JPS597211A - Displacement element - Google Patents

Displacement element

Info

Publication number
JPS597211A
JPS597211A JP11753982A JP11753982A JPS597211A JP S597211 A JPS597211 A JP S597211A JP 11753982 A JP11753982 A JP 11753982A JP 11753982 A JP11753982 A JP 11753982A JP S597211 A JPS597211 A JP S597211A
Authority
JP
Japan
Prior art keywords
displacement
laminated piezoelectric
displacement member
piezoelectric elements
laminated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11753982A
Other languages
Japanese (ja)
Inventor
Hiroshi Sugimoto
杉本 宥
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to JP11753982A priority Critical patent/JPS597211A/en
Publication of JPS597211A publication Critical patent/JPS597211A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage

Abstract

PURPOSE:To change the direction and voltage value of potential and to enable free displacement, by using two pieces a set of laminated piezo-electric elements which are respectively joined to the inside circumferential surface and outside circumferential surface positioned opposite to each other on one side of a displacement member. CONSTITUTION:Two pieces a set of laminated piezo-electric elements 21 and 22, 23 and 24 are provided to a cylindrical displacement member 1 made of spring steel. The elements 21, 22 are laminated with rectangular or plate-shaped piezo- electric elements 211 along the outside circumference of the displacement member and provided with electrodes 212 between the elements 211 and 211. The electrodes 212 are connected alternately +, -, +, - to each other, and the elements 211 are laminated with the crystal directions reversed to each other. The displacement member is thus displaced if a voltage is applied in the direction where the elements 22 and 23 joined on the inside circumferential surface of the displacement member elongate, and conversely if the voltage is applied in the direction where the elements 21, 24 contract.

Description

【発明の詳細な説明】 本発明は圧電体素子を用いて変位量を得る変位素子に関
する。圧電体素子(+) Z T素子)は電圧を加える
と電圧の方向に伸びたり縮んだり覆ることが知られてい
る。そしてこの性質を利用−して圧電体素子を積層し、
その間に電極を形成した積層圧電体素子が知られている
。この積層圧電体素子は1個の圧電体素子に電圧を印加
した場合の変位量が極めて小さいため、多数の圧電体素
子を積層し全体としである程度の変形量を確保するもの
である。例えば直径32+11111厚さ1mmの圧電
体素子の上、下面に1,6kVの電圧を印加すると、負
荷のない状態で、0.1〜1μの変位量を得ることがで
きる。この圧電体素子100個を積層した積層圧電体素
子は1.6kVの電圧を、各圧電体素子に加えることに
より、その100倍の50μ〜100μの変位量を得る
ことができる。従来係る積層圧電体素子を用いて、パル
スモータ、高速バルブ、振動発生源等として利用が期待
されている。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a displacement element that uses a piezoelectric element to obtain a displacement amount. It is known that a piezoelectric element (+) ZT element) expands, contracts, or covers itself in the direction of the voltage when a voltage is applied. Using this property, piezoelectric elements are laminated,
A laminated piezoelectric element in which electrodes are formed between them is known. Since this laminated piezoelectric element has an extremely small amount of displacement when a voltage is applied to one piezoelectric element, a large number of piezoelectric elements are stacked to ensure a certain amount of deformation as a whole. For example, if a voltage of 1.6 kV is applied to the top and bottom surfaces of a piezoelectric element having a diameter of 32+11111 mm and a thickness of 1 mm, a displacement of 0.1 to 1 μ can be obtained without a load. By applying a voltage of 1.6 kV to each piezoelectric element, this laminated piezoelectric element in which 100 piezoelectric elements are laminated can obtain a displacement amount of 50 to 100 microns, which is 100 times that amount. Conventional laminated piezoelectric elements are expected to be used in pulse motors, high-speed valves, vibration sources, and the like.

