JPS5949350U - 精密微動装置の移動方向変換装置 - Google Patents

精密微動装置の移動方向変換装置

Info

Publication number
JPS5949350U
JPS5949350U JP14614582U JP14614582U JPS5949350U JP S5949350 U JPS5949350 U JP S5949350U JP 14614582 U JP14614582 U JP 14614582U JP 14614582 U JP14614582 U JP 14614582U JP S5949350 U JPS5949350 U JP S5949350U
Authority
JP
Japan
Prior art keywords
movement
arm
direction changing
drive rod
precision fine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14614582U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6334209Y2 (en:Method
Inventor
上村　英助
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP14614582U priority Critical patent/JPS5949350U/ja
Publication of JPS5949350U publication Critical patent/JPS5949350U/ja
Application granted granted Critical
Publication of JPS6334209Y2 publication Critical patent/JPS6334209Y2/ja
Granted legal-status Critical Current

Links

JP14614582U 1982-09-27 1982-09-27 精密微動装置の移動方向変換装置 Granted JPS5949350U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14614582U JPS5949350U (ja) 1982-09-27 1982-09-27 精密微動装置の移動方向変換装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14614582U JPS5949350U (ja) 1982-09-27 1982-09-27 精密微動装置の移動方向変換装置

Publications (2)

Publication Number Publication Date
JPS5949350U true JPS5949350U (ja) 1984-04-02
JPS6334209Y2 JPS6334209Y2 (en:Method) 1988-09-12

Family

ID=30325391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14614582U Granted JPS5949350U (ja) 1982-09-27 1982-09-27 精密微動装置の移動方向変換装置

Country Status (1)

Country Link
JP (1) JPS5949350U (en:Method)

Also Published As

Publication number Publication date
JPS6334209Y2 (en:Method) 1988-09-12

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