィルタは電極
基板2、液晶5、電極基板4で構成される空間に配置さ
れる。本発明の他の実施例はカラーフィルタの配置に応
じてなされる10、懺−ラ ものであり、カラーフィルタを (a) 多数の絵素とスイッチング素子を配置した電極
基板2 (均 全面に透明導電層を有するもう一方の電極基板4 の上のいずれかに配置するものである。そしてカラーフ
ィルタの介入によって液晶層5に印加される電圧が低下
するのを防ぐためには、透明導電層 ゛と配向膜は当然
のごとくカラーフィルタ上に形成される訂そして(→の
場合にはカラーフィルタに形成された開口部を介してカ
ラーフィルタ上に形成された透明電極とスイッチング素
子とを接続する手段が与えられる。言うまでもないこと
だがカラーフィルタを導入すると一対の電極基板2と4
との位置合わせが必要となる組合せが生じる。
It is desirable that the pitch of the grating be small in order to increase the degree of alignment of the liquid crystal, but the pitch of the grating is α2 μm
Even gratings with pitch and depth of 500 to 1 oOo showed good orientation. As a laser light source, a He-Cd laser with λ = 4416 was used, but it is easy to reduce the pitch by using a laser with a shorter wavelength or by changing the incident angle of the two beams. A color filter is required to color the panel, and in order to prevent the difference in optical path from diffusing due to the thickness of the electrode substrate, the color filter is installed in the space consisting of the electrode substrate 2, liquid crystal 5, and electrode substrate 4. Placed. Another embodiment of the present invention is a color filter according to the arrangement of the color filter. The transparent conductive layer is placed on either side of the other electrode substrate 4 which has a conductive layer.In order to prevent the voltage applied to the liquid crystal layer 5 from decreasing due to the intervention of the color filter, the transparent conductive layer and The alignment film is naturally formed on the color filter (in the case of →, there is a means for connecting the transparent electrode formed on the color filter and the switching element through the opening formed on the color filter). Needless to say, when a color filter is introduced, a pair of electrode substrates 2 and 4
There are some combinations that require alignment with the

なお、電極基板材は透明性と絶縁性を必要とし例えばガ
ラスなどが好適であるが、スイッチング素子の形成方法
によっては石英や樹脂も使用されるし、スイッチング素
子もMISトランジスタやバリスタなど選択の幅は広い
Note that the electrode substrate material requires transparency and insulation, and is preferably made of glass, for example, but depending on the method of forming the switching element, quartz or resin may also be used, and the switching element has a wide range of choices, such as MIS transistors and varistors. is wide.

11 。11.

発明の効果 以上述べたごとく本発明によれば、配向処理をフォトフ
ァブリケーション技術で行なうため、従来の機械的な表
面のこすりによっていた場合に問題となった表面の各種
欠陥や異常スクラッチが生じることもなく、配向の巨視
的、微視的むらの少ない均一な配向品質が得られ、表示
品質の優れた液晶表示装置を提供するものである。また
素子の静電破壊が生じる恐れは皆無である。
Effects of the Invention As described above, according to the present invention, since the alignment treatment is performed using photofabrication technology, various defects and abnormal scratches on the surface, which were problems caused by conventional mechanical surface rubbing, are avoided. Therefore, it is possible to obtain a uniform alignment quality with less macroscopic and microscopic unevenness in alignment, thereby providing a liquid crystal display device with excellent display quality. Furthermore, there is no possibility of electrostatic damage to the device.

