JPS60161523A - 三次元測定機 - Google Patents

三次元測定機

Info

Publication number
JPS60161523A
JPS60161523A JP1746384A JP1746384A JPS60161523A JP S60161523 A JPS60161523 A JP S60161523A JP 1746384 A JP1746384 A JP 1746384A JP 1746384 A JP1746384 A JP 1746384A JP S60161523 A JPS60161523 A JP S60161523A
Authority
JP
Japan
Prior art keywords
scale
light
main scale
index
measuring machine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1746384A
Other languages
English (en)
Japanese (ja)
Inventor
Hiroshi Hanaoka
花岡　浩
Sadayuki Matsumiya
貞行 松宮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsutoyo Manufacturing Co Ltd
Original Assignee
Mitsutoyo Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsutoyo Manufacturing Co Ltd filed Critical Mitsutoyo Manufacturing Co Ltd
Priority to JP1746384A priority Critical patent/JPS60161523A/ja
Priority to US06/693,658 priority patent/US4684257A/en
Priority to GB08501708A priority patent/GB2153995B/en
Priority to DE19853503116 priority patent/DE3503116A1/de
Publication of JPS60161523A publication Critical patent/JPS60161523A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP1746384A 1984-02-02 1984-02-02 三次元測定機 Pending JPS60161523A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1746384A JPS60161523A (ja) 1984-02-02 1984-02-02 三次元測定機
US06/693,658 US4684257A (en) 1984-02-02 1985-01-22 Measuring instrument
GB08501708A GB2153995B (en) 1984-02-02 1985-01-23 Coordinate measuring instrument
DE19853503116 DE3503116A1 (de) 1984-02-02 1985-01-30 Messinstrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1746384A JPS60161523A (ja) 1984-02-02 1984-02-02 三次元測定機

Publications (1)

Publication Number Publication Date
JPS60161523A true JPS60161523A (ja) 1985-08-23

Family

ID=11944715

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1746384A Pending JPS60161523A (ja) 1984-02-02 1984-02-02 三次元測定機

Country Status (3)

Country Link
JP (1) JPS60161523A (enrdf_load_stackoverflow)
DE (1) DE3503116A1 (enrdf_load_stackoverflow)
GB (1) GB2153995B (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62265520A (ja) * 1986-05-12 1987-11-18 Mitsutoyo Corp ２つの検出子を備えた三次元測定機
JPH03287015A (ja) * 1990-04-04 1991-12-17 Mitsutoyo Corp 反射型光学式変位検出器

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4113842A1 (de) * 1991-04-27 1992-11-05 Deutsche Forsch Luft Raumfahrt Verfahren und einrichtung zur messung und bestimmung einer wegdifferenz in interferometern nach michelson
DE19912310B4 (de) * 1999-03-19 2007-11-29 Dr. Johannes Heidenhain Gmbh Positionsmeßeinrichtung
DE10011872A1 (de) * 2000-03-10 2001-09-27 Heidenhain Gmbh Dr Johannes Reflexions-Messteilung und Verfahren zur Herstellung derselben
JP2004028862A (ja) * 2002-06-27 2004-01-29 Harmonic Drive Syst Ind Co Ltd 投影型エンコーダ
JP5140260B2 (ja) * 2006-10-06 2013-02-06 株式会社ミツトヨ 画像測定機用校正スケール

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1588018B2 (de) * 1967-11-03 1976-06-10 Jenoptik Jena GmbH, χ 6900 Jena Einrichtung zur x,y-positionierung von kreuztischen
DE2010187A1 (de) * 1970-03-04 1971-09-23 Siemens Ag Tastengesteuerte Fünfercode-Typenhebel-Fernschreibmaschine mit vier Typengruppen
JPS57157118A (en) * 1981-03-24 1982-09-28 Mitsutoyo Mfg Co Ltd Photoelectric type displacement detecting device
ATA395181A (de) * 1981-09-14 1986-12-15 Rieder Heinz Handmessgeraet
US4442607A (en) * 1981-11-25 1984-04-17 Mitutoyo Mfg. Co., Ltd. Measuring instrument

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62265520A (ja) * 1986-05-12 1987-11-18 Mitsutoyo Corp ２つの検出子を備えた三次元測定機
JPH03287015A (ja) * 1990-04-04 1991-12-17 Mitsutoyo Corp 反射型光学式変位検出器

Also Published As

Publication number Publication date
DE3503116A1 (de) 1985-08-08
GB8501708D0 (en) 1985-02-27
DE3503116C2 (enrdf_load_stackoverflow) 1987-10-01
GB2153995B (en) 1987-06-10
GB2153995A (en) 1985-08-29

Similar Documents

Publication Publication Date Title
US7388674B2 (en) Laser tracking interferometer
EP1669724A2 (en) Photoelectric encoder, scale therefor and method for manufacturing the same
GB2511979A (en) Outline profile surface roughness measurement device and outline profile surface roughness measurement method
JPS6127690B2 (enrdf_load_stackoverflow)
JPH03223609A (ja) タッチプローブ
JPS60161523A (ja) 三次元測定機
US4684257A (en) Measuring instrument
GB2170005A (en) Interferometric multicoordinate measuring device
JP5337419B2 (ja) 変位測定装置、それを用いたシール部材形状測定装置及びそれらに用いられる変位検出装置
US4824245A (en) Response ratioing angle of arrival sensor that is responsive to scintillation
JPH095059A (ja) 平面度測定装置
US4115008A (en) Displacement measuring apparatus
US5644399A (en) Apparatus for measuring dimension of article and scale to be used in the same
JPS5875004A (ja) 光電式変位検出装置の反射型スケ−ルの製造方法
CN103499289A (zh) 形貌补偿式四光轴角位移激光干涉仪校准方法与装置
JPS58135405A (ja) 光電式変位検出装置
JPH0374769B2 (enrdf_load_stackoverflow)
CN103528510B (zh) 四光轴补偿及气浴式角位移激光干涉仪校准方法与装置
CN204988188U (zh) 新型光臂放大式二维线性测头
JP3369110B2 (ja) 光電式エンコーダ
CN103528503B (zh) 双光轴补偿及气浴式角位移激光干涉仪校准方法与装置
CN103528508B (zh) 形貌补偿式双光轴角位移激光干涉仪校准方法与装置
JPH0233962B2 (enrdf_load_stackoverflow)
JP3240411U (ja) 測定装置および位置決め装置
JPH0627645B2 (ja) ２次元変位検出装置