JPS59139656A - High dielectric strength resin package type semiconductor device - Google Patents

High dielectric strength resin package type semiconductor device

Info

Publication number
JPS59139656A
JPS59139656A JP1271683A JP1271683A JPS59139656A JP S59139656 A JPS59139656 A JP S59139656A JP 1271683 A JP1271683 A JP 1271683A JP 1271683 A JP1271683 A JP 1271683A JP S59139656 A JPS59139656 A JP S59139656A
Authority
JP
Japan
Prior art keywords
hole
header
mounting
resin package
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1271683A
Other languages
Japanese (ja)
Inventor
Usuke Enomoto
榎本 宇佑
Masao Yamaguchi
正男 山口
Ryuichi Ikezawa
池沢 隆一
Nobukatsu Tanaka
信克 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1271683A priority Critical patent/JPS59139656A/en
Publication of JPS59139656A publication Critical patent/JPS59139656A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/40Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
    • H01L23/4006Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Abstract

PURPOSE:To increase dielectric strength without changing the size of a hole for mounting by making the inner diameter of the hole larger than other sections in a back section reverse to the main surface of the hole formed to a header. CONSTITUTION:A hole 4 for mounting for inserting a screw 3 used when a power transistor 13 is set up to a radiator plate 12 in an insulating manner through a mica plate 1 is formed to the power transistor 13. The hole penetrates a resin package 7 and a header 6. A hole 8, a diameter thereof is larger than the hole 4 for mounting, is formed concentrically to the hole section for mounting of the header 6. The hole 8 is formed in a safety hole 16, a diameter thereof is further made larger, on the mounting surface side reverse to the main surface of the header 6. The safety hole 16 is approximately 0.5mm. deep and is made larger than the hole 8 by approximately 4mm.. Sections among the hole 8, the safety hole 16 and the hole 4 for mounting are buried with a resin in a molding on the formation of the resin package to form a dielectric-strength maintaining layer 9.

Description

【発明の詳細な説明】 本発明は高耐圧レジンパッケージ型半導体装置、たとえ
ば高耐圧レジンパワートランジスタに関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a high voltage resin packaged semiconductor device, such as a high voltage resin power transistor.

レジンパッケージ型パワートランジスタ(レジンパワー
トランジスタ)は、第1図で示すように、チップ5が主
面で固定さねているヘッダ10をマイカ板1を介して放
熱板2に絶縁的に取り付け、ビスを用いて固定する構造
を有する。このためビス3を挿入する取付用孔4はチッ
プ5を固定するへ・ラダ6と、このヘッダ6の主面にチ
ップ5を被うように設けられるレジンパッケージ7とを
貫通するように設けられている。また、ヘッダ6とビス
3との絶縁性を維持させるために、へ・ラダ6には取付
用孔4と同心円となる孔8をヘッダ6に設け、レジンパ
ッケージングの際にこの孔8と取付用孔4との間にドー
ナツ状にレジンkHし込んで耐圧維持層9を設けている
。なお、図中10はリード、11はリード10の内端と
チップ5の電極とを接続する導電性のワイヤ、12はビ
ス3に螺合されてパワートランジスタ13を放熱板2に
固定するナンドである。
As shown in FIG. 1, a resin packaged power transistor (resin power transistor) is constructed by insulatingly attaching a header 10, on which a chip 5 is fixed on its main surface, to a heat sink 2 via a mica plate 1. It has a structure that is fixed using. Therefore, the mounting hole 4 into which the screw 3 is inserted is provided so as to pass through the ladder 6 for fixing the chip 5 and the resin package 7 provided on the main surface of the header 6 so as to cover the chip 5. ing. In addition, in order to maintain the insulation between the header 6 and the screws 3, a hole 8 that is concentric with the mounting hole 4 is provided in the header 6, and the hole 8 and the mounting hole 8 are provided in the header 6 during resin packaging. A pressure-resistant maintenance layer 9 is provided by injecting resin kHz into the hole 4 in a donut shape. In the figure, 10 is a lead, 11 is a conductive wire that connects the inner end of the lead 10 and the electrode of the chip 5, and 12 is a NAND that is screwed into the screw 3 to fix the power transistor 13 to the heat sink 2. be.

