JPS59108380A - Piezoelectric material - Google Patents

Piezoelectric material

Info

Publication number
JPS59108380A
JPS59108380A JP57219883A JP21988382A JPS59108380A JP S59108380 A JPS59108380 A JP S59108380A JP 57219883 A JP57219883 A JP 57219883A JP 21988382 A JP21988382 A JP 21988382A JP S59108380 A JPS59108380 A JP S59108380A
Authority
JP
Japan
Prior art keywords
mno2
added
composition
sample
porcelain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57219883A
Other languages
Japanese (ja)
Inventor
Naoya Kitamura
直也 北村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Storage Battery Co Ltd
Nihon Denchi KK
Original Assignee
Japan Storage Battery Co Ltd
Nihon Denchi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Storage Battery Co Ltd, Nihon Denchi KK filed Critical Japan Storage Battery Co Ltd
Priority to JP57219883A priority Critical patent/JPS59108380A/en
Publication of JPS59108380A publication Critical patent/JPS59108380A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To produce the titled material easily polarized with low and minute porosity applicable in the high frequency region by a method wherein the composition thereof is specified by major component of Pb, TiO3 containing La, Bi, Nb with MnO2 added thereto. CONSTITUTION:The titled material is composed of Pb, TiO3 as major component containing La, Bi, Nb with MnO2 added thereto to be represented by the composition expression as formula I . Where: the values of x, y, z are respectively assumed to be x=0.01-0.10, y=0.02-0.10, z=0.1-0.5. For example, PbO, TiO2, Bi2O3, Nb2O3, MnO2 are weighed into specified composition ratio to be mixed evenly as the material. The material is calcined and after being milled by a ball mill etc., the resultant powder with a bit of binder such as water or polyvinylalcohol etc. added thereto is made even by passing it through a sieve to bake the green compact formed by the pressure of 0.5-1.0ton/cm<2> producing a piezoelectric ceramics by means of polarization.

Description

【発明の詳細な説明】 本発明は、王竃体材科に係り、さらに詳しくは、チタン
酸鉛tub Ti lJ@Jを主成分とするFE竃体は
料の改艮に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a ceramic housing material, and more specifically, relates to the modification of an FE housing containing lead titanate tub Ti IJ@J as a main component.

従来EEt体H料とLて、pb(Zr, ’ri )(
h tt I’Jbg(Js。
Conventional EEt body H material and L, pb (Zr, 'ri) (
h tt I'Jbg(Js.

k’e*()s等の各種添加物を加えて王室特性を改良
したものや, Pb(Zr, Ti) (Jsに複合ペ
ロブスカイトを固溶させt二三成分系圧電体材料などが
開発されており、超音波振動用素子,セラミックフイノ
レター用累子,EE方力センサー素子等広い分野で利用
さnている。
Piezoelectric materials with improved royal properties by adding various additives such as k'e*()s, and tricomponent piezoelectric materials made by solid-dissolving composite perovskite in Pb(Zr, Ti)(Js) have been developed. It is used in a wide range of fields, such as ultrasonic vibration elements, ceramic fin letters, EE direction force sensor elements, etc.

L 7)) L # b; Gr、コレt;, l’b
(Zr, ’ri ) (Js 系1f’llC体材料
は本R的に誘nt*が1000程度と大きく、高周波で
便用オろ場合、素子の入出力インピーダンスが低下して
外部接続回路とのイソピーダンス整合がとりにくくなる
という障害が生ずろ.またPb(Zr, 1!i)(J
s  系FTE竃体材科は厚み振動σ)結合係数Itと
、拡がり振動の結合係数Np  とが+15同じ程度の
値を持つrコめ、高周波において厚み振動を利用しよう
とすると、拡がり振動O)オーノ《一トーンによる振動
のスブーリアスが発生するという不都合が生ずる。
L 7)) L #b; Gr, this t;, l'b
(Zr, 'ri) (Js-based 1f'llC body material has a large inducement* of about 1000 in this R, and when used at high frequencies, the input/output impedance of the element decreases and the connection with external connection circuits is high.) There is no problem that it becomes difficult to achieve isopedance matching.Also, Pb(Zr, 1!i)(J
For the s-based FTE housing material, the thickness vibration σ) coupling coefficient It and the spreading vibration coupling coefficient Np have approximately the same value of +15.If you try to use the thickness vibration at high frequencies, the spreading vibration O) Ohno: ``The problem arises that a single tone causes vibration suborious.