又、文献に発表された変位素子として、板状の弾性材料
の両面に積層圧電体素子をそれぞれ張り合わせ、一方の
積層圧電体素子の変位量を伸びる方向に、他方の圧電体
素子を縮む方向にそれぞれ電月を印加さV1板状の弾性
部材を一方向にまげる様な変位素子が発表されでいる。
In addition, as a displacement element published in the literature, laminated piezoelectric elements are laminated on both sides of a plate-shaped elastic material, and the displacement of one laminated piezoelectric element is set in the direction of extension, and the amount of displacement of the other piezoelectric element is set in the direction of contraction. Displacement elements have been announced that bend a V1 plate-shaped elastic member in one direction by applying electric current.

係る変位素子はバイメタルと同様の機能を秦ジーるもの
である。
Such a displacement element has a function similar to that of a bimetal.

本発明の変位素子は積層圧電体素子を用いて、大きな変
位量がとれる変位素子を提供づるものである゛。即ち、
本発明の変位素子は、バネ鋼等の弾t! U料で製造さ
れた円筒状の変位部材と、該変位部材の外周面及び内周
面に接合された2個1相で少なくとも2組合削4個の積
層圧電体素子より成り、各組を構成づ−る2個の積層圧
電体素子は該変位部材の1部辺部の相対応する外周面と
内周面に接合され、該2組の組は互いに該変位部材の軸
対称に位置し、全ての積層圧電体素子の積層方向は該変
位部材の円周方向と平行であるこ9とを特徴とJるもの
である。
The displacement element of the present invention uses a laminated piezoelectric element to provide a displacement element that can take a large amount of displacement. That is,
The displacement element of the present invention is made of spring steel or the like. Each set consists of a cylindrical displacement member made of U material, and four laminated piezoelectric elements cut in at least two pairs of two in one phase, bonded to the outer and inner peripheral surfaces of the displacement member. the two laminated piezoelectric elements are joined to corresponding outer and inner peripheral surfaces of one side of the displacement member, the two sets are located axially symmetrically to each other of the displacement member, The lamination direction of all laminated piezoelectric elements is parallel to the circumferential direction of the displacement member.

本発明の変位素子の構成要素であるバネ鋼等の弾性材料
C製造された円筒状の変位部材は、木変位素子の本体を
成りもので、この変位部材の変形により、変位を取り出
す。変位部材の1部辺部の相対づる外周面と内周面に接
合された1組の積層圧電体素子は、上記した従来公知の
バイメタルに相当づる積層圧電体素子を用いた変位量r
と同じ作用をづる。Jなわち、内周面に接合された積層
圧電体素子を伸ばし、外周面に接合された積層■二電体
素子を縮めることにより、変位部材のその部分の辺の曲
率半径が人となる。積層圧電体系rの変位を逆すれば、
その部分の辺の曲率径が小となる。
A cylindrical displacement member made of an elastic material C such as spring steel, which is a component of the displacement element of the present invention, constitutes the main body of the wooden displacement element, and displacement is extracted by deforming the displacement member. A pair of laminated piezoelectric elements bonded to the outer circumferential surface and the inner circumferential surface of one side of the displacement member are arranged to have a displacement amount r using laminated piezoelectric elements corresponding to the conventionally known bimetal described above.
It has the same effect as . That is, by extending the laminated piezoelectric element bonded to the inner circumferential surface and contracting the laminated bielectric element bonded to the outer circumferential surface, the radius of curvature of the side of that portion of the displacement member becomes human. If the displacement of the laminated piezoelectric system r is reversed,
The radius of curvature of the side of that part becomes small.

本発明の変位素子の2相の積層圧電体素子は変位部材の
軸対称に位置している。従って、2組の積層圧電体素子
の内周面に接合された2個の積層圧電体素子を伸びる方
向に逆に、外周面に積層された2個の積層圧電体素子を
縮む方向に電圧を印加づることにより、例えば真円状の
変位部材は、積層圧電体素子が積層された方向に長い隋
円形状に変形する。逆に、内周面に接合された2個の積
層圧電体素子を縮む方向に、外周面に接合された積層圧
電体素子を伸びる方向に電圧を印加することにより、積
層圧電体素子が積層された方向が短い隋円形状に変形す
る。この変位部材の略同方向の変動にまり人さな変位を
1りることができる。
The two-phase laminated piezoelectric element of the displacement element of the present invention is located axially symmetrical to the displacement member. Therefore, the voltage is applied in the direction in which the two laminated piezoelectric elements bonded to the inner peripheral surfaces of the two sets of laminated piezoelectric elements extend, and in the opposite direction to the two laminated piezoelectric elements laminated on the outer peripheral surfaces to contract. By applying a force, for example, a perfectly circular displacement member is deformed into a circular shape that is elongated in the direction in which the laminated piezoelectric elements are laminated. Conversely, the laminated piezoelectric elements are stacked by applying a voltage in the direction in which the two laminated piezoelectric elements bonded to the inner circumferential surface contract and in the direction in which the laminated piezoelectric element bonded to the outer circumferential surface extends. It deforms into a circular shape with shorter directions. Due to this movement of the displacement member in substantially the same direction, one small displacement can be avoided.

