JPS59130420A - 熱処理治具の插入取出し装置 - Google Patents

熱処理治具の插入取出し装置

Info

Publication number
JPS59130420A
JPS59130420A JP58222011A JP22201183A JPS59130420A JP S59130420 A JPS59130420 A JP S59130420A JP 58222011 A JP58222011 A JP 58222011A JP 22201183 A JP22201183 A JP 22201183A JP S59130420 A JPS59130420 A JP S59130420A
Authority
JP
Japan
Prior art keywords
jig
wafer
heat treatment
rod
inner tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58222011A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6235261B2 (https=
Inventor
Masakuni Akiba
秋葉　政邦
Hiroto Nagatomo
長友　宏人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58222011A priority Critical patent/JPS59130420A/ja
Publication of JPS59130420A publication Critical patent/JPS59130420A/ja
Publication of JPS6235261B2 publication Critical patent/JPS6235261B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3311—Horizontal transfer of a batch of workpieces
JP58222011A 1983-11-28 1983-11-28 熱処理治具の插入取出し装置 Granted JPS59130420A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58222011A JPS59130420A (ja) 1983-11-28 1983-11-28 熱処理治具の插入取出し装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58222011A JPS59130420A (ja) 1983-11-28 1983-11-28 熱処理治具の插入取出し装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP4445677A Division JPS53129964A (en) 1977-04-20 1977-04-20 Method and device for inserting and taking out of heat treatment jig

Publications (2)

Publication Number Publication Date
JPS59130420A true JPS59130420A (ja) 1984-07-27
JPS6235261B2 JPS6235261B2 (https=) 1987-07-31

Family

ID=16775705

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58222011A Granted JPS59130420A (ja) 1983-11-28 1983-11-28 熱処理治具の插入取出し装置

Country Status (1)

Country Link
JP (1) JPS59130420A (https=)

Also Published As

Publication number Publication date
JPS6235261B2 (https=) 1987-07-31

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