これに対してpbTiOs  は誘電率が200程度と
小さいため高周波領域においてインピーダンス整合がと
りやすく、さらには厚み振動結合係数Kt  が拡がり
振動結合係数Lp に較べて大きいため、高周波におい
てスブリア番スが発生しにくいとL)う特徴がある。し
かしながら、PbTiOs  lよ焼結性.、−点があ
り緻密な焼結体が得られず、さらには外陣条件も200
’C以上の温度で1ull KV/e1M以上の電界印
加が必要と非常に厳しいfコめに実用化には困蝿があっ
た。
On the other hand, since pbTiOs has a small dielectric constant of about 200, it is easy to achieve impedance matching in the high frequency range, and furthermore, the thickness vibrational coupling coefficient Kt is spread out and is larger than the vibrational coupling coefficient Lp, so that subria frequency occurs at high frequencies. It has the characteristic of being difficult. However, PbTiOs has better sinterability. , - points, making it impossible to obtain a dense sintered body, and furthermore, the outside conditions were 200
It was difficult to put it into practical use because it required the application of an electric field of 1ull KV/e1M or more at a temperature of 100°C or more, which was very severe.

本発明の目的は前述のI’bT’i08  のもつ欠点
を改善し、高周波領域での用途に遇し、さらには、従来
のものに比咬して気孔率が小さく非゛帛に緻密であり、
かつ分肉操作も谷易なPb’l’1lJs  系圧電体
材料を提供する仁とにある。
The purpose of the present invention is to improve the above-mentioned drawbacks of I'bT'i08, to make it suitable for use in the high frequency range, and to have a less porosity and a less dense structure than conventional ones. ,
In addition, we are a company that provides Pb'l'1lJs-based piezoelectric materials that can be easily separated.

本発明に係るFEW体材料は、 l’b’l”1(Ja
  を干成分として、それにランタン(La ) 、ビ
スマス(BiJ、二オフ(Nb)を含有せしめ、二酸化
マンガン(MnUt )を少量添加することを特徴とす
るPbT’1(Ji  系圧電体材料である。La、 
Bi、 Nb  を食付させるにあたっては、そのイオ
ン半径を考慮し、 LaはPbTiUs)Phトa換り
、、Hi トNb ハPb’l’i(J++ )Ti 
トIll p −tろと考え、またIi子価については
、 Laが81i缶、Hiが8価、 Nbが5価として
、本究明の王室体材料ノ組成式を(Pbl−7La!/
17)((Bi1/2N111/2JXTil−008
+1重量%M−Ot    としてIFg員を合成した
The FEW body material according to the present invention has l'b'l"1 (Ja
This is a PbT'1 (Ji 2 -based piezoelectric material) characterized by containing lanthanum (La 2 ), bismuth (BiJ, and niobium (Nb)) as a dry component, and adding a small amount of manganese dioxide (MnUt 2 ). La,
When feeding Bi and Nb, take into account their ionic radii.
Assuming that La is 81i, Hi is octavalent, and Nb is pentavalent, the compositional formula of the royal body material of this investigation is (Pbl-7La!/
17) ((Bi1/2N111/2JXTil-008
The IFg member was synthesized as +1% by weight M-Ot.

−8−− 以F、本発明について詳しく説明オろ。-8-- The present invention will now be explained in detail.

本発明の圧電体材料は通常の粉末冶金的手法によって製
造ができろ。即ち、原料と1−では、1事〕。
The piezoelectric material of the present invention can be manufactured by conventional powder metallurgy techniques. In other words, the raw material and 1- are one thing].

TiUx、 )jig(Js、 Nbt06.LazU
s、 MnO20) Ill化物を所定の組FI<割合
に正確に秤重し、これらをボールミル等によって均一に
混合したものを中いる。
TiUx, )jig(Js, Nbt06.LazU
s, MnO20) Illide is accurately weighed to a predetermined ratio FI<, and the mixture is uniformly mixed using a ball mill or the like.

