JPS59125056U - scanning electron microscope - Google Patents
scanning electron microscopeInfo
- Publication number
- JPS59125056U JPS59125056U JP1873083U JP1873083U JPS59125056U JP S59125056 U JPS59125056 U JP S59125056U JP 1873083 U JP1873083 U JP 1873083U JP 1873083 U JP1873083 U JP 1873083U JP S59125056 U JPS59125056 U JP S59125056U
- Authority
- JP
- Japan
- Prior art keywords
- scanning
- sample
- switching
- electron beam
- electron microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施例の概略を示すための図、第２
図は入力装置に備えられた指示スイッチを説明するため
の図、第３図は第１図の各回路の出力信号を例示するた
めの図である。
１：電子銃、２：電子線、３：集束レンズ、４：試料、
５：試料ステージ、６Ｘ、 ６Ｙ：モ−１ｙ、７：偏
向コイル、８：走査信号発生回路、＄ａ、 ５ｂ：時
定数設定回路、８Ｃ：時定数切換回路、９，１５：増幅
器、１０：陰極線管、１１：制御回路、１２：駆動回路
、１３：入力装置、１３ａ、 １３ｂ、 １３Ｃ。
１３Ｃ：指示スイッチ。Figure 1 is a diagram showing an outline of an embodiment of the present invention;
The figure is a diagram for explaining the instruction switch provided in the input device, and FIG. 3 is a diagram for illustrating the output signals of each circuit in FIG. 1. 1: Electron gun, 2: Electron beam, 3: Focusing lens, 4: Sample,
5: Sample stage, 6X, 6Y: Mo-1y, 7: Deflection coil, 8: Scanning signal generation circuit, $a, 5b: Time constant setting circuit, 8C: Time constant switching circuit, 9, 15: Amplifier, 10: Cathode ray tube, 11: control circuit, 12: drive circuit, 13: input device, 13a, 13b, 13C. 13C: Instruction switch.
Claims (1)
を試料面上において二次元的に走査するための手段と、
該走査手段による電子線の走査に伴って得られた信号を
該走査に同期走査される陰極線管に導いて試料像を表示
する手段と、該陰極線管に表示される視野を切換えるた
めに前記試料を移動又は回転させるための試料駆動手段
とを備えた装置において、一画面を走査するのに要する
時間が長短具なる少くとも２モードの間で前記走査手段
による走査を切換えるための手段と、前記試料駆動手段
の稼動に連動して該切換手段を切換え、試料の移動又は
回転中は自動的に短時間走査モードにするための手段と
を具備することを特徴とする走査電子顕微鏡。means for narrowing the electron beam from the electron gun; means for two-dimensionally scanning the electron beam on the sample surface;
means for displaying a sample image by guiding a signal obtained as the electron beam scans by the scanning means to a cathode ray tube that is scanned in synchronization with the scanning; and a means for displaying a sample image on the cathode ray tube; a means for switching the scanning by the scanning means between at least two modes in which the time required to scan one screen is longer or shorter; 1. A scanning electron microscope characterized by comprising means for switching the switching means in conjunction with operation of the sample driving means and automatically setting the short-time scanning mode during movement or rotation of the sample.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1873083U JPS59125056U (en) | 1983-02-10 | 1983-02-10 | scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1873083U JPS59125056U (en) | 1983-02-10 | 1983-02-10 | scanning electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59125056U true JPS59125056U (en) | 1984-08-23 |
Family
ID=30149908
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1873083U Pending JPS59125056U (en) | 1983-02-10 | 1983-02-10 | scanning electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59125056U (en) |
-
1983
- 1983-02-10 JP JP1873083U patent/JPS59125056U/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4183064A (en) | Video signal reproducing apparatus with electron beam scanning velocity modulation | |
| US4432014A (en) | Video-photo frame size coordinator | |
| JPS59125056U (en) | scanning electron microscope | |
| JPS581598B2 (en) | Display image correction method | |
| JP2775812B2 (en) | Charged particle beam equipment | |
| JPS59138162U (en) | scanning electron microscope | |
| JPH0343650Y2 (en) | ||
| JPH06284309A (en) | Monitor device | |
| JPH0228601Y2 (en) | ||
| JPS59134366U (en) | scanning electron microscope | |
| JPS599058B2 (en) | Character signal generation method | |
| JPS5928314B2 (en) | Deflection circuits in scanning electron microscopes, etc. | |
| JPH0410698B2 (en) | ||
| JPS6033751U (en) | scanning electron microscope | |
| JPS6020142Y2 (en) | Image scanning device in character signal generator | |
| JPH04209457A (en) | Analysis device for performing image display | |
| JPS616252U (en) | electron beam equipment | |
| SU909659A1 (en) | Device for producing raster pictures with non-uniform structure | |
| JPS59134259U (en) | scanning electron microscope | |
| JPS63259951A (en) | Scanning electron microscope with picture memory | |
| JPS58160460U (en) | electron beam equipment | |
| JPS5941854U (en) | scanning transmission electron microscope | |
| JPS61135457U (en) | ||
| JPH0355935B2 (en) | ||
| JPS59181574U (en) | electronic microscope |