JPS60113368U - 化学的気相付着装置 - Google Patents

化学的気相付着装置

Info

Publication number
JPS60113368U
JPS60113368U JP20189983U JP20189983U JPS60113368U JP S60113368 U JPS60113368 U JP S60113368U JP 20189983 U JP20189983 U JP 20189983U JP 20189983 U JP20189983 U JP 20189983U JP S60113368 U JPS60113368 U JP S60113368U
Authority
JP
Japan
Prior art keywords
wafer
reaction tube
tube
vapor deposition
chemical vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20189983U
Other languages
English (en)
Japanese (ja)
Other versions
JPS632435Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
俊一 佐藤
荻野　方宏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanken Electric Co Ltd
Original Assignee
Sanken Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanken Electric Co Ltd filed Critical Sanken Electric Co Ltd
Priority to JP20189983U priority Critical patent/JPS60113368U/ja
Publication of JPS60113368U publication Critical patent/JPS60113368U/ja
Application granted granted Critical
Publication of JPS632435Y2 publication Critical patent/JPS632435Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
JP20189983U 1983-12-30 1983-12-30 化学的気相付着装置 Granted JPS60113368U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20189983U JPS60113368U (ja) 1983-12-30 1983-12-30 化学的気相付着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20189983U JPS60113368U (ja) 1983-12-30 1983-12-30 化学的気相付着装置

Publications (2)

Publication Number Publication Date
JPS60113368U true JPS60113368U (ja) 1985-07-31
JPS632435Y2 JPS632435Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-01-21

Family

ID=30764113

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20189983U Granted JPS60113368U (ja) 1983-12-30 1983-12-30 化学的気相付着装置

Country Status (1)

Country Link
JP (1) JPS60113368U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5436063A (en) * 1977-08-24 1979-03-16 Kubota Ltd Method of removing nitrogen from filthy water

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5436063A (en) * 1977-08-24 1979-03-16 Kubota Ltd Method of removing nitrogen from filthy water

Also Published As

Publication number Publication date
JPS632435Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-01-21

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