JPS5928354A - 静電チヤツク用薄膜 - Google Patents

静電チヤツク用薄膜

Info

Publication number
JPS5928354A
JPS5928354A JP13803882A JP13803882A JPS5928354A JP S5928354 A JPS5928354 A JP S5928354A JP 13803882 A JP13803882 A JP 13803882A JP 13803882 A JP13803882 A JP 13803882A JP S5928354 A JPS5928354 A JP S5928354A
Authority
JP
Japan
Prior art keywords
film
electrostatic chuck
wafer
thin film
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13803882A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0454972B2 (enrdf_load_stackoverflow
Inventor
Yasuhiro Horiike
靖浩 堀池
Takashi Yamazaki
隆 山崎
Haruo Okano
晴雄 岡野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP13803882A priority Critical patent/JPS5928354A/ja
Publication of JPS5928354A publication Critical patent/JPS5928354A/ja
Publication of JPH0454972B2 publication Critical patent/JPH0454972B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP13803882A 1982-08-10 1982-08-10 静電チヤツク用薄膜 Granted JPS5928354A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13803882A JPS5928354A (ja) 1982-08-10 1982-08-10 静電チヤツク用薄膜

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13803882A JPS5928354A (ja) 1982-08-10 1982-08-10 静電チヤツク用薄膜

Publications (2)

Publication Number Publication Date
JPS5928354A true JPS5928354A (ja) 1984-02-15
JPH0454972B2 JPH0454972B2 (enrdf_load_stackoverflow) 1992-09-01

Family

ID=15212575

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13803882A Granted JPS5928354A (ja) 1982-08-10 1982-08-10 静電チヤツク用薄膜

Country Status (1)

Country Link
JP (1) JPS5928354A (enrdf_load_stackoverflow)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6272136A (ja) * 1985-09-25 1987-04-02 Tokyo Electron Ltd 静電チャック
JPS6278846A (ja) * 1985-10-01 1987-04-11 Tokyo Electron Ltd 半導体ウエハ処理装置
JPS6286837A (ja) * 1985-10-14 1987-04-21 Tokyo Electron Ltd ウエハ処理装置
JPS62165929A (ja) * 1986-01-17 1987-07-22 Tokyo Electron Ltd アッシング装置
JPH01227453A (ja) * 1988-03-08 1989-09-11 Fujitsu Ltd ウエーハ搬送具
JPH0227748A (ja) * 1988-07-16 1990-01-30 Tomoegawa Paper Co Ltd 静電チャック装置及びその作成方法
JPH05102289A (ja) * 1991-10-04 1993-04-23 Tomoegawa Paper Co Ltd 静電チヤツク装置の電気的接合方法
US5539179A (en) * 1990-11-17 1996-07-23 Tokyo Electron Limited Electrostatic chuck having a multilayer structure for attracting an object
JP2005064105A (ja) * 2003-08-08 2005-03-10 Tomoegawa Paper Co Ltd 静電チャック装置用電極シート、静電チャック装置および吸着方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3983401A (en) * 1975-03-13 1976-09-28 Electron Beam Microfabrication Corporation Method and apparatus for target support in electron projection systems
JPS55145351A (en) * 1979-04-26 1980-11-12 Zeiss Jena Veb Carl Electrostatic chuck
JPS56171591U (enrdf_load_stackoverflow) * 1980-05-21 1981-12-18

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3983401A (en) * 1975-03-13 1976-09-28 Electron Beam Microfabrication Corporation Method and apparatus for target support in electron projection systems
JPS55145351A (en) * 1979-04-26 1980-11-12 Zeiss Jena Veb Carl Electrostatic chuck
JPS56171591U (enrdf_load_stackoverflow) * 1980-05-21 1981-12-18

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6272136A (ja) * 1985-09-25 1987-04-02 Tokyo Electron Ltd 静電チャック
JPS6278846A (ja) * 1985-10-01 1987-04-11 Tokyo Electron Ltd 半導体ウエハ処理装置
JPS6286837A (ja) * 1985-10-14 1987-04-21 Tokyo Electron Ltd ウエハ処理装置
JPS62165929A (ja) * 1986-01-17 1987-07-22 Tokyo Electron Ltd アッシング装置
JPH01227453A (ja) * 1988-03-08 1989-09-11 Fujitsu Ltd ウエーハ搬送具
JPH0227748A (ja) * 1988-07-16 1990-01-30 Tomoegawa Paper Co Ltd 静電チャック装置及びその作成方法
US5539179A (en) * 1990-11-17 1996-07-23 Tokyo Electron Limited Electrostatic chuck having a multilayer structure for attracting an object
JPH05102289A (ja) * 1991-10-04 1993-04-23 Tomoegawa Paper Co Ltd 静電チヤツク装置の電気的接合方法
JP2005064105A (ja) * 2003-08-08 2005-03-10 Tomoegawa Paper Co Ltd 静電チャック装置用電極シート、静電チャック装置および吸着方法

Also Published As

Publication number Publication date
JPH0454972B2 (enrdf_load_stackoverflow) 1992-09-01

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