JPS5976568U - 気相成長装置用ガスノズル - Google Patents

気相成長装置用ガスノズル

Info

Publication number
JPS5976568U
JPS5976568U JP17099182U JP17099182U JPS5976568U JP S5976568 U JPS5976568 U JP S5976568U JP 17099182 U JP17099182 U JP 17099182U JP 17099182 U JP17099182 U JP 17099182U JP S5976568 U JPS5976568 U JP S5976568U
Authority
JP
Japan
Prior art keywords
vapor phase
phase growth
gas nozzle
growth equipment
growth apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17099182U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6142921Y2 (enrdf_load_stackoverflow
Inventor
後藤　泰山
宮崎　義彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP17099182U priority Critical patent/JPS5976568U/ja
Publication of JPS5976568U publication Critical patent/JPS5976568U/ja
Application granted granted Critical
Publication of JPS6142921Y2 publication Critical patent/JPS6142921Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP17099182U 1982-11-11 1982-11-11 気相成長装置用ガスノズル Granted JPS5976568U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17099182U JPS5976568U (ja) 1982-11-11 1982-11-11 気相成長装置用ガスノズル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17099182U JPS5976568U (ja) 1982-11-11 1982-11-11 気相成長装置用ガスノズル

Publications (2)

Publication Number Publication Date
JPS5976568U true JPS5976568U (ja) 1984-05-24
JPS6142921Y2 JPS6142921Y2 (enrdf_load_stackoverflow) 1986-12-05

Family

ID=30373121

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17099182U Granted JPS5976568U (ja) 1982-11-11 1982-11-11 気相成長装置用ガスノズル

Country Status (1)

Country Link
JP (1) JPS5976568U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6142921Y2 (enrdf_load_stackoverflow) 1986-12-05

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