JPS59109137U - シヤツタ− - Google Patents

シヤツタ−

Info

Publication number
JPS59109137U
JPS59109137U JP305383U JP305383U JPS59109137U JP S59109137 U JPS59109137 U JP S59109137U JP 305383 U JP305383 U JP 305383U JP 305383 U JP305383 U JP 305383U JP S59109137 U JPS59109137 U JP S59109137U
Authority
JP
Japan
Prior art keywords
gear
shutter
rotation
introducer
forming apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP305383U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0110920Y2 (enrdf_load_stackoverflow
Inventor
野口　今朝男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP305383U priority Critical patent/JPS59109137U/ja
Publication of JPS59109137U publication Critical patent/JPS59109137U/ja
Application granted granted Critical
Publication of JPH0110920Y2 publication Critical patent/JPH0110920Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP305383U 1983-01-13 1983-01-13 シヤツタ− Granted JPS59109137U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP305383U JPS59109137U (ja) 1983-01-13 1983-01-13 シヤツタ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP305383U JPS59109137U (ja) 1983-01-13 1983-01-13 シヤツタ−

Publications (2)

Publication Number Publication Date
JPS59109137U true JPS59109137U (ja) 1984-07-23
JPH0110920Y2 JPH0110920Y2 (enrdf_load_stackoverflow) 1989-03-29

Family

ID=30134690

Family Applications (1)

Application Number Title Priority Date Filing Date
JP305383U Granted JPS59109137U (ja) 1983-01-13 1983-01-13 シヤツタ−

Country Status (1)

Country Link
JP (1) JPS59109137U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011149086A (ja) * 2009-12-22 2011-08-04 Canon Anelva Corp スパッタリング装置及び電子デバイスの製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011149086A (ja) * 2009-12-22 2011-08-04 Canon Anelva Corp スパッタリング装置及び電子デバイスの製造方法

Also Published As

Publication number Publication date
JPH0110920Y2 (enrdf_load_stackoverflow) 1989-03-29

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