JPS5983007A - 光学式測定機 - Google Patents

光学式測定機

Info

Publication number
JPS5983007A
JPS5983007A JP19282082A JP19282082A JPS5983007A JP S5983007 A JPS5983007 A JP S5983007A JP 19282082 A JP19282082 A JP 19282082A JP 19282082 A JP19282082 A JP 19282082A JP S5983007 A JPS5983007 A JP S5983007A
Authority
JP
Japan
Prior art keywords
light beam
measured
light
parallel scanning
scanning light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19282082A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6365885B2 (enrdf_load_stackoverflow
Inventor
Yoshiharu Kuwabara
義治 桑原
Hiroyoshi Hamada
浜田　啓好
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsutoyo Manufacturing Co Ltd
Original Assignee
Mitsutoyo Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsutoyo Manufacturing Co Ltd filed Critical Mitsutoyo Manufacturing Co Ltd
Priority to JP19282082A priority Critical patent/JPS5983007A/ja
Publication of JPS5983007A publication Critical patent/JPS5983007A/ja
Publication of JPS6365885B2 publication Critical patent/JPS6365885B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/028—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring lateral position of a boundary of the object

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP19282082A 1982-11-02 1982-11-02 光学式測定機 Granted JPS5983007A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19282082A JPS5983007A (ja) 1982-11-02 1982-11-02 光学式測定機

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19282082A JPS5983007A (ja) 1982-11-02 1982-11-02 光学式測定機

Publications (2)

Publication Number Publication Date
JPS5983007A true JPS5983007A (ja) 1984-05-14
JPS6365885B2 JPS6365885B2 (enrdf_load_stackoverflow) 1988-12-19

Family

ID=16297522

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19282082A Granted JPS5983007A (ja) 1982-11-02 1982-11-02 光学式測定機

Country Status (1)

Country Link
JP (1) JPS5983007A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01206205A (ja) * 1988-02-12 1989-08-18 Keyence Corp スペックルパターン干渉計
JPH027507U (enrdf_load_stackoverflow) * 1988-06-28 1990-01-18
DE102018002788A1 (de) 2017-04-18 2018-10-18 Mitutoyo Corporation Vorrichtung und Verfahren zur optischen Messung eines Außendurchmessers

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018115985A (ja) * 2017-01-19 2018-07-26 リコーインダストリアルソリューションズ株式会社 ガス分布検出光学装置およびガス分布検出装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01206205A (ja) * 1988-02-12 1989-08-18 Keyence Corp スペックルパターン干渉計
JPH027507U (enrdf_load_stackoverflow) * 1988-06-28 1990-01-18
DE102018002788A1 (de) 2017-04-18 2018-10-18 Mitutoyo Corporation Vorrichtung und Verfahren zur optischen Messung eines Außendurchmessers
US10401151B2 (en) 2017-04-18 2019-09-03 Mitutoyo Corporation Optical outer diameter measurement apparatus

Also Published As

Publication number Publication date
JPS6365885B2 (enrdf_load_stackoverflow) 1988-12-19

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