JPS60121661A - 粒子分析器 - Google Patents

粒子分析器

Info

Publication number
JPS60121661A
JPS60121661A JP58227873A JP22787383A JPS60121661A JP S60121661 A JPS60121661 A JP S60121661A JP 58227873 A JP58227873 A JP 58227873A JP 22787383 A JP22787383 A JP 22787383A JP S60121661 A JPS60121661 A JP S60121661A
Authority
JP
Japan
Prior art keywords
particle
energy
particles
stray
incident
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58227873A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0534774B2 (enrdf_load_stackoverflow
Inventor
Kazuo Hayashi
和夫 林
浩 竹内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP58227873A priority Critical patent/JPS60121661A/ja
Publication of JPS60121661A publication Critical patent/JPS60121661A/ja
Publication of JPH0534774B2 publication Critical patent/JPH0534774B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP58227873A 1983-12-02 1983-12-02 粒子分析器 Granted JPS60121661A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58227873A JPS60121661A (ja) 1983-12-02 1983-12-02 粒子分析器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58227873A JPS60121661A (ja) 1983-12-02 1983-12-02 粒子分析器

Publications (2)

Publication Number Publication Date
JPS60121661A true JPS60121661A (ja) 1985-06-29
JPH0534774B2 JPH0534774B2 (enrdf_load_stackoverflow) 1993-05-24

Family

ID=16867680

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58227873A Granted JPS60121661A (ja) 1983-12-02 1983-12-02 粒子分析器

Country Status (1)

Country Link
JP (1) JPS60121661A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0534774B2 (enrdf_load_stackoverflow) 1993-05-24

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