JPS60107364A - Manufacture of thermal head - Google Patents

Manufacture of thermal head

Info

Publication number
JPS60107364A
JPS60107364A JP21736383A JP21736383A JPS60107364A JP S60107364 A JPS60107364 A JP S60107364A JP 21736383 A JP21736383 A JP 21736383A JP 21736383 A JP21736383 A JP 21736383A JP S60107364 A JPS60107364 A JP S60107364A
Authority
JP
Japan
Prior art keywords
protective layer
base
resistor
thermal head
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21736383A
Other languages
Japanese (ja)
Inventor
Hidenori Hirao
Original Assignee
Sanyo Electric Co Ltd
Tottori Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd, Tottori Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP21736383A priority Critical patent/JPS60107364A/en
Publication of JPS60107364A publication Critical patent/JPS60107364A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L49/00Solid state devices not provided for in groups H01L27/00 - H01L47/00 and H01L51/00 and not provided for in any other subclass; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof
    • H01L49/02Thin-film or thick-film devices

Abstract

PURPOSE:To enhance adhesion between a resistor and a protective layer and the yield, by heat-treating a base at a high temperature immediately before a protective layer is formed, in manufacturing a thermal head wherein a tantalum nitride thin film resistor and a protective layer convering the resistor are provided on a base. CONSTITUTION:A tantalum nitride thin film resistor 2 is provided on the surface of a base 1 by sputtering, and electrodes 5 are provided. Thereafter, the base 1 with the resistor 2 and the electrodes 5 thereon is transferred into a vessel for forming the protective layer, and after heat-treating it at a high temperature, preferably, 400-700 deg.C, protective layers, e.g., a silicon oxide protective layer 3 and a tantalum oxide protective layer 4 are sequentially provided by sputtering.
JP21736383A 1983-11-17 1983-11-17 Manufacture of thermal head Pending JPS60107364A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21736383A JPS60107364A (en) 1983-11-17 1983-11-17 Manufacture of thermal head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21736383A JPS60107364A (en) 1983-11-17 1983-11-17 Manufacture of thermal head

Publications (1)

Publication Number Publication Date
JPS60107364A true JPS60107364A (en) 1985-06-12

Family

ID=16702998

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21736383A Pending JPS60107364A (en) 1983-11-17 1983-11-17 Manufacture of thermal head

Country Status (1)

Country Link
JP (1) JPS60107364A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140333708A1 (en) * 2011-11-28 2014-11-13 Kyocera Corporation Thermal head and thermal printer equipped with the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140333708A1 (en) * 2011-11-28 2014-11-13 Kyocera Corporation Thermal head and thermal printer equipped with the same
US9238376B2 (en) * 2011-11-28 2016-01-19 Kyocera Corporation Thermal head and thermal printer equipped with the same

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