本発明の変位素子は、上記した2組の積層圧電体素子を
必要とするが、4組の積層圧電体素子を用いることによ
り、より大きな変位と変形力が4+1られる変位素子と
することができる。この場合、/1組の積層圧電体素子
は、円筒状の変位部材の円周り向に等間隔に位置づる状
態に接合づる。モしてHいに、軸対称にある2相の積層
圧電体素子どうしは、同じ伸びるあるいは縮む方向に電
圧を印加し、それら2組の積層圧電体素子と隣りに位置
する他の2組の積層「電体素子は逆の電圧を印加づるし
のCある。これにより変位部材が隋円形状に変形覆る。
The displacement element of the present invention requires the two sets of laminated piezoelectric elements described above, but by using four sets of laminated piezoelectric elements, a displacement element with a larger displacement and deformation force of 4+1 can be obtained. . In this case, one set of laminated piezoelectric elements are joined to each other so that they are positioned at equal intervals around the circumference of the cylindrical displacement member. Specifically, two-phase laminated piezoelectric elements that are axially symmetrical are applied a voltage in the same direction of expansion or contraction, and two sets of laminated piezoelectric elements located adjacent to these two sets of laminated piezoelectric elements are A reverse voltage is applied to the laminated electric element. This causes the displacement member to deform into a circular shape.

変形を起さU“る積層11電休素子は4紺ぐあるため、
その変形力は大きくまた4り所で曲率半径が変るため変
位量も大きくなる。
Since there are 4 laminated 11 electrolytic elements that cause deformation,
The deformation force is large, and the radius of curvature changes at four points, so the amount of displacement also becomes large.

以干、実施例に説明する。This will be further explained in Examples.

実施例1 本発明の第1実施例の変位素子の断面図を第1図に示す
。この変位素子はバネ鋼でできた円筒状の変位部材1と
、その変位部材の一辺の相対応Jる内周面と外周面とに
それぞれ接合された2個1組ft!1層辻電休県了21
.22、およびその紺と軸対称の辺の相対応する内周面
と外周面とにそれぞれ接合1された2個1相の積層圧電
体素子23.24より成る。寸なわら、W4層圧電体素
了21と22及び23と24はそれぞれ1相を形成層る
。積層圧電体素子21と22で構成される組はl#lI
層佳電休素子体3と24で構成される組に対してこの変
位部材の中心軸に対してUいに対称の位置にある。第1
図に示す変位素子の1部を拡大して第2図に示Ja積層
圧電体素子21.22は、第2図に示りように、矩形、
機状の圧電体素子211を変位部材の外周面にそって積
層し、各圧電体素子211.211の間に電極212を
設けたものである。電極212は交互に+、−1士、−
1・・・と交互に結線されている。そして、圧電体素P
211は交互にその結晶方向を逆にして積層されでいる
。従−)で、電極を交互にl−1−1(−1−1・・・
と電圧を印加づることにより積層圧電体素子を構成づる
各圧電体素子211はいずれも伸びる方向あるいは電J
」を逆にした場合には、いずれも縮む方向に変位部る。
Example 1 A cross-sectional view of a displacement element according to a first example of the present invention is shown in FIG. This displacement element consists of a cylindrical displacement member 1 made of spring steel, and two pieces each connected to the corresponding inner and outer peripheral surfaces of one side of the displacement member. 1st layer Tsujiden holiday prefecture 21
.. 22, and two one-phase laminated piezoelectric elements 23 and 24 bonded to corresponding inner and outer peripheral surfaces of the dark blue and axially symmetrical sides, respectively. In other words, the W4-layer piezoelectric elements 21 and 22 and 23 and 24 each form one phase. The set consisting of laminated piezoelectric elements 21 and 22 is l#lI
The layer is located at a symmetrical position with respect to the central axis of this displacement member with respect to the set made up of the power resting element bodies 3 and 24. 1st
FIG. 2 shows an enlarged view of a part of the displacement element shown in FIG.
Mechanical piezoelectric elements 211 are stacked along the outer peripheral surface of a displacement member, and electrodes 212 are provided between each piezoelectric element 211.211. The electrodes 212 are alternately connected to +, -1, -
1... are connected alternately. And piezoelectric element P
211 are alternately stacked with their crystal directions reversed. -), alternately move the electrodes l-1-1 (-1-1...
By applying a voltage of
'' is reversed, both parts are displaced in the direction of contraction.

