JPS5928350A - Metal mold for resin sealed type semiconductor device - Google Patents

Metal mold for resin sealed type semiconductor device

Info

Publication number
JPS5928350A
JPS5928350A JP13831482A JP13831482A JPS5928350A JP S5928350 A JPS5928350 A JP S5928350A JP 13831482 A JP13831482 A JP 13831482A JP 13831482 A JP13831482 A JP 13831482A JP S5928350 A JPS5928350 A JP S5928350A
Authority
JP
Japan
Prior art keywords
metal mold
mold
stamp
marking
recess
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13831482A
Other languages
Japanese (ja)
Inventor
Yuji Matsubara
松原 祐司
Tomoichi Oku
倶一 奥
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP13831482A priority Critical patent/JPS5928350A/en
Publication of JPS5928350A publication Critical patent/JPS5928350A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/565Moulds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17Component parts, details or accessories; Auxiliary operations
    • B29C45/26Moulds
    • B29C45/37Mould cavity walls, i.e. the inner surface forming the mould cavity, e.g. linings
    • B29C45/372Mould cavity walls, i.e. the inner surface forming the mould cavity, e.g. linings provided with means for marking or patterning, e.g. numbering articles
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)

Abstract

PURPOSE:To enable resin sealing with the same metal mold in case of the same outer dimensions, even in the presence of different trade marks, trade names, and manufacturing lot numbers, by a method wherein one or a plurality of markings detachable from the surface side of the metal mold are provided over the entire surface of the main surface of a cavity, i.e., marking surface or at a part thereof. CONSTITUTION:A recess 12 is provided on the main surface of the cavity 13 which composes the metal mold 14, and the marking 11 is installed thereat. The trade mark 25, trade name 26, and lot number 27 are so engraved in this marking 11 in reverse form as to become normal signs at the time of completion; when it is mounted on the metal mold 14, it is fitted by utilizing thermal expansion from a room temperature up to a metal mold temperature of 160-170 deg.C. In other words, the rate of thermal expansion of the marking 11 is increased more than that of the metal mold 14, and the size of the marking 11 at a room temperature is decreased more than that of the recess 12 of the metal mold 14 at an operating temperature. Thus, the marking 11 is fixed in the recess 12, and, when it is removed, cool air is blown, thus decreasing the temperature instantaneously, resulting in the facilitation of removal.

Description

【発明の詳細な説明】 本発明は樹脂封止型半導体装置用金型の改良に関する。[Detailed description of the invention] The present invention relates to improvements in molds for resin-sealed semiconductor devices.

従来、樹脂封止型半導体装置は異なった品種であっても
同じ外形寸法tもつものは同一金型で樹脂封止され1品
名や製造口νトの区別は樹脂封止後にインクで捺印する
ことによって区別されていた。しかし、このような方法
では捺印とインクの乾燥に多大な工数を必要とする欠点
があった。また、取り扱い中に捺印面が他の物と接触す
ると捺印が不鮮明になったシ判読できなくなったジする
欠点があった。また、捺印時に封止樹脂の表面が帯電し
、累子が静電破壊を起こして歩留が低下する欠点があっ
た。このような欠点奮解決するためには金型のキャビテ
イ面に直接商標1品名、製造ロット番号を刻めば樹脂封
止と同時に形成された封止樹脂面の凹凸によってこれら
商標9品名、製造ロット番号が識別されるので上述した
捺印に起因する欠点は全て解決されるが、逆に品名毎に
あるいけ製造ロフト番号毎に金型を作製しなければなら
ず製造原価が非常に高くなるのでこのような方法は実用
的ではなかった。
Conventionally, even if resin-sealed semiconductor devices are of different types, those with the same external dimensions are sealed with resin in the same mold, and the product name and manufacturing number are distinguished by marking with ink after resin sealing. was distinguished by. However, this method has the disadvantage that it requires a large number of steps for stamping and drying the ink. Additionally, if the stamped surface comes into contact with another object during handling, the stamp becomes unclear or illegible. Further, there is a drawback that the surface of the sealing resin becomes electrically charged during stamping, causing electrostatic damage to the cursor, resulting in a decrease in yield. In order to overcome these shortcomings, it is possible to directly engrave the product name and manufacturing lot number on the cavity surface of the mold. This solves all of the drawbacks caused by the stamps mentioned above, but conversely, molds must be made for each product name or manufacturing loft number, which increases manufacturing costs. method was not practical.

