JPS6013971U - 気相成長装置 - Google Patents

気相成長装置

Info

Publication number
JPS6013971U
JPS6013971U JP10605683U JP10605683U JPS6013971U JP S6013971 U JPS6013971 U JP S6013971U JP 10605683 U JP10605683 U JP 10605683U JP 10605683 U JP10605683 U JP 10605683U JP S6013971 U JPS6013971 U JP S6013971U
Authority
JP
Japan
Prior art keywords
vapor phase
growth equipment
phase growth
source container
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10605683U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6342137Y2 (enrdf_load_stackoverflow
Inventor
喜美 塩谷
井上　信市
田淵　明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10605683U priority Critical patent/JPS6013971U/ja
Publication of JPS6013971U publication Critical patent/JPS6013971U/ja
Application granted granted Critical
Publication of JPS6342137Y2 publication Critical patent/JPS6342137Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP10605683U 1983-07-07 1983-07-07 気相成長装置 Granted JPS6013971U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10605683U JPS6013971U (ja) 1983-07-07 1983-07-07 気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10605683U JPS6013971U (ja) 1983-07-07 1983-07-07 気相成長装置

Publications (2)

Publication Number Publication Date
JPS6013971U true JPS6013971U (ja) 1985-01-30
JPS6342137Y2 JPS6342137Y2 (enrdf_load_stackoverflow) 1988-11-04

Family

ID=30248347

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10605683U Granted JPS6013971U (ja) 1983-07-07 1983-07-07 気相成長装置

Country Status (1)

Country Link
JP (1) JPS6013971U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6342137Y2 (enrdf_load_stackoverflow) 1988-11-04

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