しかし、このような構造では耐圧に問題があることがわ
かった。すなわち、前記耐圧維持層9の厚さはパワート
ランジスタ13の耐圧値に対応して決定されるので本来
は耐圧不良は生じない筈である。しかし、第2図に水子
ように、ミクロ的に観察すれば孔8の縁部分は凹凸が激
しい。また、この孔8けプレスによって打ち抜いて形成
される。
However, it has been found that such a structure has a problem with voltage resistance. That is, since the thickness of the breakdown voltage maintenance layer 9 is determined in accordance with the breakdown voltage value of the power transistor 13, a breakdown voltage failure should not occur. However, as shown in FIG. 2, when observed microscopically, the edges of the holes 8 are extremely uneven. Further, it is formed by punching with this 8-hole press.

このため、打ち抜きばシと呼ぶ長い突起14も孔8の周
縁部に存在し、実際の絶縁間隔lは設計値りよシも短か
くなってしまう。また、これら突起先端部では電界集中
が生じて放電、し易くなシ耐圧の低下を来たしてしまう
For this reason, a long protrusion 14 called a punching hole is also present at the periphery of the hole 8, and the actual insulation interval l is shorter than the design value. In addition, electric field concentration occurs at the tips of these protrusions, making it easy to discharge and lowering the withstand voltage.

一方、このような耐圧似下防止のために、ヘッダ6に設
ける孔8の内径を大きくする構造もあるが、孔8f:大
きくするとヘッダ6に取シ付けることのできるチップ5
の大きさも小さくなっタリ、あるいけパワートランジス
タ130寸法が大型化する不都合が生じる。
On the other hand, there is a structure in which the inner diameter of the hole 8 provided in the header 6 is increased in order to prevent such a drop in withstand pressure.
As a result, the size of the power transistor 130 becomes smaller, resulting in an inconvenience that the dimensions of the power transistor 130 become larger.

したがって、本発明の目的は取付用孔の寸法を変えるこ
となく耐圧性を高めることができる高耐圧レジンパッケ
ージ型半導体装置を提供することにある。
Therefore, an object of the present invention is to provide a high-voltage resin-packaged semiconductor device that can improve pressure resistance without changing the dimensions of the mounting hole.

以下、実施例によシ本発明を説明する。The present invention will be explained below with reference to Examples.

第3図は本発明の一実施しI]による高耐圧レジンパワ
ートランジスタを示す断面図、第4図は第3図のIV−
Tl/線に沿う断面図である。
FIG. 3 is a cross-sectional view showing a high voltage resin power transistor according to one embodiment of the present invention, and FIG.
FIG. 3 is a cross-sectional view taken along the Tl/ line.

パワートランジスタ13は金属製ヘッダ6と、このヘッ
ダ6の主面に取p付けたチップ5と、このヘッダ6の主
面に設けられ前記チップ5を被うレジンからなるレジン
パッケージ7と、ヘッダ6の一端から延在する1本のリ
ード10およびこのリード10の両側にそれぞれ平行と
なって延在する1本ずつのリード10と、前記両側のリ
ード10の内端とチップ5の電極とを接続する導電性の
ワイヤ11と、からなっている。前言己リード10の外
端はレジンパッケージ7から突出し、その突出部は接続
端子となっている。また、レジンパッケージ7はヘッダ
6の主面側に設けられることからヘッダ6から剥離し易
い。そこで、第4図に示すように、ヘッダ6の側面には
コイニングによって形成される突起15が設けられ、レ
ジンパッケージ7の一部がこの突起15に喰い込んで剥
離し難いようになっている。
The power transistor 13 includes a metal header 6, a chip 5 attached to the main surface of the header 6, a resin package 7 made of resin provided on the main surface of the header 6 and covering the chip 5, and the header 6. One lead 10 extending from one end and one lead 10 extending parallel to each side of this lead 10, and the inner ends of the leads 10 on both sides and the electrodes of the chip 5 are connected. It consists of a conductive wire 11. The outer end of the lead 10 protrudes from the resin package 7, and the protruding portion serves as a connection terminal. Further, since the resin package 7 is provided on the main surface side of the header 6, it is easily peeled off from the header 6. Therefore, as shown in FIG. 4, a protrusion 15 formed by coining is provided on the side surface of the header 6, so that a portion of the resin package 7 is bitten into the protrusion 15 and is difficult to separate.