なお、積層圧電係累rには、カバー213が被覆されて
おり、各圧電体素子211が変位部材1の外周面に確実
に保持り−るようにしている。尚、伯の積層圧電体素子
22.23.24についても、積層圧電体素子21と同
一の構成より成る。この変位素子を用い、その変位部材
の内周面に接合された積層圧電体素子22と23を伸び
る方向に電圧を印加し、逆に変位部材1の外周面に接合
されたVi1層圧層圧前子21.24を縮む方向に電圧
を印加することにより、変位素子は、第3図にその断面
を示す状態に変形り−る。このため、変位部材の各積層
圧電体素子の中間に位置する点)〕点Qを注目どすると
、電圧を印加しない第1図の線分P Qに対して電圧を
印加した第3図の線分1) Qは、大きくなっている。
Note that the laminated piezoelectric coupling r is covered with a cover 213 to ensure that each piezoelectric element 211 is held on the outer peripheral surface of the displacement member 1. Note that the laminated piezoelectric elements 22, 23, and 24 also have the same configuration as the laminated piezoelectric element 21. Using this displacement element, a voltage is applied in the extending direction of the laminated piezoelectric elements 22 and 23 bonded to the inner peripheral surface of the displacement member 1, and vice versa By applying a voltage in the direction of contracting the front members 21 and 24, the displacement element is deformed into the state shown in its cross section in FIG. For this reason, if we focus on point Q (a point located between each laminated piezoelectric element of the displacement member), we can see that the line segment P in FIG. 1 to which no voltage is applied is the line in FIG. 3 to which a voltage is applied. 1) Q is getting larger.

さらに本実施例の変位素子においては、変位部材の内周
面に接合された積層圧電体素子22と23を縮む方向に
電圧を印加し、逆に外周面に接合された積層圧電体素子
21.24を伸びる方向に電圧を印加することにより、
第3図とは逆に図上左右方向に長い略同形に変形Jる。
Furthermore, in the displacement element of this embodiment, a voltage is applied in a direction to shrink the laminated piezoelectric elements 22 and 23 bonded to the inner circumferential surface of the displacement member, and conversely, the laminated piezoelectric elements 21 and 23 bonded to the outer circumferential surface of the displacement member are compressed. By applying a voltage in the direction in which 24 extends,
Contrary to FIG. 3, it is deformed into approximately the same shape that is longer in the left-right direction in the figure.

係る場合の線分1) Qは、第1図のPQより小さくな
る。従って、積層圧電体素子21.22.23.24の
電圧を逆に印加することにより、点1点Qは大きく位置
を変え、人さな変位量を得ることができる。
In such a case, line segment 1) Q will be smaller than PQ in FIG. Therefore, by applying the voltages of the laminated piezoelectric elements 21, 22, 23, and 24 in the opposite direction, the position of point 1 Q can be changed significantly, and a displacement amount comparable to that of humans can be obtained.