本発明の目的は異なった商標1品名、!!!造ロシト番
号であっても同じ外形寸法をもつものは同一金型で樹脂
封止でき、かつ、これら商標9品名。
The purpose of the present invention is to provide different trademarks for one product name,! ! ! Items with the same external dimensions can be resin-sealed using the same mold, even if they have the same external dimensions, and these nine trademarked product names.

製造ロット番号?樹脂封止と同時に形成して従来の捺印
工程?全て無くすことによって捺印に起因する欠点全会
て解決した半導体装置?製造できる金型を提供すること
?目的とする。
Production lot number? Can it be formed at the same time as resin sealing and used in the conventional stamping process? A semiconductor device that solves all the defects caused by stamping by eliminating all of them? Providing molds that can be manufactured? purpose.

上記目的を達成するため本発明は、キャビティの主面(
従来の捺印される面〕の全面又は一部に金W衣面の側か
ら取p付けおよび取りはずしが可能な刻印?1個又は複
数個設けたこと?第一の特徴とする。第二に、該刻印に
は商標1品名、製造ロッ)f表わす番号や記号が咳刻印
表面の凸部又は凹部によって刻まれていることを特徴と
する。
In order to achieve the above object, the present invention provides a main surface (
Is there a stamp that can be attached and removed from the Gold W cloth side on the entire surface or a part of the traditional stamped surface? Have you installed one or more? This is the first characteristic. Second, the stamp is characterized in that a number or symbol representing the trademark, product name, manufacturing lot, etc. is engraved on the surface of the cough stamp by a convex or concave portion.

第三に、刻印の熱膨張率は金型の熱膨張率よりも犬キ<
、刻印は室温から金型の使用温度に達するまでの熱膨張
によりて金型に取り付けられること葡特徴とする。
Third, the thermal expansion coefficient of the stamp is smaller than that of the mold.
The stamp is attached to the mold by thermal expansion from room temperature to the mold's operating temperature.

以下5本発明?図面を用いて詳細に説明する。The following 5 inventions? This will be explained in detail using drawings.

第1図は本発明の実施例ケ示す金型の断面図である。キ
ャビティ13の主面に凹部12’(11−設け。
FIG. 1 is a sectional view of a mold showing an embodiment of the present invention. A recess 12' (11-) is provided on the main surface of the cavity 13.

その凹部12に刻印]lが取ν付けられている。A stamp]l is attached to the recess 12.

第2図は第1図の刻印11の平面図であシ、商標25、
品名26およびロット番号27が刻まれている。この刻
印11の金型14への取ジ伺は方法は刻印11が室温か
ら金をの使用温度(約160〜170°C)に達するま
での熱膨張奮利用して取り付ける方法が最も良い。丁な
わ、ぢ、まず刻印11の熱膨張重金金型14の熱膨張率
よりも大きくする。次に刻印11の室温での太きさは金
型の凹部12の金型使用温度での太キ式よりも小さくし
、刻印11の金型使用温度での大きさくすなわち熱膨張
後の大きさ)は金型の凹部12の金型使用温度での大き
さよりも大きくなるように刻印11と金型の凹部12と
の大きさの関係ケ定める。
Figure 2 is a plan view of the stamp 11 in Figure 1, trademark 25,
Product name 26 and lot number 27 are engraved. The best way to attach the stamp 11 to the mold 14 is to take advantage of the thermal expansion of the stamp 11 from room temperature until it reaches the working temperature of gold (approximately 160 to 170° C.). First, make the thermal expansion coefficient of the stamp 11 larger than the thermal expansion coefficient of the heavy metal mold 14. Next, the thickness of the stamp 11 at room temperature is smaller than the thickness of the recess 12 of the mold at the mold usage temperature, and the size of the stamp 11 at the mold usage temperature, that is, the size after thermal expansion. ) determines the relationship between the size of the stamp 11 and the recess 12 of the mold so that the size is larger than the size of the recess 12 of the mold at the temperature at which the mold is used.

このようにすると刻印11荀凹部12に収納する時点で
は刻印11の方が小さいから容易に収納で@、その後直
ちに刻印11は金型使用温度に達するから熱膨張によっ
て凹部12に固定される。取りはずしは冷たい空気上刻
印11に吹きつけると瞬間的に刻印11の温度が下がる
ので容易に取りはずしかできる。このような構造にすれ
ば商標。
In this way, when the stamp 11 is stored in the recess 12, the stamp 11 is smaller, so it can be easily stored.Then, the stamp 11 immediately reaches the mold operating temperature and is fixed in the recess 12 by thermal expansion. For removal, blowing cold air onto the stamp 11 instantly lowers the temperature of the stamp 11, making it easy to remove. If it is structured like this, it is a trademark.