一方、このパワートランジスタ13には放熱板12にマ
イカ枦1を介して絶縁的に取9個ける除用いるビス3挿
入用の取付用孔4が設けられている。この取付用孔4は
レジンパッケージ7おまひヘッダ6を貫通している。ま
た、ヘッダ6の取付用孔部分には取付用孔4よりも直径
が大きい孔8が同心円的に設けられている。この孔8は
ヘッダ6の主面とは逆となる取付面側ではさらにその直
径が大きな安全孔16となっている。この安全孔16は
後述する耐圧維持層のレジンが割れて脱落しないための
埋さが必要なことから0.5mm程度の深さでかつ孔8
よシけ4mm程度大きくなっていて、たとえばコイニン
グによって形成される。そして、孔8および安全孔16
と取付用孔4との間はレジンパッケージ形成時のモール
ドにおいてレジンで埋められて耐圧維持層9となる。ま
た、孔8と取付用孔4に亘る部分の耐圧維持層9の厚さ
はたとえば1〜15聴となシ、約1800〜200Qv
の高耐圧にも充分耐えるようになっている。
On the other hand, in the power transistor 13, a mounting hole 4 for inserting nine screws 3, which can be removed insulatively, is provided in the heat sink 12 through a mica shell 1. This mounting hole 4 passes through the resin package 7 and the header 6. Further, a hole 8 having a diameter larger than that of the mounting hole 4 is provided concentrically in the mounting hole portion of the header 6. This hole 8 becomes a safety hole 16 with a larger diameter on the mounting surface side opposite to the main surface of the header 6. This safety hole 16 needs to be filled to prevent the resin of the pressure-resistant maintenance layer from cracking and falling off, which will be described later.
The recess is about 4 mm larger and is formed, for example, by coining. And hole 8 and safety hole 16
The space between the mounting hole 4 and the mounting hole 4 is filled with resin to form a pressure-resistant maintaining layer 9 in a mold when forming a resin package. Further, the thickness of the pressure-resistant maintenance layer 9 in the portion extending between the hole 8 and the mounting hole 4 is, for example, 1 to 15 Qv, and approximately 1800 to 200 Qv.
It is designed to withstand high pressure resistance.

このようなパワートランジスタ13はその実装におって
は、放熱板2上にマイカ板1を介して載置され、ビス3
およびナヴト12によって固定される。
In mounting, such a power transistor 13 is placed on a heat sink 2 with a mica plate 1 in between, and screws 3
and fixed by Navut 12.

コノパワートランジスタ13はその取付面側ではビス3
とヘッダ縁との間隔aは孔8とビス3との間隔りよシも
広くなる。この結果、ビシ3とヘッダ6との縁面距離は
従来品よシも長くなることから、耐圧は高くなる。した
がって、1800〜2000Vと極めて高耐圧を保証す
るパワートランジスタにおいても、耐圧不良は生じなく
なる。
The cono power transistor 13 has screws 3 on its mounting surface side.
The distance a between the hole 8 and the header edge is also wider than the distance between the hole 8 and the screw 3. As a result, the edge distance between the bridge 3 and the header 6 is longer than that of the conventional product, so that the withstand voltage is increased. Therefore, even in a power transistor that guarantees an extremely high breakdown voltage of 1800 to 2000V, breakdown voltage failures will not occur.

着た、この実施例では、安全孔16に入シ込んだ耐圧維
持層9部分が孔8を構成するヘッダ部分に引っ掛るため
、レジンパッケージ7がへラダ6゛から剥離し難くなシ
、耐滞性の向上も図れる。
In this embodiment, the part of the pressure-resistant maintenance layer 9 that has entered the safety hole 16 is caught on the header part that constitutes the hole 8, so that the resin package 7 is not easily peeled off from the header 6'. It can also improve retention.

なお、本発明は前記実施例に限定されない。たとえば、
第5図に示すように、安全孔16は孔8の縁部分をコイ
ニングによって埋し潰し、円錐状孔としてもよい。この
構造も前記実施例と同様に1高耐圧を維持でき、かつ耐
湿性の向上も図ることができる。
Note that the present invention is not limited to the above embodiments. for example,
As shown in FIG. 5, the safety hole 16 may be formed by filling the edge of the hole 8 with coining to form a conical hole. This structure can also maintain a high withstand voltage as in the above embodiment, and can also improve moisture resistance.

