JPS5954257A - 半導体装置 - Google Patents

半導体装置

Info

Publication number
JPS5954257A
JPS5954257A JP57165350A JP16535082A JPS5954257A JP S5954257 A JPS5954257 A JP S5954257A JP 57165350 A JP57165350 A JP 57165350A JP 16535082 A JP16535082 A JP 16535082A JP S5954257 A JPS5954257 A JP S5954257A
Authority
JP
Japan
Prior art keywords
film
layer
type
capacitor
sio2
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57165350A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0366815B2 (en:Method
Inventor
Makio Iida
飯田　真喜男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NipponDenso Co Ltd filed Critical NipponDenso Co Ltd
Priority to JP57165350A priority Critical patent/JPS5954257A/ja
Publication of JPS5954257A publication Critical patent/JPS5954257A/ja
Publication of JPH0366815B2 publication Critical patent/JPH0366815B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Bipolar Integrated Circuits (AREA)
  • Bipolar Transistors (AREA)
JP57165350A 1982-09-22 1982-09-22 半導体装置 Granted JPS5954257A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57165350A JPS5954257A (ja) 1982-09-22 1982-09-22 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57165350A JPS5954257A (ja) 1982-09-22 1982-09-22 半導体装置

Publications (2)

Publication Number Publication Date
JPS5954257A true JPS5954257A (ja) 1984-03-29
JPH0366815B2 JPH0366815B2 (en:Method) 1991-10-18

Family

ID=15810684

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57165350A Granted JPS5954257A (ja) 1982-09-22 1982-09-22 半導体装置

Country Status (1)

Country Link
JP (1) JPS5954257A (en:Method)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61272963A (ja) * 1985-05-28 1986-12-03 Toshiba Corp 半導体装置
JPH01183842A (ja) * 1988-01-19 1989-07-21 Sanyo Electric Co Ltd 半導体集積回路
JPH01232757A (ja) * 1988-03-14 1989-09-18 Sony Corp 半導体装置とその製造方法
JPH01283861A (ja) * 1988-05-10 1989-11-15 Fuji Electric Co Ltd 集積回路装置の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5754360A (en) * 1980-09-18 1982-03-31 Nec Corp Manufacture of semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5754360A (en) * 1980-09-18 1982-03-31 Nec Corp Manufacture of semiconductor device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61272963A (ja) * 1985-05-28 1986-12-03 Toshiba Corp 半導体装置
JPH01183842A (ja) * 1988-01-19 1989-07-21 Sanyo Electric Co Ltd 半導体集積回路
JPH01232757A (ja) * 1988-03-14 1989-09-18 Sony Corp 半導体装置とその製造方法
JPH01283861A (ja) * 1988-05-10 1989-11-15 Fuji Electric Co Ltd 集積回路装置の製造方法

Also Published As

Publication number Publication date
JPH0366815B2 (en:Method) 1991-10-18

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