JPS60205329A - 圧力センサ - Google Patents

圧力センサ

Info

Publication number
JPS60205329A
JPS60205329A JP6418984A JP6418984A JPS60205329A JP S60205329 A JPS60205329 A JP S60205329A JP 6418984 A JP6418984 A JP 6418984A JP 6418984 A JP6418984 A JP 6418984A JP S60205329 A JPS60205329 A JP S60205329A
Authority
JP
Japan
Prior art keywords
pressure
diaphragm
gauge
receiving diaphragm
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6418984A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0542612B2 (en:Method
Inventor
Toshio Aga
阿賀　敏夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp filed Critical Yokogawa Hokushin Electric Corp
Priority to JP6418984A priority Critical patent/JPS60205329A/ja
Publication of JPS60205329A publication Critical patent/JPS60205329A/ja
Publication of JPH0542612B2 publication Critical patent/JPH0542612B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP6418984A 1984-03-30 1984-03-30 圧力センサ Granted JPS60205329A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6418984A JPS60205329A (ja) 1984-03-30 1984-03-30 圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6418984A JPS60205329A (ja) 1984-03-30 1984-03-30 圧力センサ

Publications (2)

Publication Number Publication Date
JPS60205329A true JPS60205329A (ja) 1985-10-16
JPH0542612B2 JPH0542612B2 (en:Method) 1993-06-29

Family

ID=13250859

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6418984A Granted JPS60205329A (ja) 1984-03-30 1984-03-30 圧力センサ

Country Status (1)

Country Link
JP (1) JPS60205329A (en:Method)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53125879A (en) * 1977-04-08 1978-11-02 Toyoda Chuo Kenkyusho Kk Pressure converter
JPS56145327A (en) * 1980-04-15 1981-11-12 Fuji Electric Co Ltd Pressure transducer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53125879A (en) * 1977-04-08 1978-11-02 Toyoda Chuo Kenkyusho Kk Pressure converter
JPS56145327A (en) * 1980-04-15 1981-11-12 Fuji Electric Co Ltd Pressure transducer

Also Published As

Publication number Publication date
JPH0542612B2 (en:Method) 1993-06-29

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