JPS5945557U - 試料の表面分析装置 - Google Patents

試料の表面分析装置

Info

Publication number
JPS5945557U
JPS5945557U JP14152382U JP14152382U JPS5945557U JP S5945557 U JPS5945557 U JP S5945557U JP 14152382 U JP14152382 U JP 14152382U JP 14152382 U JP14152382 U JP 14152382U JP S5945557 U JPS5945557 U JP S5945557U
Authority
JP
Japan
Prior art keywords
sample
analysis device
sample surface
surface analysis
tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14152382U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0338689Y2 (pm
Inventor
最上　明矩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP14152382U priority Critical patent/JPS5945557U/ja
Publication of JPS5945557U publication Critical patent/JPS5945557U/ja
Application granted granted Critical
Publication of JPH0338689Y2 publication Critical patent/JPH0338689Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
JP14152382U 1982-09-18 1982-09-18 試料の表面分析装置 Granted JPS5945557U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14152382U JPS5945557U (ja) 1982-09-18 1982-09-18 試料の表面分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14152382U JPS5945557U (ja) 1982-09-18 1982-09-18 試料の表面分析装置

Publications (2)

Publication Number Publication Date
JPS5945557U true JPS5945557U (ja) 1984-03-26
JPH0338689Y2 JPH0338689Y2 (pm) 1991-08-15

Family

ID=30316507

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14152382U Granted JPS5945557U (ja) 1982-09-18 1982-09-18 試料の表面分析装置

Country Status (1)

Country Link
JP (1) JPS5945557U (pm)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002310961A (ja) * 2001-04-19 2002-10-23 Fujitsu Ltd 深さ方向元素分布測定法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54145061U (pm) * 1978-03-31 1979-10-08

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54145061U (pm) * 1978-03-31 1979-10-08

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002310961A (ja) * 2001-04-19 2002-10-23 Fujitsu Ltd 深さ方向元素分布測定法

Also Published As

Publication number Publication date
JPH0338689Y2 (pm) 1991-08-15

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