JPS5968196U - turbo molecular pump - Google Patents

turbo molecular pump

Info

Publication number
JPS5968196U
JPS5968196U JP16497482U JP16497482U JPS5968196U JP S5968196 U JPS5968196 U JP S5968196U JP 16497482 U JP16497482 U JP 16497482U JP 16497482 U JP16497482 U JP 16497482U JP S5968196 U JPS5968196 U JP S5968196U
Authority
JP
Japan
Prior art keywords
molecular pump
drive mechanism
purge gas
mechanism section
turbo molecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16497482U
Other languages
Japanese (ja)
Other versions
JPS609439Y2 (en
Inventor
金戸　茂
昌司 井口
Original Assignee
株式会社大阪真空機器製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社大阪真空機器製作所 filed Critical 株式会社大阪真空機器製作所
Priority to JP1982164974U priority Critical patent/JPS609439Y2/en
Publication of JPS5968196U publication Critical patent/JPS5968196U/en
Application granted granted Critical
Publication of JPS609439Y2 publication Critical patent/JPS609439Y2/en
Expired legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の実施例を示すターボ分子ポンプの断面
図。第２図及び第３図は他実施例を示すターボ分子ポン
プの要部断面図。第４図は従来のターボ分子ポンプを示
す断面図。 ２・・・駆動機構部、７・・・スパイラル溝、８・・・
ローター、１０・・・間隙部、１６・・・ポンプ本体内
空間部。FIG. 1 is a sectional view of a turbomolecular pump showing an embodiment of the present invention. FIGS. 2 and 3 are sectional views of main parts of a turbomolecular pump showing other embodiments. FIG. 4 is a sectional view showing a conventional turbo molecular pump. 2... Drive mechanism section, 7... Spiral groove, 8...
Rotor, 10... Gap, 16... Space within the pump body.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 駆動機構部２内にパージガスを充填させ、該充填させた
パージガスをポンプ本体内空間部１６へ流出させる為の
間隙部１０を前記駆動機構部゛２の外周面６と゛ロータ
ー８の内周面１１とによって形成してなるターボ分子ポ
ンプに於いて、前記間隙部１０を形成してなる駆動機構
部２の外周面６とローター８の内周面１１とのいずれか
一方に、前記ローター８の回転によって駆動機構部２内
のパージガスをポンプ本体内空間部１６側今吐出するべ
くスパイラル溝７を形成してなることを特徴とするター
ボ分子ポンプ。A gap 10 is formed between the outer circumferential surface 6 of the drive mechanism section 2 and the inner circumferential surface 11 of the rotor 8 to fill the drive mechanism section 2 with purge gas and allow the filled purge gas to flow out into the pump body internal space 16. In the turbo-molecular pump formed by A turbo-molecular pump characterized in that a spiral groove 7 is formed to discharge the purge gas inside the drive mechanism section 2 to the inner space section 16 side of the pump body.
JP1982164974U 1982-10-29 1982-10-29 turbo molecular pump Expired JPS609439Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1982164974U JPS609439Y2 (en) 1982-10-29 1982-10-29 turbo molecular pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1982164974U JPS609439Y2 (en) 1982-10-29 1982-10-29 turbo molecular pump

Publications (2)

Publication Number Publication Date
JPS5968196U true JPS5968196U (en) 1984-05-09
JPS609439Y2 JPS609439Y2 (en) 1985-04-03

Family

ID=30361545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1982164974U Expired JPS609439Y2 (en) 1982-10-29 1982-10-29 turbo molecular pump

Country Status (1)

Country Link
JP (1) JPS609439Y2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09310696A (en) * 1996-03-21 1997-12-02 Osaka Shinku Kiki Seisakusho:Kk Molecular drag pump
JP2000205183A (en) * 1999-01-13 2000-07-25 Mitsubishi Heavy Ind Ltd Turbo-molecular pump
JP2021055673A (en) * 2019-09-30 2021-04-08 エドワーズ株式会社 Vacuum pump

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5141065B2 (en) * 2007-03-26 2013-02-13 株式会社島津製作所 Turbo molecular pump

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09310696A (en) * 1996-03-21 1997-12-02 Osaka Shinku Kiki Seisakusho:Kk Molecular drag pump
JP2000205183A (en) * 1999-01-13 2000-07-25 Mitsubishi Heavy Ind Ltd Turbo-molecular pump
JP2021055673A (en) * 2019-09-30 2021-04-08 エドワーズ株式会社 Vacuum pump
WO2021065584A1 (en) * 2019-09-30 2021-04-08 エドワーズ株式会社 Vacuum pump

Also Published As

Publication number Publication date
JPS609439Y2 (en) 1985-04-03

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