例えば、侵述の第1表中の試料黒7の組成について配合
割合を説明すると、原料全体の直遣を100トシテPb
L)、’I’it)g、Li5t)s、BitlJs、
Nb2U11  をそれぞれ68.7,25.1. 2
.5B、  1.92. 1.75の重量比で正確に秤
量して配合し、それに0.2重量%のMnUg を加え
たものをボールミル等によって均一に混合し1こものを
用いる。
For example, to explain the blending ratio for the composition of Sample Black 7 in Table 1 of the Incursion, the direct supply of the entire raw material is 100 toshite Pb.
L), 'I'it)g, Li5t)s, BitlJs,
Nb2U11 were 68.7 and 25.1, respectively. 2
.. 5B, 1.92. They were accurately weighed and blended at a weight ratio of 1.75, 0.2% by weight of MnUg was added thereto, and mixed uniformly using a ball mill or the like.

尚原料は特に酸化物に限られろものではなく、焼成、加
熱によって酸化物にかわる化合物、例えば水酸化物、炭
酸塩、7491w塩等であってもよい1次に前記原料を
高純度アルミするつぼ中にて800〜900℃の温度で
仮焼し、さらにボールミル等によって粉砕した後、得6
1だ粉末に水あるいはポリビニルアルコール等のバイシ
ダーを少量添加し4− た侵、篩を通してl[QL、0.5〜1.OLon/c
d )If力で成形し圧粉体とする。この圧粉体をアル
ミするつぼに密封装填し、電気炉中にて1180°〜1
25o’に程度の温度で焼成し磁器化する。
Note that the raw material is not limited to oxides in particular, but may also be compounds that can be converted into oxides by firing or heating, such as hydroxide, carbonate, 7491w salt, etc. First, the raw materials are placed in a high-purity aluminum crucible. After calcining at a temperature of 800 to 900°C and further pulverizing with a ball mill etc., the obtained 6.
1. Add a small amount of water or a bisider such as polyvinyl alcohol to the powder, stir, and pass through a sieve. OLon/c
d) Shape with If force to form a green compact. This green compact was hermetically loaded into an aluminum crucible and heated to 1180° to 1° in an electric furnace.
It is fired at a temperature of about 25o' to form porcelain.

最高温度での保持は、通常0.5〜2時間程度で十分で
ある。こうして得られた磁器を100〜160’Cのシ
リコン油中にて、40〜(iQKJ//&sの電(1)
で分陰処理を施し、製品とする。
Holding at the maximum temperature for about 0.5 to 2 hours is usually sufficient. The thus obtained porcelain was heated in silicone oil at 100-160'C for 40~(iQKJ//&s electricity (1)).
After applying shade treatment, the product is made into a product.

このようにして組成式Pb(1−y) La!/my 
〔(山I/2(7 Nb+/i )x ’l’i (+−xp UsのX及
びYを1々値に9え、はつこれにMnUg を2重量%
添加含有さけたものを試作し、得られた試料について日
本電子材料工業会標準規格EMA8−6001及び同6
008に記載された方法に従い広がり振動の結合係数K
p、厚み振動の結合体@V、t 等のEE[特性及び機
械同品゛6係敬伽を測定した。また浮力法によって焼成
体密度。
In this way, the composition formula Pb(1-y) La! /my
[(mountain I/2(7 Nb+/i)
We made a sample containing additives, and the obtained sample complied with the Japan Electronic Materials Industries Association Standards EMA8-6001 and EMA6001.
Coupling coefficient K of spreading vibration according to the method described in 008
The EE characteristics and mechanical properties of the combined body of thickness vibration @V, t, etc. were measured. Also, calculate the density of the fired body by the buoyancy method.

気孔率等を求めた。さらに111zの交流ブリッジを用
いて誘電率を測定した。それらの測定結果について第1
表にホす。(尚、表中において試料煮に…1印を付しt
コものは本発明の実施例である6) 6− − も − 第1表より明らかな如く、試料12はPbTiOs  
にBi、Nbをli!換含仔させた場合でありDi、 
Nbの含有により気孔率の小さい緻密な磁器が得られる
が、l:E!電性能悪い。
The porosity etc. were determined. Furthermore, the dielectric constant was measured using a 111z AC bridge. Regarding those measurement results,
Put it on the table. (In addition, in the table, 1 mark is added to the boiled sample.
As is clear from Table 1, sample 12 is an example of the present invention.
Bi, Nb to li! In the case of transmutation, Di,
By containing Nb, dense porcelain with low porosity can be obtained, but l:E! Poor electrical performance.