さらに本発明では高解像力と高感度の感光性樹脂を用い
ることが可能で、ピッチをさらに小さくすることも容易
であり、かつ露光時間が短縮できて生産性の向上が著し
いなどの優れた効果が得られた。
Furthermore, in the present invention, it is possible to use a photosensitive resin with high resolution and high sensitivity, and it is easy to further reduce the pitch, and it has excellent effects such as shortening exposure time and significantly improving productivity. Obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明にかかる液晶表示パネルの分解図、第2
図および第4図は本発明のレーザ光の2光束干渉縞の照
射装置のシステム図、第3図および第6図は試料表面の
光強度分布およびグレーティング状の凹凸を示す要部断
面図、第6図はグレーティング状の凹凸をほぼ直交する
ように形成した試料表面の要部斜視図である。 2.4・・・・・・電極基板、5・・・・・・液晶、1
2 、12’。 12′(・・・・・ポリイミド樹脂、13 、13’ 
、 131<・・・・感光性樹脂、16・・・・・・レ
ーザ光源、26・・・・・・液晶分子。 代理人の氏名 弁理士 中 尾 敏 男 ほか1名味 IRへ
Figure 1 is an exploded view of a liquid crystal display panel according to the present invention, Figure 2 is an exploded view of a liquid crystal display panel according to the present invention;
4 and 4 are system diagrams of the irradiation device for two-beam interference fringes of a laser beam according to the present invention. FIG. 6 is a perspective view of a main part of the surface of a sample in which grating-like irregularities are formed to be substantially perpendicular to each other. 2.4... Electrode substrate, 5... Liquid crystal, 1
2, 12'. 12' (...polyimide resin, 13, 13'
, 131<... photosensitive resin, 16... laser light source, 26... liquid crystal molecule. Name of agent: Patent attorney Toshio Nakao and 1 other name To IR

Claims (1)

【特許請求の範囲】[Claims] (1)一対の電極基板間に配向膜を介して液晶を充填し
、前記配向膜がポリイミド系樹脂であり、その表面にレ
ーザ光の2光束干渉縞の照射にょ為グレーティング状の
凹凸を有することを特徴とする液晶表示パネル。 (′4 グレーティング状の凹凸が、液晶の配向方向に
平行するグレーティングと、これにほぼ直交獣液晶のテ
ィルト角を与える鋸歯状断面を有するグレーティングと
からなることを特徴とする特許請求の範囲第1項記載の
液晶表示パネル。 (′4 いずれかの電極基板の表面にカラーフィルタが
配置されていることを特徴とする特許請求の範囲第1項
に記載の液晶表示パネル。 (4カラーフィルタの表面に透明導電層が全面にわたっ
て形成されていることを特徴とする特許請求の範囲第3
項に記載の液晶表示パネル。 2・、。 (→ カラーフィルタ上の透明導電層が絵素に対応して
スイッチング素子に接続されて独立していることを特徴
とする特許請求の範囲第3項に記載の液晶表示パネル。 (@ 一対の電極基板間に配向膜を介して液晶を充填し
てなる液晶パネルの製造に際し、感光性樹脂の現像液に
溶解可能なポリイミド樹脂を塗布する工程と、感光性樹
脂を塗布する工程と、前記感光性樹脂にレーザ光の2光
束干渉縞を照射する工程と、前記感光性樹脂の現像とと
もに前記ポリイミド樹脂を選択的に除去する工程と、前
記感光性樹脂を溶材で除去する工程によって得られるグ
レーティング状の凹凸を有する配向膜全形成することを
特徴とする液晶パネルの製造方法。 (?) グレーティング状の凹凸を有する配向膜の形成
に先立ち、いずれか一方の電極基板上にカラーフィルタ
が形成されることを特徴とする特許請求の範囲第6項に
記載の液晶表示パネルの製造方法。 (@ カラーフィルタ上に透明導電層が形成されること
を特徴とする特許請求の範囲第7項に記載の3 液晶表示パネルの製造方法。 (瞬 カラニフィルタに開口部全形成する工程と絵素に
対応してカラーフィルタ上に透明導電層を形成する工程
と、前記絵素内のスイッチング素子と前記透明導電層と
を接続する工程とを有することを特徴とする特許請求の
範囲第7項に記載の液晶表示パネルの製造方法。
(1) Liquid crystal is filled between a pair of electrode substrates via an alignment film, the alignment film is made of polyimide resin, and its surface has grating-like irregularities for irradiation with two-beam interference fringes of laser light. A liquid crystal display panel featuring: ('4) The grating-like unevenness consists of a grating parallel to the orientation direction of the liquid crystal, and a grating having a sawtooth cross section that provides a tilt angle of the liquid crystal substantially perpendicular to the grating. The liquid crystal display panel according to claim 1. ('4) The liquid crystal display panel according to claim 1, characterized in that a color filter is disposed on the surface of one of the electrode substrates. Claim 3, characterized in that a transparent conductive layer is formed over the entire surface of the
The liquid crystal display panel described in section. 2.. (→ The liquid crystal display panel according to claim 3, characterized in that the transparent conductive layer on the color filter is connected to and independent of a switching element corresponding to the picture element. (@ A pair of electrodes) When manufacturing a liquid crystal panel in which liquid crystal is filled between substrates via an alignment film, the process includes a step of applying a polyimide resin that is soluble in a photosensitive resin developer, a step of applying the photosensitive resin, and a step of applying the photosensitive resin. A grating-shaped grating obtained by irradiating the resin with two-beam interference fringes of laser light, selectively removing the polyimide resin while developing the photosensitive resin, and removing the photosensitive resin with a solvent. A method for manufacturing a liquid crystal panel characterized by forming the entire alignment film with unevenness. (?) Prior to forming the alignment film with grating-like unevenness, a color filter is formed on one of the electrode substrates. A method for manufacturing a liquid crystal display panel according to claim 6, characterized in that (@3 according to claim 7, characterized in that a transparent conductive layer is formed on the color filter) A method for manufacturing a liquid crystal display panel. (Synchronization) A step of forming all openings in a Kalani filter, a step of forming a transparent conductive layer on a color filter corresponding to a picture element, a switching element in the picture element and the transparent conductive layer. 8. The method for manufacturing a liquid crystal display panel according to claim 7, further comprising the step of connecting the two.
JP59074025A 1984-04-13 1984-04-13 Liquid crystal display panel and its manufacture Pending JPS60217339A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59074025A JPS60217339A (en) 1984-04-13 1984-04-13 Liquid crystal display panel and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59074025A JPS60217339A (en) 1984-04-13 1984-04-13 Liquid crystal display panel and its manufacture

