JPS5954487A - Working head for laser - Google Patents

Working head for laser

Info

Publication number
JPS5954487A
JPS5954487A JP57163904A JP16390482A JPS5954487A JP S5954487 A JPS5954487 A JP S5954487A JP 57163904 A JP57163904 A JP 57163904A JP 16390482 A JP16390482 A JP 16390482A JP S5954487 A JPS5954487 A JP S5954487A
Authority
JP
Japan
Prior art keywords
sensor
gap
assist gas
head
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57163904A
Other languages
Japanese (ja)
Inventor
Masayoshi Hashiura
橋浦 雅義
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57163904A priority Critical patent/JPS5954487A/en
Publication of JPS5954487A publication Critical patent/JPS5954487A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462Nozzles; Features related to nozzles

Abstract

PURPOSE:To perform satisfactory working by providing a magnetic sensor or electrostatic capacity type sensor in the end part of a nozzle for blowing an assist gas, and measuring the distance between the working head and the work in the part where the assist gas is blown and the part where a laser is irradiated. CONSTITUTION:A titled head is constituted of a noncontact sensor 16, a nozzle 2 constituted of a water cooling part 17 for cooling the same, a working head 1 for holding the same, and a head driving part which moves upward or downward apart at a gap (g) therefrom. If the sensor 16 is a magnetic sensor, the change DELTAZ of the impedance Z in the sensor coil is DELTAZproportional g with g designated as a gap, and in the case of an electrostatic type sensor, the change DELTAC in the electrostatic capacity C is DELTACproportional 1/g. Therefore, the g can be calculated by detecting DELTAZ, DELTAC. Since the gap in the working position is measured in such a way, the accuracy is made several times higher than in the prior art.

Description

【発明の詳細な説明】 本発明eよレーザ加工装置に係り、特に、安定して良好
な力11工部を得られるような加工ヘッドに関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a laser processing apparatus, and particularly to a processing head that can stably obtain a good force.

V−ザ加−[装置P<として、加工ヘッドとワーク間の
ギャップgを一定に保ち、良好な力1江性を得るための
方法として一般に行なわれている例會第1、図ないし第
3図に示す。以下、第1図ないし第3図をもって説明す
る。
Example 1, Figure 3 shows a commonly used method for maintaining the gap g between the machining head and the workpiece and obtaining good force resistance using the V-za machining device P<. Shown below. This will be explained below with reference to FIGS. 1 to 3.

従来は、集光レンズ9、ノズル2お工びアシストガス1
1を吹きつける穴部より構成されている加工ヘッド1、
これを保持するヘソドホールダ3、これらt上、下に駆
動させるためのヘッド駆動部4、ギャップgを梗出する
だめの接触式ギャップ検出センサー5およびそのセンサ
ブローフ゛6からイ1q成さ扛ていた。第2図に示すよ
うに、ギャップ。
Conventionally, the condenser lens 9, the nozzle 2, and the assist gas 1
1, a processing head 1 consisting of a hole that sprays
It consisted of a head holder 3 for holding it, a head drive section 4 for driving these t up and down, a contact type gap detection sensor 5 for detecting the gap g, and its sensor blower 6. As shown in Figure 2, the gap.

gとワーク7に吹き付けら′tLるアシストガス圧p1
の間にVユ pl gm− の関係があり、gが変化するとl〕1が大きく変化する
ため切断加工の場合切断面13の荒れ、ドロス14の付
着、および第3図に、ボすよりな切断幅l〕の変化が発
生し、加工性ケ著しく低下させる。
g and the assist gas pressure p1 blown onto the workpiece 7
There is a relationship of Vupl gm- between them, and when g changes, l]1 changes greatly. Therefore, in the case of cutting, roughness of the cut surface 13, adhesion of dross 14, and FIG. This causes a change in the cutting width l], which significantly reduces workability.

従って、gヶ一定に保つことが必要となるが、9f来方
式でQよ接触式であり、かつ、加工部位とギヤツブ4突
出↑化位が距離tだけ1;IGれているため、■ 加工
方向にスパッタ等の付2i11%害物8があったりする
とセンー丈−ブローフ゛6がイ波j員したり、検出ギャ
ップ−)d、に誤差が発生したり、8に6が乗り上げ動
作不能になる等の危険性がある。
Therefore, it is necessary to keep g constant, but since the 9F method is a contact type and Q is a contact type, and the machining part and gear lug 4 protrusion ↑ position are separated by a distance t, ■ machining. If there is a harmful substance 8 such as spatter in the direction, the sensor height - blow 6 may be affected by waves, an error may occur in the detection gap - d, or 6 may land on 8 and become inoperable. There is a risk of

■ tだけ離ルて検出するため、加工[部位とのギャッ
プに差が生じる危険性が%3 イ。
■ Since the detection is performed from a distance of t, there is a risk of a difference in the gap with the machining part by 3%.