従って、例えばQを固定点とし、Pを変位点とづれば、
積層圧電体素子の電圧を+、−に変えたり電圧の大きさ
を変えることにより変位点1〕の位置を任意の位置にか
つ、線分PQを大きく変えることができる。
Therefore, for example, if Q is a fixed point and P is a displacement point, then
By changing the voltage of the laminated piezoelectric element to + or - or changing the magnitude of the voltage, the position of the displacement point 1 can be set to an arbitrary position, and the line segment PQ can be changed significantly.

なJ3、点P、Q以外に、変位部材1上で点P1Qの中
間点どなる点R1点Sの位置も点P、Qと同じく大きな
変位間が1qられる。
In addition to J3, points P, and Q, the position of point R1 and point S, which is the intermediate point of point P1Q on the displacement member 1, also has a large displacement distance of 1q, similar to points P and Q.

また、大きな角度変化を必要とする場合には、変位部材
1上で、相隣りあう各点PとR,RとQlQとSSSど
]〕の中間点、例えば点Tの位置の接線方向の角度は大
きく変化する、従って、この変位素子は変角素子として
も利用できる。
In addition, when a large angle change is required, the angle in the tangential direction of the intermediate point between adjacent points P and R, R, QlQ, SSS, etc.] on the displacement member 1, for example, the position of point T. changes greatly, so this displacement element can also be used as a variable angle element.

実施例2 本発明の他の実施例の変位素子を第4図及び第55図に
示す。この変位素子は第1実施例の変位素子が2組の積
層圧電体素子を用いたのに対して、4組の積層圧電体素
子を用いたものである。即ち、本実施例の変位素子は、
円筒状の変位部材1と8個の積層圧電体素子21.22
.23.2/1.25.26.27.28を用いている
。ここで、変位部材1は実施例1の変位部材1と同様の
ものである。又、積層圧電体素子21.22.23.2
4についても実施例1の変位素子の積層圧電体素子21
.22.23.24と同様のものCある。
Embodiment 2 A displacement element according to another embodiment of the present invention is shown in FIGS. 4 and 55. This displacement element uses four sets of laminated piezoelectric elements, whereas the displacement element of the first embodiment uses two sets of laminated piezoelectric elements. That is, the displacement element of this example is
Cylindrical displacement member 1 and eight laminated piezoelectric elements 21 and 22
.. 23.2/1.25.26.27.28 is used. Here, the displacement member 1 is similar to the displacement member 1 of the first embodiment. Also, laminated piezoelectric element 21.22.23.2
4, the laminated piezoelectric element 21 of the displacement element of Example 1
.. There is a C similar to 22.23.24.

本実施例では更に4個の積層圧電体素子25.26.2
7.28をそれぞれ各相の圧電体素子の中間に位置する
変位部1tA1の部分に接合している。
In this example, four laminated piezoelectric elements 25, 26, 2
7.28 are respectively joined to the displacement portion 1tA1 located between the piezoelectric elements of each phase.

この本実施例の変位素子においても、1組を構成する2
個の積層圧電体素子は互いに逆の変位、例えば−の積層
圧電体素子が伸びる場合には他の積層圧電体素子は縮む
方向に、電圧が印加される。
Also in the displacement element of this embodiment, two
A voltage is applied to the laminated piezoelectric elements so that the displacements are opposite to each other, for example, when a negative laminated piezoelectric element expands, the other laminated piezoelectric elements contract.

組と紺との関係においては、変位部材1の軸対称にある
組の変位方向にしかし、隣り合う組においては、それぞ
れ一方が伸びる場合には、他りが縮むといった様に逆に
電圧が印加される。例えば、積層圧電体素子21と22
の絹については、積層圧電体素子21が伸びる方向に電
圧を印加されると他の積層圧電体素子22は、縮む方向
に重り−を印加される。
In the relationship between the pairs and the navy blue, voltage is applied in the direction of displacement of the pairs that are axially symmetrical to the displacement member 1, but in the case of adjacent pairs, voltage is applied in the opposite direction so that when one expands, the other contracts. be done. For example, the laminated piezoelectric elements 21 and 22
Regarding silk, when a voltage is applied in the direction in which the laminated piezoelectric element 21 extends, a weight is applied in the direction in which the other laminated piezoelectric element 22 contracts.