試f48 ハPbTi(Js +c LaをWt#含何
食付た例であり、La  の瞳喚含■により、■電性能
の向上が認められたが、気孔率が大きく緻密なものが得
られj(カッタ。Di、Nbの含有allについては試
料4よ1+ X = 0.005の場合気孔率が大きく
緻密な磁器が得られず、一方試料5よりx=o、otの
場合、気孔率が小さく緻密でFE!性能が良好な磁気が
得ら釘たことから、Xは0.01以辷とする必要がある
ことが確かめられtコ。また試料9よりX=02の場合
緻密でFE電性能も比較的良好な磁器が得られるが、こ
の組成のものは、情成後磁器を数周間11−でおくと、
@器に、l1Ilt1が生じ、磁器の安定性に間1があ
り、一方、試料8でX = O,tの場合は、そのよう
な四項がなかったので、Xの値をO1以下と才ろことが
望ましい。
Test F48 is an example of PbTi (Js + c La containing Wt#), and an improvement in electrical performance was observed due to the inclusion of La, but a dense one with a large porosity was obtained. (Cutter. Regarding all containing Di and Nb, compared to sample 4, when 1+ Since a magnet with good density and FE! performance was obtained, it was confirmed that Although relatively good porcelain can be obtained with this composition, if the porcelain is left at 11- for several cycles after fertilization,
In the @ vessel, l1Ilt1 occurs, and there is a gap of 1 in the stability of the porcelain.On the other hand, in the case of X = O, t in sample 8, there was no such four terms, so the value of X was set to be less than O1. Preferably.

さらに、 La  の含有晴げについては試料10 よ
n、Y=u、otのt@台、圧電性能の同tかはと九と
−4らnず、一方試料11より、Y=0.02の場合、
光分な1王11L性能を何する磁器が得られたので、Y
の値は旧)2以上とした。また試料18  よりY =
0.2の場合、誘電率が媚く、高周波においてイ′/ビ
ーダンスの整合がし褐いというPbTiOs  の祠点
を光分に生かすことができず、一方、M料12よりY二
0.1の場合はそのようなことがなかったことからYの
値として01を越えるものは望ましくないことが催かめ
られt二。
Furthermore, regarding the content of La, sample 10 has Y = u, ot, and the piezoelectric performance is the same as 9 and -4, while sample 11 has Y = 0.02. in the case of,
Since we have obtained a porcelain that has the performance of 1K 11L in terms of light, Y
The value of (old) was set to be 2 or more. Also, from sample 18, Y =
In the case of 0.2, it is not possible to take advantage of the advantages of PbTiOs that the permittivity is attractive and the matching of I'/beadance is brown at high frequencies. Since this did not occur in the case of , it was concluded that a value of Y exceeding 01 is not desirable.

MnL3gの添加喰については、試14414より2=
005 の場合気孔率が太き(緻密なm器が得られず、
一方、試料7よりz=01の場合は、気孔率が小さく@
沼で、Ff:を性能が良好な11d器が得られ    
 ゛たことから、2は01以七とする必要があることが
確かめられた。また試料16よりZ = toの場合気
孔率が大きく、EE亀性能も悪い磁器しか得られず、一
方、試料16よりZ = 0.Iiでは緻密で千成性能
が艮好な磁器が得6またので2の値として(15以下と
することが望ましい。
Regarding the addition of 3g of MnL, 2 = from trial 14414.
In the case of 005, the porosity is large (dense m-cells cannot be obtained,
On the other hand, compared to sample 7, when z=01, the porosity is small @
In the swamp, a 11d device with good Ff performance was obtained.
From this, it was confirmed that 2 needs to be between 01 and 7. Also, compared to Sample 16, when Z = to, only porcelain with large porosity and poor EE performance was obtained; on the other hand, when Z = 0. In Ii, a fine porcelain with excellent quality is obtained, so the value is set to 2 (preferably 15 or less).

