JPS5997532A - 電気光学薄膜材料の製造方法 - Google Patents

電気光学薄膜材料の製造方法

Info

Publication number
JPS5997532A
JPS5997532A JP57204550A JP20455082A JPS5997532A JP S5997532 A JPS5997532 A JP S5997532A JP 57204550 A JP57204550 A JP 57204550A JP 20455082 A JP20455082 A JP 20455082A JP S5997532 A JPS5997532 A JP S5997532A
Authority
JP
Japan
Prior art keywords
thin film
electro
optic
manufacturing
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57204550A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0335247B2 (enrdf_load_stackoverflow
Inventor
Hideaki Adachi
秀明 足立
Kenzo Ochi
謙三 黄地
Kentaro Setsune
瀬恒　謙太郎
Takao Kawaguchi
隆夫 川口
Kiyotaka Wasa
清孝 和佐
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP57204550A priority Critical patent/JPS5997532A/ja
Publication of JPS5997532A publication Critical patent/JPS5997532A/ja
Publication of JPH0335247B2 publication Critical patent/JPH0335247B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Inorganic Compounds Of Heavy Metals (AREA)
  • Physical Vapour Deposition (AREA)
JP57204550A 1982-11-24 1982-11-24 電気光学薄膜材料の製造方法 Granted JPS5997532A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57204550A JPS5997532A (ja) 1982-11-24 1982-11-24 電気光学薄膜材料の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57204550A JPS5997532A (ja) 1982-11-24 1982-11-24 電気光学薄膜材料の製造方法

Publications (2)

Publication Number Publication Date
JPS5997532A true JPS5997532A (ja) 1984-06-05
JPH0335247B2 JPH0335247B2 (enrdf_load_stackoverflow) 1991-05-27

Family

ID=16492354

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57204550A Granted JPS5997532A (ja) 1982-11-24 1982-11-24 電気光学薄膜材料の製造方法

Country Status (1)

Country Link
JP (1) JPS5997532A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53116499A (en) * 1977-03-23 1978-10-11 Sharp Corp Preparing high dielectric thin film

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53116499A (en) * 1977-03-23 1978-10-11 Sharp Corp Preparing high dielectric thin film

Also Published As

Publication number Publication date
JPH0335247B2 (enrdf_load_stackoverflow) 1991-05-27

Similar Documents

Publication Publication Date Title
US3766041A (en) Method of producing piezoelectric thin films by cathodic sputtering
US3846649A (en) Piezoelectric transducer comprising oriented zinc oxide film and method of manufacture
JPS594310A (ja) 弾性表面波装置
US4482833A (en) Method for obtaining oriented gold and piezoelectric films
US3558351A (en) Thin semiconductor films
JPS5997532A (ja) 電気光学薄膜材料の製造方法
JPH0333680B2 (enrdf_load_stackoverflow)
JPS6124213A (ja) ビスマス置換フエリ磁性ガーネツト　フイルムの形成方法
JPS6241311B2 (enrdf_load_stackoverflow)
JPH02258700A (ja) 強誘電体薄膜及びその製造法
US4040927A (en) Cadmium tellurite thin films
JPS5942474B2 (ja) 圧電体薄膜の製造方法
JP2590505B2 (ja) 配向性結晶膜
JP2816370B2 (ja) 磁気光学材料
US20250130449A1 (en) Electro-optical component and optical modulation component
JPS60142608A (ja) 多結晶アルミナ焼結体、電極薄膜、圧電性薄膜から成る層状構造物
JPS636519B2 (enrdf_load_stackoverflow)
JPS5938307B2 (ja) 金属化合物被膜の形成方法
JPH05263229A (ja) 酸化アルミニウム薄膜の製造方法
JPS5917538A (ja) エレクトロクロミツク素子
JPS6323128A (ja) 光空間変調素子
JPS5824382B2 (ja) ゲルマニウムサンビスマスハクマクノ セイゾウホウホウ
SU894803A1 (ru) Резистивный материал
JPH05347438A (ja) 強誘電体薄膜素子
JPS60147180A (ja) 圧電素子