軸対称にある2つの組、例えば積層圧電体素子21と2
2の組と、積層圧電体素子23と24の組では、変位部
材の外周面に接合された、nいに対応する積層圧電体素
子21と24は同一変位り向、例えば共に伸びる方向に
電圧を印加される。
Two sets of axially symmetrical elements, for example, laminated piezoelectric elements 21 and 2
In the set No. 2 and the set of laminated piezoelectric elements 23 and 24, the laminated piezoelectric elements 21 and 24, which are connected to the outer peripheral surface of the displacement member and correspond to n, are applied with voltage in the same displacement direction, for example, in the direction in which they extend together. is applied.

他の対応する積層圧電体素子22と23も同−ti向例
えば共に縮む方向に電圧を印加される。
A voltage is also applied to the other corresponding laminated piezoelectric elements 22 and 23 in the same -ti direction, for example, in a direction in which they both contract.

隣り合う2つの組、例えば、積層圧電体素子21と22
の組と、積層圧電体素子25ど26の組では、変位部材
の外周面に接合された、互いに対応づる1層圧電体素子
21と25は異なった方向、例えば積層圧電体素子21
が伸び方向に電圧を印加されると積層圧電体素子25は
縮む方向に電圧を印加される。他の対応する積層圧電体
素子22ど2(5も同様、積層Lt電休体r−22が縮
む方向に電圧を印加されると積層JIJE電体素子26
は逆に伸びる方向に電圧を印加される。第5図はこの状
態で電圧を印加した時の変位素子の形状を承り。この変
位素子は縦方向に長い隋円形状になる。なJ3、各積層
圧電体素子の電圧の印加方向を逆にり−ると横方向に長
い隋円形状に変形する。この第2実施例の変位素子は第
1実施例の変位素子に比較しで第4図、第5図にお(〕
る土上下組の積層圧電体素子25.26と27.28が
イ」加されているために、そのイ]加されたfft層圧
電体素子の変形が加わり、にり強力に変位部材1を変形
さける。従つ(−1第1実施例の変位素子に比較して変
形づる力は約2倍のなっていると考えられる。又、1下
方向での変形が積層圧電体素子により、強制されるため
に、第1実施例の変位素子に比較して変位量が若干大き
くなっている。
Two adjacent sets, for example, laminated piezoelectric elements 21 and 22
In the pair of laminated piezoelectric elements 25 and 26, the corresponding one-layer piezoelectric elements 21 and 25 connected to the outer peripheral surface of the displacement member are moved in different directions, for example, the laminated piezoelectric elements 21
When a voltage is applied to the laminated piezoelectric element 25 in the direction of extension, a voltage is applied to the laminated piezoelectric element 25 in the direction of contraction. Similarly, for other corresponding laminated piezoelectric elements 22 and 2 (5), when a voltage is applied in the direction in which the laminated Lt electrically conductive body r-22 contracts,
A voltage is applied in the opposite direction. Figure 5 shows the shape of the displacement element when voltage is applied in this state. This displacement element has a long circular shape in the vertical direction. J3, if the direction of voltage application to each laminated piezoelectric element is reversed, it deforms into a horizontally elongated circular shape. The displacement element of this second embodiment is compared with the displacement element of the first embodiment as shown in FIGS.
Since the laminated piezoelectric elements 25, 26 and 27, 28 of the upper and lower sub-base groups are added, the deformation of the applied fft layer piezoelectric elements is added, and the displacement member 1 is pushed more forcefully. Avoid deformation. Therefore, it is thought that the deformation force is approximately twice that of the displacement element of the first embodiment. Also, since the deformation in the downward direction is forced by the laminated piezoelectric element, In addition, the amount of displacement is slightly larger than that of the displacement element of the first embodiment.

この変位素子も実施例1の変位素子と同じように変角素
子として利用できる。
This displacement element can also be used as a variable angle element in the same way as the displacement element of the first embodiment.