試料5〜f3 、 11.12.15により円+[’i
0sにPb(山1/2Nb+/1)(Js トLaを同
時に4当な峨だけ*4固創させMnUg を添加するこ
とによって、気孔率が小さく緻密で、しかも圧電性能の
優れた+41電が得られろことがわかる。さらには試料
6.7より本発明の1モ[材料は1150〜12+10
’cという比較的広い1結温度範囲を持ち、従来のPb
TiUsの焼成/I!闇範囲が非常に狭く、焼結が困難
であるのに較べて磁器を製荷するLで付和であることが
わかる。
Sample 5~f3, 11.12.15 gives yen + ['i
By adding MnUg to 0s with Pb (mountain 1/2Nb+/1) (Js and La fixed at the same time), +41 electricity with small porosity and denseness and excellent piezoelectric performance was created. Furthermore, from sample 6.7, it can be seen that 1 mo of the present invention [material is 1150 to 12+10
It has a relatively wide temperature range of 'c' and has a relatively wide temperature range of
Firing of TiUs/I! It can be seen that the dark range is very narrow and sintering is difficult, but it is easier to manufacture porcelain at L.

以上の実験結果より本発明においては、組成式%式% ′を量%MnUz と表わしたときに、+rHの旧、 
Nbによる置換含有@Xを0.01〜0.1にまたPb
 (D La ニよる置換置Yを0.02〜(1,11
0ニ、MnC)x O’)添mtz′@墳影を01〜0
5に限定した。
Based on the above experimental results, in the present invention, when the compositional formula % formula %' is expressed as the amount %MnUz, the former of +rH,
Substitution with Nb @X to 0.01 to 0.1 and Pb
(D La substitution Y by 0.02 to (1,11
0 ni, MnC) x O') attachment mtz'@fune 01~0
Limited to 5.

即ち、ヒf組成において、X<0.01では焼結性が悪
く、M+密な磁器が得られず、またX>O,tでは焼結
体の機械的強度が低下し、喘結体に割れが生じやすくな
り、機械的な加工番こ耐えられなくなるからである。
That is, in the H f composition, when X < 0.01, the sinterability is poor and M + dense porcelain cannot be obtained, and when X > O, t, the mechanical strength of the sintered body decreases and the sintered body becomes a compact. This is because cracks tend to occur and cannot withstand mechanical processing.

9− −4 r: Pb o)La +t ヨロ置換竜Yを0
.02−0.10 ト限定したのは0.02より少なく
ては材料のEE電性能の同上があまりみられず、Phi
’i(Jg  千醒体材料の分陰を容易に才ろというr
It換の効県があまり見られないからであり、02以t
に置換すると誘!*が高くなるとともに、温度安T性が
悪くなるという傾向があられれるからである。
9- -4 r: Pb o) La +t Yoro substitution dragon Y to 0
.. 02-0.10 is less than 0.02, the same as the EE electric performance of the material is not seen, and the Phi
'i
This is because the effect of IT exchange is not seen very much, and since 02
Replacing it with invites! This is because there is a tendency for the temperature stability T property to deteriorate as the * becomes higher.

Mn 01の添加艦2重量%を0.1〜0.5と限定し
たのは01より少ない範囲及び1.0以七の範囲では緻
密で■電性能の良好な磁器が得にくいからである。
The reason why the 2% by weight of Mn 01 added is limited to 0.1 to 0.5 is because it is difficult to obtain dense porcelain with good electrical performance in the range less than 01 or in the range 1.0 or more.

本発明により次に記載するような効果を得ることが出来
る。
According to the present invention, the following effects can be obtained.

1j!lに従来PbTi01  単独では焼結性が悪く
、実用に耐えろ磁器を得ろことが困舘であっt;が、本
発明の材料組成により、焼結温度範囲が広くなり、bI
i器の焼結を容易ならしめられろ。このため非常に緻密
で機械的にも強固なPhTi0@  系pE!体材料が
得られる。    ゛ fR2に従来PbTi0m  単独では、分−が非常に
困−lリ − 錐であったが、不発明の材料組成にまり分陰を容易にす
ることができる。
1j! Conventionally, PbTi01 alone had poor sinterability and it was difficult to obtain a porcelain that could withstand practical use; however, the material composition of the present invention widens the sintering temperature range, and
Please make the sintering of I-ware easier. For this reason, PhTi0@ system pE is extremely dense and mechanically strong! Body material is obtained. Conventionally, when PbTi0m alone was used as fR2, it was very difficult to obtain a ray cone, but the inventive material composition makes it possible to easily obtain a shade.

