JPS596427Y2 - Spectrometer sample stand - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to the structure of a sample stage used for mounting a sample on a spectrometer when optically measuring a thin plate-like sample using a spectrometer.

This type of measurement includes, for example, the measurement of the absorption characteristics of semiconductor wafers, and is also applied to the detection of impurities, and is widely used industrially.

The light beam of a spectrometer used for such measurements is often horizontal.

The sample to be measured is therefore mounted perpendicular to the beam, ie in an upright position, as shown in FIG.

FIG. 1 is a schematic side view of a spectrometer equipped with a sample.

A sample 1 is set on a sample stage 3 with an aperture 2, and attached to a spectrometer 6.

Light 5 emitted from the light source section 4 enters the test slope 1, and light 7 transmitted through the sample 1 passes through the aperture 2 and enters the spectrometer 6, where measurement is performed.

Conventionally, such measurements have been carried out by attaching the sample 1 to a sample stage 3 having an aperture 2 with adhesive tape or the like.

However, such a method has drawbacks such as the trouble of attaching and detaching the sample and the risk of sample damage and surface contamination.

The present invention solves these drawbacks and proposes a sample stage with a structure that allows a sample to be easily attached and removed without damaging or staining the sample.

Hereinafter, the present invention will be described in detail using examples with reference to FIG.

Figure 2A is a front view of the sample stage, and the lower half of Figure 2A is the X-
A sectional view of part X, the upper half is a side view, and part C is a top view.

The sample stage of the present invention supports a sample using a lower support part 8 and an upper support part 12.

The lower support part 8 has a ■-shape when viewed from the front so as to support the sample at at least two points, and its side section has an inclined V-shaped groove 9, so that the thin plate-like sample 10 shown by the chain line is It is arranged so as to be in close contact with the main surface 11' of the plate-shaped body 11, which is a structural element of the sample stage.

The upper support body 12 is a chevron-shaped rod-shaped body, and is supported by presser plates 13 from both sides so that it can freely slide up and down.

The surface 15 at the tip of the upper support that contacts the sample is configured to have a certain angle θ (θ<90°) with respect to the main surface 11' of the plate-like body, and the thin sample 10 is It acts to bring it into close contact with the surface 11'.

If the angle θ is larger than 90°, it is inconvenient to hold the sample on the sample stage.

Therefore, θ needs to be an angle smaller than 90'.

However, if this angle θ is made too small, the thin plate-shaped sample will bite between the upper support 12 and the main surface 11' of the plate-shaped body, which may damage the sample or make it difficult to remove it. be.

For this reason, θ is preferably 45 to 90 degrees, particularly around 60 degrees.

This situation also applies to the cross-sectional shape of the groove 9 of the lower support portion 8.

The support table is provided with an aperture 14 that is smaller than the sample and allows light to pass therethrough.

The sample is attached to the support stand as follows.

The upper support 12 is lifted upward so that the peripheral part of the sample 10 fits into the groove 9 of the lower support 8, and then the upper support 12 is lowered to hold the sample 10 down.

As mentioned above, since the sample is mounted in an upright position, the upper support 12 acts to hold down the sample due to gravity.
The sample is brought into close contact with the main surface 11' of the plate.

Measurements can be performed by attaching this support to a spectrometer.

This method of attachment is not related to the gist of the present invention and will therefore be omitted.

In the above embodiment, the lower support part 8 is shaped like a square square, but it can also be shaped like a concave or an arc along a part of the outer periphery of the sample.

These shapes may be selected depending on the shape of the sample to be measured.

Further, as the shape of the upper support body 12, an example of a chevron-shaped rod-shaped body inserted between the presser plates 13 was shown, but the tip part has an inclination of θ as per the gist of the present invention, and Other designs can be used if desired.

The present invention provides a sample support stand that is less likely to damage or contaminate the sample, allows easy mounting of the sample, and can greatly increase efficiency when measuring a large number of samples. , is industrially very effective.

[Brief explanation of the drawing]

FIG. 1 is a schematic diagram showing a state in which a sample is attached to a spectrometer. Figure 2 shows an embodiment of the sample support stand of the present invention, where A is a front view, the lower half of B is a cross-sectional view of A, and the upper half of B is A
C is a side view, and C is a top view. 8...Lower support part, 9...Groove, 10.
...Measurement sample, 11...Plate-shaped body, 12.
... Upper support body, 13 ... Pressing plate, 14
...Aperture, 15...The surface of the tip of the upper support that comes into contact with the sample.

Claims (1)

[Scope of utility model registration request] A plate-like body has a through-hole smaller than the thin-plate sample formed in the part where the thin-plate sample is to be attached, and a protruding surface that slopes upward is placed below the through-hole on the main surface of the plate-like body. A stepped portion for supporting a thin plate-like sample is arranged in a V-shape or concave shape when viewed from the side, and the lower end that contacts the thin-plate sample supported by the stepped portion is opposite to the shape or surface of the stepped portion. An upper support member formed by a downwardly inclined surface is attached to the main surface of the plate-like body located above the through hole in a vertically slidable relationship. A sample stand for spectrometers featuring: