JPS60206986A - 洗浄用純水吐出ポンプ - Google Patents
洗浄用純水吐出ポンプInfo
- Publication number
- JPS60206986A JPS60206986A JP6283584A JP6283584A JPS60206986A JP S60206986 A JPS60206986 A JP S60206986A JP 6283584 A JP6283584 A JP 6283584A JP 6283584 A JP6283584 A JP 6283584A JP S60206986 A JPS60206986 A JP S60206986A
- Authority
- JP
- Japan
- Prior art keywords
- pure water
- chamber
- working fluid
- diaphragm
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 32
- 238000011010 flushing procedure Methods 0.000 title abstract 3
- 239000012530 fluid Substances 0.000 claims abstract description 22
- 238000004140 cleaning Methods 0.000 claims description 12
- 230000001629 suppression Effects 0.000 claims description 10
- 238000005192 partition Methods 0.000 claims description 2
- 230000007547 defect Effects 0.000 abstract 2
- 239000003921 oil Substances 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 description 5
- 239000000428 dust Substances 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
Landscapes
- Reciprocating Pumps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6283584A JPS60206986A (ja) | 1984-03-30 | 1984-03-30 | 洗浄用純水吐出ポンプ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6283584A JPS60206986A (ja) | 1984-03-30 | 1984-03-30 | 洗浄用純水吐出ポンプ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60206986A true JPS60206986A (ja) | 1985-10-18 |
| JPS642792B2 JPS642792B2 (enrdf_load_stackoverflow) | 1989-01-18 |
Family
ID=13211765
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6283584A Granted JPS60206986A (ja) | 1984-03-30 | 1984-03-30 | 洗浄用純水吐出ポンプ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60206986A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6453078A (en) * | 1987-08-18 | 1989-03-01 | Japan Res Dev Corp | Fluid compressor |
-
1984
- 1984-03-30 JP JP6283584A patent/JPS60206986A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6453078A (en) * | 1987-08-18 | 1989-03-01 | Japan Res Dev Corp | Fluid compressor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS642792B2 (enrdf_load_stackoverflow) | 1989-01-18 |
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