JPS60189515A - Positioning device - Google Patents

Positioning device

Info

Publication number
JPS60189515A
JPS60189515A JP59043963A JP4396384A JPS60189515A JP S60189515 A JPS60189515 A JP S60189515A JP 59043963 A JP59043963 A JP 59043963A JP 4396384 A JP4396384 A JP 4396384A JP S60189515 A JPS60189515 A JP S60189515A
Authority
JP
Japan
Prior art keywords
image
ultraviolet ray
positioning
ray area
alignment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59043963A
Inventor
Ichiro Kano
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP59043963A priority Critical patent/JPS60189515A/en
Priority claimed from US06/708,784 external-priority patent/US4667109A/en
Publication of JPS60189515A publication Critical patent/JPS60189515A/en
Application status is Pending legal-status Critical

Links

Abstract

PURPOSE: To attain the manual positioning through human eyes and the automatic positioning through a TV camera with a positioning device using the alignment light of an ultraviolet ray area, by converting an ultraviolet ray image into a visible image.
CONSTITUTION: The ultraviolet beam radiated from a light source 8 is reflected by a beam splitter 9 and irradiates the alignment marks of a mask 5 and a wafer 6 respectively through an objective lens 10. The alignment images of an ultraviolet ray area which are reflected from the mask 5 and the wafer 6 are enlarged by the lens 10 and form an image on a fluorescent plate 11. Thus the image of the ultraviolet ray area is converted into visible beams through the plate 11 and then sent to a visual observation system 13 and a TV camera 14 respectively via a beam splitter 12. The image observed through the system 13 is used for manual positioning or inspection. While the image made incident on the camera 14 is used for automatic positioning or inspection.
COPYRIGHT: (C)1985,JPO&Japio
JP59043963A 1984-03-09 1984-03-09 Positioning device Pending JPS60189515A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59043963A JPS60189515A (en) 1984-03-09 1984-03-09 Positioning device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP59043963A JPS60189515A (en) 1984-03-09 1984-03-09 Positioning device
US06/708,784 US4667109A (en) 1984-03-09 1985-03-06 Alignment device

Publications (1)

Publication Number Publication Date
JPS60189515A true JPS60189515A (en) 1985-09-27

Family

ID=12678359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59043963A Pending JPS60189515A (en) 1984-03-09 1984-03-09 Positioning device

Country Status (1)

Country Link
JP (1) JPS60189515A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63296339A (en) * 1987-05-28 1988-12-02 Nikon Corp Positioning method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53135653A (en) * 1977-05-01 1978-11-27 Canon Inc Photoelectric detecting optical device
JPS56134736A (en) * 1980-03-26 1981-10-21 Mitsubishi Electric Corp Deficiency analysis of semiconductor element

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53135653A (en) * 1977-05-01 1978-11-27 Canon Inc Photoelectric detecting optical device
JPS56134736A (en) * 1980-03-26 1981-10-21 Mitsubishi Electric Corp Deficiency analysis of semiconductor element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63296339A (en) * 1987-05-28 1988-12-02 Nikon Corp Positioning method

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