即ち、従来のPbTi(J++  を分−するには、1
00℃以上の!ifで10tl KV/as以上の電界
印加が必要であつtコが、本発明によるBE屯棒体材料
は100〜160’0.40〜66 KV/個という緩
和された分電条件で光分である。そのためM電率が低く
、さらには厚み振動の結合係数Kt が拡がり振動の結
合係数Kpに較べて大きいというような、 Pb’l’
i0*  の特徴を@易ニ、かつ十分に引き出すことが
できろ。
That is, to separate the conventional PbTi (J++), 1
Over 00℃! Although it is necessary to apply an electric field of 10 tl KV/as or more at IF and t, the BE ton rod material according to the present invention can be be. Therefore, Pb'l' has a low M electrical conductivity and the coupling coefficient Kt of thickness vibration is larger than the coupling coefficient Kp of spreading vibration.
Be able to bring out the characteristics of i0* easily and fully.

以上述べた如く本発明によれば緻密で機械的な加工に光
分耐え得るだけの#闇をもつ焼結体が、通常の粉末冶金
的手法で容易に1lllj造できろ、yLfコこの干電
体材料は厚み振動の結合1係QKt が拡がり振動の結
合係数Kp に較べて大きいため、高周波においてスプ
リアスが発生しに<<、さらには#%電電率低いため、
高周波においてインピーダンスの整合がしやずいという
利点があり、高周波での応用、例えば高周波フィルター
、高周波共振子等に特に有用である。
As described above, according to the present invention, a sintered body that is dense and dark enough to withstand mechanical processing can be easily produced by ordinary powder metallurgy techniques. Since the coupling coefficient QKt of the thickness vibration of the body material is larger than the coupling coefficient Kp of the spreading vibration, spurious noise is generated at high frequencies, and furthermore, the electrical conductivity is low by #%.
It has the advantage of easy impedance matching at high frequencies, and is particularly useful for high frequency applications, such as high frequency filters and high frequency resonators.

 11− 420−11- 420-

Claims (1)

【特許請求の範囲】 チタン#給(p b ’C1ym )を主成分とし、ラ
ソタンCL& )tビスマス(おり、ニオブ(Nb) 
 を含有せしめ、二酸化マ゛ノガン(MnlJ! ) 
 を添加しtコ田畦体材料において、その@成式を (pHl −y Lag/ay月:(Hi +/1Nb
j4)xTi +−x)tJs+を重重%M]02で表
わしたとき、X、工2の値を、! = (1,01〜0
10゜y = 0.02〜0.10.  z = 0.
1〜0.5  と1. r: c トを特徴とする匝電
停材料。
[Claims] The main component is titanium (pb'C1ym), lasotan CL&)t bismuth (or niobium (Nb)).
Contains manganese dioxide (MnlJ!)
In the field ridge material, the formula is (pHl -y Lag/ay month: (Hi +/1Nb
When j4)xTi +-x)tJs+ is expressed as weight%M]02, the values of X and engineering 2 are,! = (1,01~0
10°y = 0.02~0.10. z = 0.
1-0.5 and 1. r: A stopover material characterized by c.
JP57219883A 1982-12-14 1982-12-14 Piezoelectric material Pending JPS59108380A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57219883A JPS59108380A (en) 1982-12-14 1982-12-14 Piezoelectric material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57219883A JPS59108380A (en) 1982-12-14 1982-12-14 Piezoelectric material

Publications (1)

Publication Number Publication Date
JPS59108380A true JPS59108380A (en) 1984-06-22

Family

ID=16742543

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57219883A Pending JPS59108380A (en) 1982-12-14 1982-12-14 Piezoelectric material

Country Status (1)

Country Link
JP (1) JPS59108380A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61236176A (en) * 1985-04-11 1986-10-21 Murata Mfg Co Ltd Piezoelectric ceramics composition

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61236176A (en) * 1985-04-11 1986-10-21 Murata Mfg Co Ltd Piezoelectric ceramics composition
JPH0517188B2 (en) * 1985-04-11 1993-03-08 Murata Manufacturing Co

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