JPS60180788A - クリ−ンル−ム内ロボツト装置 - Google Patents

クリ−ンル−ム内ロボツト装置

Info

Publication number
JPS60180788A
JPS60180788A JP3485484A JP3485484A JPS60180788A JP S60180788 A JPS60180788 A JP S60180788A JP 3485484 A JP3485484 A JP 3485484A JP 3485484 A JP3485484 A JP 3485484A JP S60180788 A JPS60180788 A JP S60180788A
Authority
JP
Japan
Prior art keywords
robot
clean room
control computer
robot device
program
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3485484A
Other languages
English (en)
Japanese (ja)
Other versions
JPH05199B2 (https=
Inventor
赤沼　清彦
相場　武
秀治 大橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP3485484A priority Critical patent/JPS60180788A/ja
Publication of JPS60180788A publication Critical patent/JPS60180788A/ja
Publication of JPH05199B2 publication Critical patent/JPH05199B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
JP3485484A 1984-02-25 1984-02-25 クリ−ンル−ム内ロボツト装置 Granted JPS60180788A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3485484A JPS60180788A (ja) 1984-02-25 1984-02-25 クリ−ンル−ム内ロボツト装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3485484A JPS60180788A (ja) 1984-02-25 1984-02-25 クリ−ンル−ム内ロボツト装置

Publications (2)

Publication Number Publication Date
JPS60180788A true JPS60180788A (ja) 1985-09-14
JPH05199B2 JPH05199B2 (https=) 1993-01-05

Family

ID=12425760

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3485484A Granted JPS60180788A (ja) 1984-02-25 1984-02-25 クリ−ンル−ム内ロボツト装置

Country Status (1)

Country Link
JP (1) JPS60180788A (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63216686A (ja) * 1987-02-20 1988-09-08 サージェント、サブ（デラウエア）、インコーポレーテッド スペース中の無人ビヒクル外活動を遠隔制御するシステム
JP2009072840A (ja) * 2007-09-19 2009-04-09 Hirata Corp ハンドリング装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5327954A (en) * 1976-08-25 1978-03-15 Kenrou Motoda Robot controlling system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5327954A (en) * 1976-08-25 1978-03-15 Kenrou Motoda Robot controlling system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63216686A (ja) * 1987-02-20 1988-09-08 サージェント、サブ（デラウエア）、インコーポレーテッド スペース中の無人ビヒクル外活動を遠隔制御するシステム
JP2009072840A (ja) * 2007-09-19 2009-04-09 Hirata Corp ハンドリング装置

Also Published As

Publication number Publication date
JPH05199B2 (https=) 1993-01-05

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term