JPS60205954A - Operation panel of electron beam processing machine - Google Patents

Operation panel of electron beam processing machine

Info

Publication number
JPS60205954A
JPS60205954A JP59059602A JP5960284A JPS60205954A JP S60205954 A JPS60205954 A JP S60205954A JP 59059602 A JP59059602 A JP 59059602A JP 5960284 A JP5960284 A JP 5960284A JP S60205954 A JPS60205954 A JP S60205954A
Authority
JP
Japan
Prior art keywords
picture
area
area indicating
electron beam
processing machine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59059602A
Other languages
Japanese (ja)
Inventor
Shiro Fukuda
Taizo Ishimi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP59059602A priority Critical patent/JPS60205954A/en
Publication of JPS60205954A publication Critical patent/JPS60205954A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control

Abstract

PURPOSE:To enable common utilization of picture distribution in some tens of pictures by presenting operation order, operating condition, effective switches to an operator by performing distribution on the display picture of a monitor for each function. CONSTITUTION:A picture is divided into four areas 10, 11, 12 and 13. Among these areas, 10 is the area indicating operation sequence, 11 is the area indicating operational condition, 12 is the area indicating only a switch which can be operated for each picture, and 13 is the area indicating operational condition at any time. Each name of switches displayed on the area 12 is corresponding to the function section common to some tens of pictures. Then, complicated operation sequence of an electron beam processing machine can be operated while watching a fixed area on the CRT picture, and this operation becomes easier. And as the condition on operation sequence can be confirmed on the fixed area, efficiency of operation work can be improved.
JP59059602A 1984-03-29 1984-03-29 Operation panel of electron beam processing machine Pending JPS60205954A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59059602A JPS60205954A (en) 1984-03-29 1984-03-29 Operation panel of electron beam processing machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59059602A JPS60205954A (en) 1984-03-29 1984-03-29 Operation panel of electron beam processing machine

Publications (1)

Publication Number Publication Date
JPS60205954A true JPS60205954A (en) 1985-10-17

Family

ID=13117963

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59059602A Pending JPS60205954A (en) 1984-03-29 1984-03-29 Operation panel of electron beam processing machine

Country Status (1)

Country Link
JP (1) JPS60205954A (en)

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