JPS5976440A - Diagnostic apparatus for integrated circuit device - Google Patents

Diagnostic apparatus for integrated circuit device

Info

Publication number
JPS5976440A
JPS5976440A JP18553882A JP18553882A JPS5976440A JP S5976440 A JPS5976440 A JP S5976440A JP 18553882 A JP18553882 A JP 18553882A JP 18553882 A JP18553882 A JP 18553882A JP S5976440 A JPS5976440 A JP S5976440A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
ic
outline
computer
circuit
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18553882A
Inventor
Yasuo Furukawa
Yoshiaki Goto
Akio Ito
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Abstract

PURPOSE:To diagnose IC through indication of outline of IC, location of input/ output terminals and signal conditions thereof by providing an IC drive circuit, a means for controlling storage and drive of driving input data and a means for reading IC output. CONSTITUTION:A chip 5 of IC1 is scanned with electron beam 14 under the assignment and control of a circuit 21, the generated secondary electron 18 is detected 19, amplified, and filtered 20. Moreover, the signal intensity-modulates the CRT22 through the circuit 21. Thereby the beam is deflected and a voltage contrast picture of IC can be formed. The test data 27 stored is changed to an input signal 29 through a computer 24 and an IC drive circuit 23, and an output signal 30 is returned to the computer. An outline of IC, trerminal position, outline of chip, and pad position data 28 are processed 24 by the computer together with the signals 29, 30 and stored in a picture memory 25 and is then displayed 26. Whether a voltage appearing on the wiring is normal or abnormal can be easily judged within a short period from the displayed voltage contrast picture.
JP18553882A 1982-10-22 1982-10-22 Diagnostic apparatus for integrated circuit device Pending JPS5976440A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18553882A JPS5976440A (en) 1982-10-22 1982-10-22 Diagnostic apparatus for integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18553882A JPS5976440A (en) 1982-10-22 1982-10-22 Diagnostic apparatus for integrated circuit device

Publications (1)

Publication Number Publication Date
JPS5976440A true true JPS5976440A (en) 1984-05-01

Family

ID=16172553

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18553882A Pending JPS5976440A (en) 1982-10-22 1982-10-22 Diagnostic apparatus for integrated circuit device

Country Status (1)

Country Link
JP (1) JPS5976440A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0495262A2 (en) * 1991-01-14 1992-07-22 Schlumberger Technologies, Inc. Integrated circuits modification with focused ion beam system

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5390876A (en) * 1977-01-21 1978-08-10 Nippon Telegr & Teleph Corp <Ntt> Inspecting method for integrated semiconductor circuit device
JPS5639515A (en) * 1979-09-10 1981-04-15 Chiyou Lsi Gijutsu Kenkyu Kumiai Laser scanning microscope

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5390876A (en) * 1977-01-21 1978-08-10 Nippon Telegr & Teleph Corp <Ntt> Inspecting method for integrated semiconductor circuit device
JPS5639515A (en) * 1979-09-10 1981-04-15 Chiyou Lsi Gijutsu Kenkyu Kumiai Laser scanning microscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0495262A2 (en) * 1991-01-14 1992-07-22 Schlumberger Technologies, Inc. Integrated circuits modification with focused ion beam system

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