これと解決する米として遅延回路ケ設け、内部演算処理
して対処する方法があるが、flilJ御回路の裏回路
ストが向くつく。
There is a way to solve this problem by installing a delay circuit and performing internal arithmetic processing, but this will cause problems with the back circuit of the flilJ control circuit.

という問題点があった。There was a problem.

本発明の目的は、コンパクトで、しかもし〜ザ加工部位
でのワーク間ギャップケ効率良く検出し、良好な加工の
行なえるレーザ加工用ヘッド駆動部するにある。
SUMMARY OF THE INVENTION An object of the present invention is to provide a laser machining head drive unit that is compact and capable of efficiently detecting gaps between workpieces at the machining location and performing good machining.

一般に、アーク溶接法の自動化銀として、前述の接触式
ギャップセンサの他、非接触式ギャップセンサーとして
磁気セン丈−1静屯容Iλ型センサーが多く用いらf’
しているが、アークに上る磁気吹き現象等により、これ
らのセンサーは加工部位と離れて設置されているのが晋
、1川である。
In general, in addition to the above-mentioned contact gap sensor, a magnetic sensor length -1 static volume Iλ type sensor is often used as a non-contact gap sensor to automate the arc welding process.
However, due to the phenomenon of magnetic blowing on the arc, these sensors are installed far away from the processing area in Jin and Ichikawa.

一方、レーザは、アークと異なり光であるため磁気吹き
等の現象は無い。従って、一般的な非接触七ンツ゛−ヲ
、加工ノズル先端部に一体形に設けることV′CJ:、
す、加工部位でのワーク間ギャップ?検出できる加工ヘ
ッドヶ提供することができる。
On the other hand, unlike an arc, a laser uses light, so there is no phenomenon such as magnetic blowing. Therefore, a general non-contact seven point must be provided integrally at the tip of the processing nozzle.V'CJ:
Is there a gap between the workpieces at the machining area? A detectable machining head can be provided.

第4図、第5図は本発明のもガ戚図である。FIGS. 4 and 5 are diagrams of the present invention.

非接触センサー16および、その冷却用水rir t4
1s17より構成されているノズル2、それる:保持す
る加工ヘッド1およびこれら栄ギャップgにより上、下
(面きせるヘッド駆動部44.(:から構成さtLる。
Non-contact sensor 16 and its cooling water rir t4
The nozzle 2 is made up of a nozzle 17, the processing head 1 is held, and the head drive unit 44 is made up of a head drive unit 44 that faces the upper and lower surfaces by the gap g.

16(lよ、磁気センサーあるいは静′[冠容量型セン
サーで磁気センサーの場合、七/丈−コイル内のインピ
ーダンスZ1.り変化ΔZ LrJ、g ’c、ギャッ
プとして、 ΔZヴg 1!fl電谷1.[型センサーの」局舎、静シ11.谷
訊Cの変化ΔCは ΔCw − で衣わさ肛るから、これらΔZあるいはΔC’):検出
することによりgヶ容易に逆↑fすることができる。
16 (l, magnetic sensor or static '[capacitive type sensor, in the case of a magnetic sensor, 7/length - change in impedance Z1 in the coil ΔZ LrJ, g 'c, gap, ΔZvg 1!fl electric Valley 1. [Type sensor's] station, static 11. Valley C change ΔC is changed by ΔCw -, so these ΔZ or ΔC'): By detecting g can be easily reversed ↑f can do.

冷却用水冷部17ば、加工I(,10輻射熱により、セ
ンサー16が温度上昇し、誤り1υ1′Lまたは破Jr
4 したりしないようにするためのものである。
The temperature of the sensor 16 increases due to the radiant heat of the cooling water cooling section 17.
4. This is to prevent people from doing something like this.

又、16Qニアシストガス11ケ吹き1;」けるための
ノズル穴12ケ形成できるような+R造になっている。
In addition, it has a +R construction that can form 12 nozzle holes for blowing 11 16Q near assist gases.

