Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Ebara Koki KK
Original Assignee
Ebara Corp
Ebara Koki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp, Ebara Koki KKfiledCriticalEbara Corp
Priority to JP16216882ApriorityCriticalpatent/JPS599688B1/ja
Publication of JPS599688B1publicationCriticalpatent/JPS599688B1/ja
