JPS59182219A - 重積式製造皿 - Google Patents

重積式製造皿

Info

Publication number
JPS59182219A
JPS59182219A JP5659283A JP5659283A JPS59182219A JP S59182219 A JPS59182219 A JP S59182219A JP 5659283 A JP5659283 A JP 5659283A JP 5659283 A JP5659283 A JP 5659283A JP S59182219 A JPS59182219 A JP S59182219A
Authority
JP
Japan
Prior art keywords
wafer
hole
dish
melt
lid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5659283A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0314769B2 (en:Method
Inventor
Takashi Yokoyama
敬志 横山
Ichiro Hide
一郎 秀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoxan Corp
Hokusan Co Ltd
Original Assignee
Hoxan Corp
Hokusan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoxan Corp, Hokusan Co Ltd filed Critical Hoxan Corp
Priority to JP5659283A priority Critical patent/JPS59182219A/ja
Priority to AU26132/84A priority patent/AU578240B2/en
Priority to DE8484302211T priority patent/DE3466901D1/de
Priority to EP84302211A priority patent/EP0124284B1/en
Publication of JPS59182219A publication Critical patent/JPS59182219A/ja
Priority to US06/926,131 priority patent/US4820145A/en
Publication of JPH0314769B2 publication Critical patent/JPH0314769B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP5659283A 1983-03-30 1983-03-31 重積式製造皿 Granted JPS59182219A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP5659283A JPS59182219A (ja) 1983-03-31 1983-03-31 重積式製造皿
AU26132/84A AU578240B2 (en) 1983-03-30 1984-03-27 Polycrystalline silicon wafers and fabrication tray
DE8484302211T DE3466901D1 (en) 1983-03-30 1984-03-30 Method of fabricating polycrystalline silicon wafer and fabrication tray used therefor
EP84302211A EP0124284B1 (en) 1983-03-30 1984-03-30 Method of fabricating polycrystalline silicon wafer and fabrication tray used therefor
US06/926,131 US4820145A (en) 1983-03-30 1986-11-03 Polycrystalline silicon wafer tray

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5659283A JPS59182219A (ja) 1983-03-31 1983-03-31 重積式製造皿

Publications (2)

Publication Number Publication Date
JPS59182219A true JPS59182219A (ja) 1984-10-17
JPH0314769B2 JPH0314769B2 (en:Method) 1991-02-27

Family

ID=13031462

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5659283A Granted JPS59182219A (ja) 1983-03-30 1983-03-31 重積式製造皿

Country Status (1)

Country Link
JP (1) JPS59182219A (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61214422A (ja) * 1985-03-20 1986-09-24 Hoxan Corp 半導体ウエハに多結晶シリコン層を形成する方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61214422A (ja) * 1985-03-20 1986-09-24 Hoxan Corp 半導体ウエハに多結晶シリコン層を形成する方法

Also Published As

Publication number Publication date
JPH0314769B2 (en:Method) 1991-02-27

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