なお、図中7i″を加工ワーク、101よレーザビーム
、15rj切ii;I−r rljテある。
In the figure, 7i'' is a processed workpiece, 101 is a laser beam, and 15rj is cut ii; Ir rlj te.

本発明によ2’Lば、ギーヤップの検出部を17を来の
115以下にコンパクト化できると共に、多少の障湿・
吻があっても、ギャップを検出することかでき、かつ、
力1」玉名I〜tqでのギヤツブ全測足できるので、従
来の数倍以上の梼I!向上が図れる。
According to the present invention, 2'L allows the geyap detection section to be made compact from 17 to 115 or less compared to the previous model.
Even with a proboscis, gaps can be detected, and
Power 1" You can measure all the gears from Tamana I to tq, so the power I is several times more than the conventional one! Improvements can be made.

【図面の簡単な説明】[Brief explanation of the drawing]

8′!1図tよ従来の44成の側面図、1412図は−
L゛の断面図、4′目図はり月+Ji加工時の切fi、
l′i”l’iaの状況金示す図、jα4図Q」、木箔
明による溝底の側1iii図、第5図はぞの1す[面図
Cある。
8′! Figure 1 T is a side view of the conventional 44 configuration, Figure 1412 is -
Cross-sectional view of L゛, 4' figure, cutting fi during machining + Ji,
Figures showing the situation of l'i''l'ia, jα4 Figure Q'', Figure 1iii on the side of the groove bottom by Mokuho Akira, Figure 5 has side view C.

Claims (1)

【特許請求の範囲】 1、レーザ葡用いた加工ヘッドとワーク間の距離全検出
し、−足に保つための磯(1゛qにおいて、アシストガ
スを吹きつけるためのノズルの端部に磁気セフ9−1あ
るいは、静電容量型センサーを取り付けて、前記アシス
トガスの吹き付は部およびレーザ照射部における前記加
工ヘッドとワーク間の距離を測定できるようにしたこと
ケ特徴とするレーデ用加工ヘッド。 2、特許請求の範囲第1JA記載において、アシストガ
ス吹き付は用ノズル穴を形成できるようなセンサーと、
加工時の輻射熱による温度上昇ヶ防止するための水冷部
と、前記アシストガスによる冷却効果音もたせる手段と
からなることを特徴とするレーザ用加工Vソド。
[Claims] 1. The entire distance between the processing head and the workpiece using a laser is detected, and a magnetic safety plate is installed at the end of the nozzle for blowing assist gas at 1. 9-1 Alternatively, a processing head for radar, characterized in that a capacitance type sensor is attached to measure the distance between the processing head and the workpiece at the assist gas blowing section and the laser irradiation section. 2. Claim 1 JA describes a sensor capable of forming a nozzle hole for blowing assist gas;
A laser processing machine comprising a water cooling section for preventing temperature rise due to radiant heat during processing, and means for producing a cooling sound effect by the assist gas.
JP57163904A 1982-09-22 1982-09-22 Working head for laser Pending JPS5954487A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57163904A JPS5954487A (en) 1982-09-22 1982-09-22 Working head for laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57163904A JPS5954487A (en) 1982-09-22 1982-09-22 Working head for laser

Publications (1)

Publication Number Publication Date
JPS5954487A true JPS5954487A (en) 1984-03-29

Family

ID=15783031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57163904A Pending JPS5954487A (en) 1982-09-22 1982-09-22 Working head for laser

Country Status (1)

Country Link
JP (1) JPS5954487A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6349389A (en) * 1986-08-18 1988-03-02 Nippei Toyama Corp Laser beam machine
US4794222A (en) * 1986-06-30 1988-12-27 Manabu Funayama Laser beam machining apparatus
US5118918A (en) * 1988-06-06 1992-06-02 Serrano Jean Pierre Beam delivery apparatus
WO1994004968A1 (en) * 1992-08-14 1994-03-03 Lumonics Corporation Robotic movement of object over a workpiece surface

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4794222A (en) * 1986-06-30 1988-12-27 Manabu Funayama Laser beam machining apparatus
JPS6349389A (en) * 1986-08-18 1988-03-02 Nippei Toyama Corp Laser beam machine
US5118918A (en) * 1988-06-06 1992-06-02 Serrano Jean Pierre Beam delivery apparatus
WO1994004968A1 (en) * 1992-08-14 1994-03-03 Lumonics Corporation Robotic movement of object over a workpiece surface
US5340962A (en) * 1992-08-14 1994-08-23 Lumonics Corporation Automatic control of laser beam tool positioning

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