Publications (1)

Publication Number Publication Date
JPS60217339A true JPS60217339A (en) 1985-10-30

Family

ID=13535170

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59074025A Pending JPS60217339A (en) 1984-04-13 1984-04-13 Liquid crystal display panel and its manufacture

Country Status (1)

Country Link
JP (1) JPS60217339A (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4974941A (en) * 1989-03-08 1990-12-04 Hercules Incorporated Process of aligning and realigning liquid crystal media
US5604615A (en) * 1994-05-27 1997-02-18 Sharp Kabushiki Kaisha Liquid crystal display device and methods for producing same with alignment layer having new bond formation or bond cleavage reaction of molecular chains by light irradiation
JP2001281660A (en) * 2000-03-27 2001-10-10 Hewlett Packard Co <Hp> Liquid crystal device
KR100299024B1 (en) * 1990-09-05 2001-10-22 핫토리 쥰이치 Light Valve Substrate Semiconductor Device
US6362863B1 (en) 1998-09-18 2002-03-26 Fujitsu Limited Liquid crystal display device with saw-tooth alignment control layer
KR100319871B1 (en) * 1994-01-28 2002-08-21 삼성전자 주식회사 Liquid crystal alignment control film, manufacturing method thereof, manufacturing apparatus for manufacturing the same, and manufacturing method of mask used in manufacturing apparatus
JP2009288374A (en) * 2008-05-28 2009-12-10 Seiko Epson Corp Liquid crystal device, electronic apparatus, and method for manufacturing liquid crystal device
JP2011232398A (en) * 2010-04-23 2011-11-17 V Technology Co Ltd Alignment processing method and alignment processing apparatus
WO2012081098A1 (en) * 2010-12-15 2012-06-21 株式会社ブイ・テクノロジー Orientation processing device and orientation processing method
US20140237817A1 (en) * 2013-02-15 2014-08-28 Hpo Assets Llc Liquid crystal alignment layers and method of fabrication

