JPS59213186A - Laser oscillator - Google Patents

Abstract

PURPOSE:To prevent the leak-in of the other gas to laser gas and prevent the decrease of the pressure of the laser gas due to the leakout of said gas in an oscillator body to outside by a method wherein a space whose pressure is kept lower than the pressure in said body is provided between said body and an outer case wherein this body is contained. CONSTITUTION:The outer case 9 is so constructed as to completely encircle said body 1, and so adjusted in such a manner that the pressure becomes lower than the gas pressure in said body 1 by means of a pump 12 for exhausting the gass of the space 8 between said case 9 and said body 1. When the gas pressure increases by the generation of leak-in of gas from outside the case 9 and the body 1, the exhaust pump 12 is operated by the first pressure detector 11 until the gas pressure becomes prescribed. When the pressure of the laser gas 5 in said body 1 decreases, it is detected by the second pressure detector 13, injecting a new laser gas to said body 1 from a laser gas bomb 14, and accordingly the laser gas pressure in the body 1 is kept constant.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a laser oscillator, and more particularly to a laser oscillator having an oscillator body filled with laser gas at a constant pressure.

Conventionally, there has been a device of this type as shown in FIG.

In the figure, a partially transmitting mirror 1 and a total reflecting mirror 3 are provided on opposite walls of the oscillator main body 1, and a pressure discharge tube is arranged between them.
A blower 6 for circulating the laser gas 3 filled in the oscillator body 1 and a cooler 7 for cooling the laser gas S are housed within the oscillator body.

With the above configuration, the laser gas S in the oscillator body l is excited by the discharge of the discharge tube, and the radar light amplified between the partially transmitting mirror λ and the total reflecting mirror 3 passes through the partially transmitting mirror l. released outside.

On the other hand, the laser gas S heated by the discharge is transferred to the cooler 7.
cooled by The blower 6 circulates the laser gas and promotes the cooling effect of the laser gas j. At this time, the laser gas pressure is kept at a low pressure (compared to the atmosphere).

Furthermore, in order to inspect the parts inside the oscillator body 1, the oscillator body 1 has a structure that can be disassembled using seven lunges or the like.

However, in the conventional laser oscillator with the above configuration, it is difficult to maintain airtightness between the oscillator body/exterior and interior because there are 7 runs, 9 parts, wiring for the blower 6, cooler 7, etc., and connections to the outside of the piping. When this happens, outside air is injected into the oscillator main body/inside, the composition of the laser gas S changes, the pressure increases, and as a result, the laser output decreases.

This invention was made to eliminate the drawbacks of the conventional ones as described above.The oscillator has a double structure, and the space between the outer box and the oscillator body inside the box is kept at a pressure lower than the laser gas pressure. It is an object of the present invention to provide a laser oscillator that prevents other gases from being injected into the oscillator body from the outside and prevents a drop in pressure of the laser gas due to leakage of the laser gas inside the oscillator body to the outside. It is something to do.

Hereinafter, one embodiment of the present invention will be described with reference to the first trap.

In the figure, an outer box 9 is provided to enclose the oscillator main body 1 with an appropriate space g formed between the oscillator main body 1 and the oscillator main body 1, and a window 10 for taking out the laser beam is provided in the outer box 9. A first pressure sensor // which detects the pressure in the space g gives a command signal to the exhaust pump // which discharges the gas in the space g to the outside. Fifth pressure detector/3 for detecting gas pressure inside the oscillator body/
controls the electromagnetic valve /S of the laser gas cylinder III to adjust the laser gas pressure inside the generator body.

Other parts that are the same as those in FIG. 1 are designated by the same reference numerals, and their explanations will be omitted.

Next, the operation will be explained. The laser gas in the oscillator body is excited by the discharge of the discharge tube, and the laser beam amplified between the partially transmitting mirror 1 and the total reflecting mirror 3 is emitted through the partially transmitting mirror 10 and the window 10. The outer box 9 is configured to completely enclose the oscillator main body l.
The gas in the space g between the oscillator body 1 and the oscillator body 1 is adjusted to be lower than the gas pressure inside the oscillator body l by the exhaust pump lΩ. When gas is injected from the outside of the outer box t and the oscillator body and the gas pressure rises, the exhaust pump 12 is operated by the first pressure detector until the specified gas pressure is reached again. .When the pressure decreases due to leakage of the laser gas star inside the oscillator body, this pressure decrease is detected by the first pressure detector /3, and the solenoid valve /S
The new laser gas is injected from the laser gas cylinder 41 into the oscillator body to maintain a constant laser gas pressure inside the oscillator body.

As described above, according to the present invention, there is a space around the oscillator body whose pressure is lower than the pressure inside the oscillator body, so that there is no air injected into the oscillator body from the outside.

Further pressure, or conversely, new laser gas is injected to replenish gas leaking into a space with low pressure, so the laser gas pressure remains constant and the gas composition can also be kept constant, preventing a drop in laser output. It has the effect of

[Brief explanation of the drawing]

FIG. 1 is a schematic front sectional view of a conventional device, and FIG. 1 is a schematic front sectional view of an embodiment of the present invention. /...Oscillator body, λ...Partially transmitting mirror, 3...Total reflection mirror, y...Discharge tube, S...Laser gas, 6...Blower,
7. Cooler, 8. Space, Ri... Outer box, 10. Window, //. First pressure detector, /2.. Exhaust pump, /3.. First pressure detector. , /</... Laser gas cylinder, /S... Solenoid valve. In each figure, the same reference numerals indicate the same or corresponding parts. Agent Masuo Oiwa

Claims (1)

[Scope of Claims] (1) An oscillator body containing laser gas, a sealed outer box housing the oscillator body, and a laser oscillator comprising the above. (,2) Claim 7, comprising: a first pressure detector that detects the pressure in the space; and an exhaust pump connected to the space and operated by a signal from the first pressure detector. laser oscillator. (3) A second pressure detector for detecting the pressure inside the oscillator body, and an electromagnetic valve for replenishing the oscillator body with laser gas based on a signal from the pressure detector. laser oscillator.