本発明はトランジスタ以外の他の電子部品にも適用でき
る。
The present invention can also be applied to electronic components other than transistors.

以上のように、本発明によれば実装時に用いる取付用孔
を変化させることなく高耐圧を給持できる耐湿性の優れ
た高耐圧レジンバ・ンケージ型半導体装置を提供するこ
とができる。
As described above, according to the present invention, it is possible to provide a high voltage resin cage type semiconductor device with excellent moisture resistance and which can supply a high voltage resistance without changing the mounting holes used during mounting.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来のパワートランジスタを示す断面図、 第2図は同じく耐圧不良状態を示す一部の断面図、 第3図は本発明の一実施例によるパワートランジスタの
断面図、 第4図は第3図の■−tvtwに沿う断面図、第5図は
本発明の他の実施例によるパワートランジスタの断面図
である。 1・・・マイカ板、2・・・放熱板、3・・・ピヌ、4
・・・取付用孔、5・・・チップ、6・・・へ・ンダ、
7・・・レジンパッケージ、8・・・孔、9・・・耐圧
維持層、12・・・ナツト、13・・・パワートランジ
スタ、14・・・打ち抜きばυ、16・・・安全孔。
FIG. 1 is a cross-sectional view showing a conventional power transistor, FIG. 2 is a partial cross-sectional view similarly showing a breakdown voltage failure state, FIG. 3 is a cross-sectional view of a power transistor according to an embodiment of the present invention, and FIG. 4 is a cross-sectional view of a power transistor according to an embodiment of the present invention. FIG. 3 is a cross-sectional view taken along the line {circle around (2)-tvtw}, and FIG. 5 is a cross-sectional view of a power transistor according to another embodiment of the present invention. 1... Mica board, 2... Heat sink, 3... Pinu, 4
...Mounting hole, 5...Chip, 6...To/under,
7... Resin package, 8... Hole, 9... Withstand voltage maintenance layer, 12... Nut, 13... Power transistor, 14... Punching υ, 16... Safety hole.

Claims (1)

【特許請求の範囲】[Claims] ■、ヘッダと、このヘッダの主面ヲ被つレジンパッケー
ジと、このレジンパッケージで被われかつヘッダの主面
に取シ伺けられたチップと、前記レジンパッケージとヘ
ッダとを貫通して設けられた取付用孔と、を有し、前記
ヘッダには取付用孔と同心円となる孔が設けられ、この
孔と取付用孔との間はレジンからなる耐圧維持層で埋め
られている高耐圧レジンパッケージ型半導体装置におい
て、前記ヘッダに設けられた孔の主面とは逆となる裏面
部分では孔の内径が他の部分よシも大きくなっているこ
とを特徴とする高耐圧レジンノンケージ型半導体装置。
(2) A header, a resin package covering the main surface of the header, a chip covered by the resin package and mounted on the main surface of the header, and a chip provided passing through the resin package and the header. The header has a hole that is concentric with the mounting hole, and the space between the hole and the mounting hole is filled with a pressure-resistant maintenance layer made of resin. A high-voltage resin non-cage type semiconductor device in a packaged semiconductor device, characterized in that the inner diameter of the hole is larger on the back side opposite to the main surface of the hole provided in the header than on other parts. Device.
JP1271683A 1983-01-31 1983-01-31 High dielectric strength resin package type semiconductor device Pending JPS59139656A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1271683A JPS59139656A (en) 1983-01-31 1983-01-31 High dielectric strength resin package type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1271683A JPS59139656A (en) 1983-01-31 1983-01-31 High dielectric strength resin package type semiconductor device

Publications (1)

Publication Number Publication Date
JPS59139656A true JPS59139656A (en) 1984-08-10

Family

ID=11813151

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1271683A Pending JPS59139656A (en) 1983-01-31 1983-01-31 High dielectric strength resin package type semiconductor device

Country Status (1)

Country Link
JP (1) JPS59139656A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8258622B2 (en) * 2007-02-28 2012-09-04 Fairchild Korea Semiconductor, Ltd. Power device package and semiconductor package mold for fabricating the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8258622B2 (en) * 2007-02-28 2012-09-04 Fairchild Korea Semiconductor, Ltd. Power device package and semiconductor package mold for fabricating the same

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