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS514496A (en) * 1974-05-27 1976-01-14 Philips Nv
JPS51144252A (en) * 1975-05-22 1976-12-11 Rca Corp Method of producing liquid crystal device
JPS5619030A (en) * 1979-07-25 1981-02-23 Sharp Corp Production of liquid crystal display element
JPS56130718A (en) * 1980-03-18 1981-10-13 Seiko Instr & Electronics Ltd Liquid-crystal display device and its manufacture
JPS5944085A (en) * 1982-09-06 1984-03-12 セイコーインスツルメンツ株式会社 Liquid crystal display

Patent Citations (5)

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Publication number Priority date Publication date Assignee Title
JPS514496A (en) * 1974-05-27 1976-01-14 Philips Nv
JPS51144252A (en) * 1975-05-22 1976-12-11 Rca Corp Method of producing liquid crystal device
JPS5619030A (en) * 1979-07-25 1981-02-23 Sharp Corp Production of liquid crystal display element
JPS56130718A (en) * 1980-03-18 1981-10-13 Seiko Instr & Electronics Ltd Liquid-crystal display device and its manufacture
JPS5944085A (en) * 1982-09-06 1984-03-12 セイコーインスツルメンツ株式会社 Liquid crystal display

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4974941A (en) * 1989-03-08 1990-12-04 Hercules Incorporated Process of aligning and realigning liquid crystal media
US5032009A (en) * 1989-03-08 1991-07-16 Hercules Incorporated Process of aligning and realigning liquid crystal media
KR100299024B1 (en) * 1990-09-05 2001-10-22 핫토리 쥰이치 Light Valve Substrate Semiconductor Device
KR100319871B1 (en) * 1994-01-28 2002-08-21 삼성전자 주식회사 Liquid crystal alignment control film, manufacturing method thereof, manufacturing apparatus for manufacturing the same, and manufacturing method of mask used in manufacturing apparatus
US5604615A (en) * 1994-05-27 1997-02-18 Sharp Kabushiki Kaisha Liquid crystal display device and methods for producing same with alignment layer having new bond formation or bond cleavage reaction of molecular chains by light irradiation
US6362863B1 (en) 1998-09-18 2002-03-26 Fujitsu Limited Liquid crystal display device with saw-tooth alignment control layer
JP2001281660A (en) * 2000-03-27 2001-10-10 Hewlett Packard Co <Hp> Liquid crystal device
JP2009288374A (en) * 2008-05-28 2009-12-10 Seiko Epson Corp Liquid crystal device, electronic apparatus, and method for manufacturing liquid crystal device
JP2011232398A (en) * 2010-04-23 2011-11-17 V Technology Co Ltd Alignment processing method and alignment processing apparatus
WO2012081098A1 (en) * 2010-12-15 2012-06-21 株式会社ブイ・テクノロジー Orientation processing device and orientation processing method
JPWO2012081098A1 (en) * 2010-12-15 2014-05-22 株式会社ブイ・テクノロジー Alignment processing apparatus and alignment processing method
JP5747921B2 (en) * 2010-12-15 2015-07-15 株式会社ブイ・テクノロジー Alignment processing apparatus and alignment processing method
US9360777B2 (en) 2010-12-15 2016-06-07 V Technology Co., Ltd. Apparatus and method for alignment processing
US20140237817A1 (en) * 2013-02-15 2014-08-28 Hpo Assets Llc Liquid crystal alignment layers and method of fabrication
US9939682B2 (en) * 2013-02-15 2018-04-10 E-Vision, Llc Liquid crystal alignment layers and method of fabrication
US10838258B2 (en) 2013-02-15 2020-11-17 E-Vision, Llc Liquid crystal alignment layers and method of fabrication

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