JPS60191910U - 薄形ｉｃのリ−ド曲がり検査装置 - Google Patents

薄形ｉｃのリ−ド曲がり検査装置

Info

Publication number
JPS60191910U
JPS60191910U JP7795984U JP7795984U JPS60191910U JP S60191910 U JPS60191910 U JP S60191910U JP 7795984 U JP7795984 U JP 7795984U JP 7795984 U JP7795984 U JP 7795984U JP S60191910 U JPS60191910 U JP S60191910U
Authority
JP
Japan
Prior art keywords
thin
parallel
moves
axis direction
inspection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7795984U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0247443Y2 (US06252093-20010626-C00008.png
Inventor
工藤　勝吾
真庭　友由
小柳　義郎
風間　清二
Original Assignee
日立電子エンジニアリング株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立電子エンジニアリング株式会社 filed Critical 日立電子エンジニアリング株式会社
Priority to JP7795984U priority Critical patent/JPS60191910U/ja
Publication of JPS60191910U publication Critical patent/JPS60191910U/ja
Application granted granted Critical
Publication of JPH0247443Y2 publication Critical patent/JPH0247443Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP7795984U 1984-05-29 1984-05-29 薄形ｉｃのリ−ド曲がり検査装置 Granted JPS60191910U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7795984U JPS60191910U (ja) 1984-05-29 1984-05-29 薄形ｉｃのリ−ド曲がり検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7795984U JPS60191910U (ja) 1984-05-29 1984-05-29 薄形ｉｃのリ−ド曲がり検査装置

Publications (2)

Publication Number Publication Date
JPS60191910U true JPS60191910U (ja) 1985-12-19
JPH0247443Y2 JPH0247443Y2 (US06252093-20010626-C00008.png) 1990-12-13

Family

ID=30621501

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7795984U Granted JPS60191910U (ja) 1984-05-29 1984-05-29 薄形ｉｃのリ−ド曲がり検査装置

Country Status (1)

Country Link
JP (1) JPS60191910U (US06252093-20010626-C00008.png)

Also Published As

Publication number Publication date
JPH0247443Y2 (US06252093-20010626-C00008.png) 1990-12-13

Similar Documents

Publication Publication Date Title
JPS60191910U (ja) 薄形ｉｃのリ−ド曲がり検査装置
JPS5867306U (ja) 光軸合せ装置
JPS6120210U (ja) 芯出し治具
JPS582656U (ja) 分光光度計の試料セツト用基板
JPS606300U (ja) 物品検査装置
JPS58182109U (ja) 角度測定装置
JPS6016476U (ja) エレベ−タのガイドレ−ル芯出し装置
JPS59157228U (ja) 光学素子の取付マウント
JPS60156407U (ja) 光投影測定装置のワ−ク保持台
JPS58101152U (ja) 張力測定装置
JPS59138720U (ja) Ｘｙプロツタのペン受け構造
JPS59183601U (ja) ベルトの撓み量測定ゲ−ジ
JPS59163438U (ja) ツ−ルクランププリセツタ−
JPS58189905U (ja) 座標測定機
JPS60176105U (ja) レ−ルの真直度測定装置
JPS59157792U (ja) レ−ザ加工装置
JPS5843483U (ja) ゴルフパツテイング練習具
JPS618893U (ja) 試料移動装置
JPS58172858U (ja) 光学試料台
JPS59127108U (ja) 移動体位置検出用受光装置
JPS5819273U (ja) 位置合せ機構
JPS59155508U (ja) 照準顕微鏡付表面粗さ測定器
JPS6042903U (ja) 平面度測定装置
JPS5891177U (ja) 半導体装置の検査治具
JPS58184236U (ja) タツピング位置極め治具