【図面の簡単な説明】 第1図、第2図、第3図は本発明の実施例1に示]変位
素子に関し、第1図はぞの断面図、第2図は第1図の変
位素子の部分拡大図、第3図は第1実施例に一定の電圧
を印加した時の状態を示づ入 断面図、第4図及び第5図は本発明の第2実施例の変位
素子に関し、第4図はその断面図、第5図は第4図の変
位素子に一定の電圧を印加した時の状態を示す変位素子
の断面図である。 1・・・・・・変位部材 21.22.23.24.25.26.27゜28・・
・・・・積層圧電体素子 211・・・・・・圧電体素子 212・・・・・・電極  213・・・・・・カバー
特許出願人  トヨタ自動車株式会社 代理人  弁理士  大川 宏 同   弁理士  藤谷 修 同   弁理士  丸山明夫 乙 第5図
[Brief Description of the Drawings] Figures 1, 2, and 3 are shown in Embodiment 1 of the present invention] Regarding the displacement element, Figure 1 is a cross-sectional view, and Figure 2 is the displacement of Figure 1. A partially enlarged view of the element, FIG. 3, shows the state when a constant voltage is applied to the first embodiment, and a cross-sectional view, FIGS. 4 and 5, relate to the displacement element of the second embodiment of the present invention. , FIG. 4 is a sectional view thereof, and FIG. 5 is a sectional view of the displacement element shown in FIG. 4, showing a state when a constant voltage is applied to the displacement element. 1...Displacement member 21.22.23.24.25.26.27゜28...
...Laminated piezoelectric element 211...Piezoelectric element 212...Electrode 213...Cover patent applicant Toyota Motor Corporation agent Patent attorney Hirodo Okawa Patent attorney Shudo Fujitani Patent Attorney Akio Maruyama Figure 5

Claims (2)

【特許請求の範囲】[Claims] (1)バネ鋼等の弾性材料で製造された円筒状の変位部
材ど、該変位部材の外周面及び内周面に接合された2個
1組で少なくとも2組合814個の積層圧電体素子より
成り、 各組を構成Jる2個の積層圧電体素子は該変位部材の1
部辺部の相対応する外周面と内周面に接合され、該2組
の組は互いに該変位部材の軸対称に位置し、全ての積層
圧電体素子の積層方向は該変位部材の円周方向ど平行で
あることを特徴とする変位素子。
(1) A cylindrical displacement member made of an elastic material such as spring steel, with at least 2 sets of 814 laminated piezoelectric elements joined to the outer and inner circumferential surfaces of the displacement member. The two laminated piezoelectric elements constituting each set are one of the displacement members.
They are joined to corresponding outer and inner circumferential surfaces of the side portions, the two sets are located axially symmetrically of the displacement member, and the stacking direction of all laminated piezoelectric elements is aligned with the circumference of the displacement member. A displacement element characterized by being parallel in direction.
(2)積層圧電体素子は、4組で構成され、各組は、円
筒状変位部材の円周方向に等間隔に位、置している特許
請求の範囲第1項記載の変位素子。
(2) The displacement element according to claim 1, wherein the laminated piezoelectric element is composed of four sets, and each set is positioned at equal intervals in the circumferential direction of the cylindrical displacement member.
JP11753982A 1982-07-06 1982-07-06 Displacement element Pending JPS597211A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11753982A JPS597211A (en) 1982-07-06 1982-07-06 Displacement element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11753982A JPS597211A (en) 1982-07-06 1982-07-06 Displacement element

Publications (1)

Publication Number Publication Date
JPS597211A true JPS597211A (en) 1984-01-14

Family

ID=14714293

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11753982A Pending JPS597211A (en) 1982-07-06 1982-07-06 Displacement element

Country Status (1)

Country Link
JP (1) JPS597211A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4862860A (en) * 1987-10-30 1989-09-05 Fuji Jukogyo Kabushiki Kaisha Blow-bye gas return device for internal combustion engines
US5412854A (en) * 1993-06-18 1995-05-09 Humphrey Instruments, Inc. Method of making a high frequency focused transducer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4862860A (en) * 1987-10-30 1989-09-05 Fuji Jukogyo Kabushiki Kaisha Blow-bye gas return device for internal combustion engines
US5412854A (en) * 1993-06-18 1995-05-09 Humphrey Instruments, Inc. Method of making a high frequency focused transducer

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