JPS60211348A - 水素ガスセンサ− - Google Patents

水素ガスセンサ−

Info

Publication number
JPS60211348A
JPS60211348A JP59069336A JP6933684A JPS60211348A JP S60211348 A JPS60211348 A JP S60211348A JP 59069336 A JP59069336 A JP 59069336A JP 6933684 A JP6933684 A JP 6933684A JP S60211348 A JPS60211348 A JP S60211348A
Authority
JP
Japan
Prior art keywords
hydrogen gas
sensor
film
platinum
tungsten oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59069336A
Other languages
English (en)
Japanese (ja)
Other versions
JPH053540B2 (enEXAMPLES
Inventor
Nobuyuki Yoshiike
信幸 吉池
Shigeo Kondo
繁雄 近藤
Satoshi Sekido
聰 関戸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP59069336A priority Critical patent/JPS60211348A/ja
Publication of JPS60211348A publication Critical patent/JPS60211348A/ja
Publication of JPH053540B2 publication Critical patent/JPH053540B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP59069336A 1984-04-06 1984-04-06 水素ガスセンサ− Granted JPS60211348A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59069336A JPS60211348A (ja) 1984-04-06 1984-04-06 水素ガスセンサ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59069336A JPS60211348A (ja) 1984-04-06 1984-04-06 水素ガスセンサ−

Publications (2)

Publication Number Publication Date
JPS60211348A true JPS60211348A (ja) 1985-10-23
JPH053540B2 JPH053540B2 (enEXAMPLES) 1993-01-18

Family

ID=13399604

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59069336A Granted JPS60211348A (ja) 1984-04-06 1984-04-06 水素ガスセンサ−

Country Status (1)

Country Link
JP (1) JPS60211348A (enEXAMPLES)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4440572A1 (de) * 1994-11-14 1996-05-15 Fraunhofer Ges Forschung Schaltbarer Beschichtungsaufbau
US6723566B2 (en) * 2000-05-05 2004-04-20 Midwest Research Institute Pd/Ni-WO3 anodic double layer gasochromic device
EP1591777A1 (en) * 2004-04-28 2005-11-02 Alps Electric Co., Ltd. Hydrogen sensor and method for detecting hydrogen
JP2007071866A (ja) * 2005-08-10 2007-03-22 Tokyo Univ Of Science ガスセンサ用薄膜、ガスセンサ用素子体およびガスセンサ用素子体の製造方法
JP2011021911A (ja) * 2009-07-13 2011-02-03 Ulvac Japan Ltd 水素ガスセンサ及び水素ガスセンサの製造方法
US8052898B2 (en) * 2006-04-04 2011-11-08 Japan Atomic Energy Agency Hydrogen gas detecting material and the coating method

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007279061A (ja) * 2007-06-19 2007-10-25 Osaka Gas Co Ltd パルス駆動型薄膜ガスセンサおよびその製造方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53141098A (en) * 1977-05-16 1978-12-08 Toshiba Corp Gas sensing element
JPS53141097A (en) * 1977-05-16 1978-12-08 Toshiba Corp Gas sensing element
JPS53141096A (en) * 1977-05-16 1978-12-08 Toshiba Corp Gas sensing element
JPS55124058A (en) * 1979-03-09 1980-09-24 Gen Motors Corp Titanium dioxide exhaust sensor
JPS5690250A (en) * 1979-12-22 1981-07-22 Matsushita Electric Works Ltd Detection element of combustible gas
JPS5774648A (en) * 1980-08-28 1982-05-10 Siemens Ag Selective thin film gas sensor and manufacture thereof
JPS5857702A (ja) * 1981-09-30 1983-04-06 三洋電機株式会社 湿度センサ−
JPS58182545A (ja) * 1982-04-21 1983-10-25 Hitachi Ltd 一酸化炭素ガス検知素子

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53141098A (en) * 1977-05-16 1978-12-08 Toshiba Corp Gas sensing element
JPS53141097A (en) * 1977-05-16 1978-12-08 Toshiba Corp Gas sensing element
JPS53141096A (en) * 1977-05-16 1978-12-08 Toshiba Corp Gas sensing element
JPS55124058A (en) * 1979-03-09 1980-09-24 Gen Motors Corp Titanium dioxide exhaust sensor
JPS5690250A (en) * 1979-12-22 1981-07-22 Matsushita Electric Works Ltd Detection element of combustible gas
JPS5774648A (en) * 1980-08-28 1982-05-10 Siemens Ag Selective thin film gas sensor and manufacture thereof
JPS5857702A (ja) * 1981-09-30 1983-04-06 三洋電機株式会社 湿度センサ−
JPS58182545A (ja) * 1982-04-21 1983-10-25 Hitachi Ltd 一酸化炭素ガス検知素子

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4440572A1 (de) * 1994-11-14 1996-05-15 Fraunhofer Ges Forschung Schaltbarer Beschichtungsaufbau
US6723566B2 (en) * 2000-05-05 2004-04-20 Midwest Research Institute Pd/Ni-WO3 anodic double layer gasochromic device
EP1591777A1 (en) * 2004-04-28 2005-11-02 Alps Electric Co., Ltd. Hydrogen sensor and method for detecting hydrogen
US8025843B2 (en) 2004-04-28 2011-09-27 Alps Electric Co., Ltd. Hydrogen sensor
JP2007071866A (ja) * 2005-08-10 2007-03-22 Tokyo Univ Of Science ガスセンサ用薄膜、ガスセンサ用素子体およびガスセンサ用素子体の製造方法
US8052898B2 (en) * 2006-04-04 2011-11-08 Japan Atomic Energy Agency Hydrogen gas detecting material and the coating method
JP2011021911A (ja) * 2009-07-13 2011-02-03 Ulvac Japan Ltd 水素ガスセンサ及び水素ガスセンサの製造方法

Also Published As

Publication number Publication date
JPH053540B2 (enEXAMPLES) 1993-01-18

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Legal Events

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