品名、製造ロット番号が変わるたびに刻印11’に取り
換えるだけで捺印工程の不必要な半導体装置を同一金型
で容易に製造でき、従来の捺印に起因する欠点全会て無
くすことができる。刻印11は熱膨張によって凹部12
に十分に固定されているので樹脂封止後半導体装置を金
型から取りはずす際に刻印11がはずれることはなかっ
た。また刻印11と凹部12との接触する側面の平面度
ヲ十分に上げることによりてこの接触面にレジンフラッ
シュが発生することはなかった。刻印11は第3図に示
すように商標部分351品名部分36゜製造ロット番号
部分37に分割し、更に製造ロット番号も各々分割する
ことによって必要な部分のみケ取り換えることができる
。tた1分割された刻印はi4図に示すように更に外側
を枠48で囲むことによって容易に金型に取り付けるこ
とができる。この場合、金型14と枠48と分割された
刻印41との熱膨張率の関係はこの頴番に太きくし、ま
ず室温と金型使用温度との中間温度で枠48と分割され
た刻印41とilつに固足し2次にその全体の刻印40
を金型の凹部12に取り付ける方法が良い。
By simply replacing the stamp 11' with a stamp 11' each time the product name or production lot number changes, semiconductor devices that do not require a stamping process can be easily manufactured using the same mold, and all defects caused by conventional stamps can be eliminated. The stamp 11 becomes a recess 12 due to thermal expansion.
Since the stamp 11 was sufficiently fixed, the stamp 11 did not come off when the semiconductor device was removed from the mold after resin sealing. Furthermore, by sufficiently increasing the flatness of the side surface where the stamp 11 and the recess 12 come into contact, no resin flash occurs on this contact surface. As shown in FIG. 3, the stamp 11 is divided into a trademark part 351, a product name part 36, and a manufacturing lot number part 37, and by further dividing the manufacturing lot number, only the necessary parts can be replaced. The 1-divided stamp can be easily attached to the mold by surrounding the outside with a frame 48 as shown in Figure i4. In this case, the relationship between the thermal expansion coefficients of the mold 14, the frame 48, and the divided stamp 41 is set to this number, and first, the frame 48 and the divided stamp 41 are set at an intermediate temperature between room temperature and the mold operating temperature. And secondly, the entire imprint 40
A good method is to attach it to the recess 12 of the mold.

本発明の金型は必ずしも商標1品名、製造ロフト番号の
全て?取り換え可能な刻印にする必要はなく1例えば商
標は金型のキャビテイ面に直接刻んでもよい。また、刻
印11i取シ付けた後のキャビテイ面は必ずしも同一平
面でなくても良く。
Does the mold of the present invention necessarily have one trademark, product name, and manufacturing loft number? There is no need for the marking to be replaceable; for example, the trademark may be engraved directly on the cavity surface of the mold. Moreover, the cavity surfaces after the stamp 11i are attached do not necessarily have to be on the same plane.

例えば刻印11が多少用ていても良い。また、商標9品
名、製造ロット番号は刻印の凹部で形成しても凸部で形
成しても良い。
For example, some markings 11 may be used. Further, the trademark 9 product name and production lot number may be formed by a concave portion or a convex portion of the stamp.

【図面の簡単な説明】 第1図は本発明の実施例を示す刻印が取り付けられた金
型を示す断面図である。第2図は刻印の平面図、第3図
は分割された刻印の平面図、第4図は分割された刻印が
枠によって囲まれて全体として1つの刻印を形成してい
る平面図である。 尚、図において、11,31.41・・・・・・刻印、
12・・・・・・金型の凹部、13・・・・・・キャビ
ティ、14・・・・・・金型、25・・・・・・商標%
 26・・・・・・品名、27・・・・・・製造ロフト
番号、35.36.37.45.46゜47・・・・・
・分割された刻印、48・・・・・・枠、40・・・・
・・枠と分割され之刻印が1つに合わさった刻印である
も 茅 1 図 半2侶
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a sectional view showing a mold to which a stamp is attached, showing an embodiment of the present invention. FIG. 2 is a plan view of the stamp, FIG. 3 is a plan view of the divided stamp, and FIG. 4 is a plan view of the divided stamp surrounded by a frame to form one stamp as a whole. In addition, in the figure, 11, 31. 41... stamped,
12...Mold recess, 13...Cavity, 14...Mold, 25...Trademark%
26...Product name, 27...Manufacturing loft number, 35.36.37.45.46゜47...
・Divided stamp, 48... Frame, 40...
...It is a stamp that is divided into a frame and is combined into one.

Claims (1)

【特許請求の範囲】 <1)  樹脂封止型半導体装置用金型において、キャ
ビティの主面の全面又は一部に金型表面の側から取り付
けおよび取シはすしが可能な刻印に1個又は複数個設け
たことt特徴とする樹脂封止型半導体装置用金型。 (2)該刻印には商標、又は品名、又は製造ロフトを表
わす番号又は記号が該刻印表面の凸部又は凹部によって
刻まれていることを特徴とする特許請求の範囲第(1)
項記載の樹脂封止型半導体装置用金型。 (3)被刻印の熱膨張率は該金型の熱膨張率よりも大き
く、該刻印は熱膨張によって該金型に取り付けられる構
造であることt特徴とする特許請求の範囲第(1)項又
は第(2)項記載の樹脂封止型半導体装置用金型。
[Scope of Claims] <1) In a mold for a resin-sealed semiconductor device, one or more stamps are attached to the entire or part of the main surface of the cavity from the mold surface side, and a removable marking is provided. A mold for a resin-sealed semiconductor device characterized by having a plurality of molds. (2) Claim (1) characterized in that the stamp is engraved with a trademark, a product name, or a number or symbol representing the manufacturing loft by a convex portion or a concave portion on the surface of the stamp.
A mold for a resin-sealed semiconductor device as described in 2. (3) Claim (1) characterized in that the coefficient of thermal expansion of the stamped object is larger than the coefficient of thermal expansion of the mold, and the stamp is attached to the mold by thermal expansion. Or the mold for a resin-sealed semiconductor device according to item (2).
JP13831482A 1982-08-09 1982-08-09 Metal mold for resin sealed type semiconductor device Pending JPS5928350A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13831482A JPS5928350A (en) 1982-08-09 1982-08-09 Metal mold for resin sealed type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13831482A JPS5928350A (en) 1982-08-09 1982-08-09 Metal mold for resin sealed type semiconductor device

Publications (1)

Publication Number Publication Date
JPS5928350A true JPS5928350A (en) 1984-02-15

Family

ID=15218991

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13831482A Pending JPS5928350A (en) 1982-08-09 1982-08-09 Metal mold for resin sealed type semiconductor device

Country Status (1)

Country Link
JP (1) JPS5928350A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02205042A (en) * 1989-02-02 1990-08-14 Nec Kyushu Ltd Resin sealing mold for semiconductor device
US5153052A (en) * 1987-11-27 1992-10-06 Nifco, Inc. Double-shot molded resin article
EP0756925A1 (en) * 1995-08-04 1997-02-05 Matsushita Electronics Corporation Resin sealing die, resin-sealed-type semiconductor device and method of manufacturing the device
WO1997031394A1 (en) * 1996-02-22 1997-08-28 Nitto Denko Corporation Semiconductor device and method for manufacturing the same
EP0935287A3 (en) * 1998-02-09 2000-05-03 Sharp Kabushiki Kaisha Molding die and marking method for semiconductor devices

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5153052A (en) * 1987-11-27 1992-10-06 Nifco, Inc. Double-shot molded resin article
JPH02205042A (en) * 1989-02-02 1990-08-14 Nec Kyushu Ltd Resin sealing mold for semiconductor device
EP0756925A1 (en) * 1995-08-04 1997-02-05 Matsushita Electronics Corporation Resin sealing die, resin-sealed-type semiconductor device and method of manufacturing the device
US5817208A (en) * 1995-08-04 1998-10-06 Matsushita Electronics Corporation Resin sealing die, resin-sealed-type semiconductor device and method of manufacturing the device
WO1997031394A1 (en) * 1996-02-22 1997-08-28 Nitto Denko Corporation Semiconductor device and method for manufacturing the same
US6144108A (en) * 1996-02-22 2000-11-07 Nitto Denko Corporation Semiconductor device and method of fabricating the same
EP0935287A3 (en) * 1998-02-09 2000-05-03 Sharp Kabushiki Kaisha Molding die and marking method for semiconductor devices
US6270712B1 (en) 1998-02-09 2001-08-07 Sharp Kabushiki Kaisha Molding die and marking method for semiconductor devices

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